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公开(公告)号：US20050046849A1
公开(公告)日：2005-03-03
申请号：US10928484
申请日：2004-08-26
CPC分类号： G01N21/6452 , G01N21/6408 , G01N21/6445 , G01N21/6458 , G01N2021/6484 , G02B21/0048 , G02B21/0068 , G02B21/0076 , G02B21/16
摘要： Methods and apparatus, including computer program products, implementing and using techniques for collecting optical data pertaining to one or more characteristics of a sample. A light beam of a first frequency is scanned onto a sample surface using one or more illumination optical elements. Light of a second frequency is collected from a scan line on the sample surface using one or more collection optical elements. None of the one or more collection optical elements are included among the one or more illumination optical elements. The collected light is transmitted to a detector.
摘要翻译： 方法和装置，包括计算机程序产品，用于收集与样品的一个或多个特征有关的光学数据的实施和使用技术。 使用一个或多个照明光学元件将第一频率的光束扫描到样品表面上。 使用一个或多个收集光学元件从样品表面上的扫描线收集第二频率的光。 在一个或多个照明光学元件中不包括一个或多个收集光学元件。 所收集的光被传送到检测器。
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公开(公告)号：US20050046848A1
公开(公告)日：2005-03-03
申请号：US10927748
申请日：2004-08-26
CPC分类号： G01N21/6452 , G01N21/6408 , G01N21/6445 , G01N21/6458 , G01N2021/6484 , G02B21/0048 , G02B21/0068 , G02B21/0076 , G02B21/16
摘要： Methods and apparatus, including computer program products, implementing and using techniques for collecting optical data pertaining to one or more characteristics of a sample. The apparatus has a light source, one or more illumination optical elements, a scanner, one or more collection optical elements, and a device forming an aperture that limits detection of light from the sample. The illumination optical elements direct a light beam from the light source onto the sample. The scanner scans the light beam across the sample. The collection optical elements collect light from the sample and transmit the collected light to a detector. None of the collection optical elements are included among the illumination optical elements. The device forming an aperture limits detection of light from the sample to light associated with a limited vertical depth within the sample, and is one of the collection optical elements.
摘要翻译： 方法和装置，包括计算机程序产品，用于收集与样品的一个或多个特征有关的光学数据的实施和使用技术。 该装置具有光源，一个或多个照明光学元件，扫描器，一个或多个收集光学元件，以及形成限制来自样品的光的检测的孔径的装置。 照明光学元件将来自光源的光束引导到样品上。 扫描仪扫描样品上的光束。 收集光学元件收集来自样品的光并将收集的光传输到检测器。 在照明光学元件中不包括收集光学元件。 形成孔径的装置将从样品的光的检测限制到与样品内的有限垂直深度相关联的光，并且是收集光学元件之一。
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公开(公告)号：US20050046847A1
公开(公告)日：2005-03-03
申请号：US10647855
申请日：2003-08-25
申请人： Evan Cromwell , Andrei Brunfeld
发明人： Evan Cromwell , Andrei Brunfeld
CPC分类号： G01N21/6454 , B01J2219/00693 , B01J2219/00702 , B01L3/5085 , B01L2300/0654 , B01L2300/0829
摘要： An active sensor a method for optical illumination and detection provides low cost and high-speed optical scanning of bio-arrays, DNA samples/chips, semiconductors, micro-electromechanical systems and other samples requiring inspection or measurement. A plurality of illumination sources forming a parallel multi-pixel array is used to illuminate one or more samples via an imaging system or by placement in close proximity to the samples. The array may be a line array or a two-dimensional array. A plurality of detectors is integrated within the multi-pixel illumination array or provided in a separate array, each detector for detecting optical properties of the sample that results from illumination by one or more associated illumination sources. One detector may be associated with multiple illuminators or one illuminator may be associated with multiple detectors. Filters may be integrated within the illumination path and/or detection paths to provide wavelength and/or polarization discrimination capability and microlenses may also be incorporated within the illumination path and/or detection paths to provide focusing or imaging. The illumination sources may be provided by TFT-LCD devices, diode emitters, organic LEDs (OLEDs), vertical cavity emitting lasers (VCELs) or other light sources that may be integrated to form a high-density illumination matrix. The detectors may be PIN photo-diodes or other suitable detectors that are capable of integration within the illumination matrix.
摘要翻译： 有源传感器用于光学照明和检测的方法提供生物阵列，DNA样品/芯片，半导体，微机电系统和需要检查或测量的其它样品的低成本和高速光学扫描。 形成并行多像素阵列的多个照明光源用于经由成像系统照亮一个或多个样品，或通过放置在样品附近。 阵列可以是线阵列或二维阵列。 多个检测器集成在多像素照明阵列内或者设置在单独的阵列中，每个检测器用于检测由一个或多个相关照明源照明产生的样品的光学性质。 一个检测器可以与多个照明器相关联，或者一个照明器可以与多个检测器相关联。 滤光器可以集成在照明路径和/或检测路径内以提供波长和/或极化鉴别能力，并且微透镜还可以并入照明路径和/或检测路径内以提供聚焦或成像。 照明源可以由TFT-LCD器件，二极管发射器，有机LED（OLED），垂直腔发射激光器（VCEL）或其它可以集成以形成高密度照明矩阵的光源提供。 检测器可以是能够集成在照明矩阵内的PIN光电二极管或其它合适的检测器。
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公开(公告)号：US20080174842A1
公开(公告)日：2008-07-24
申请号：US12072047
申请日：2008-02-22
IPC分类号： G02B26/08
CPC分类号： G01N21/6452 , G01N21/6408 , G01N21/6445 , G01N21/6458 , G01N2021/6484 , G02B21/0048 , G02B21/0068 , G02B21/0076 , G02B21/16
摘要： Methods and apparatus, including computer program products, implementing and using techniques for collecting optical data pertaining to one or more characteristics of a sample. The apparatus has a light source, one or more illumination optical elements, a scanner, one or more collection optical elements, and a device forming an aperture that limits detection of light from the sample. The illumination optical elements direct a light beam from the light source onto the sample. The scanner scans the light beam across the sample. The collection optical elements collect light from the sample and transmit the collected light to a detector. None of the collection optical elements are included among the illumination optical elements. The device forming an aperture limits detection of light from the sample to light associated with a limited vertical depth within the sample, and is one of the collection optical elements.
摘要翻译： 方法和装置，包括计算机程序产品，用于收集与样品的一个或多个特征有关的光学数据的实施和使用技术。 该装置具有光源，一个或多个照明光学元件，扫描器，一个或多个收集光学元件，以及形成限制来自样品的光的检测的孔径的装置。 照明光学元件将来自光源的光束引导到样品上。 扫描仪扫描样品上的光束。 收集光学元件收集来自样品的光并将收集的光传输到检测器。 在照明光学元件中不包括收集光学元件。 形成孔径的装置将从样品的光的检测限制到与样品内的有限垂直深度相关联的光，并且是收集光学元件之一。
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公开(公告)号：US07253891B2
公开(公告)日：2007-08-07
申请号：US10753391
申请日：2004-01-09
申请人： Gregory Toker , Andrei Brunfeld , Ilia Lutsker
发明人： Gregory Toker , Andrei Brunfeld , Ilia Lutsker
CPC分类号： G01N21/8806 , G01N21/95684 , G01N2021/1772 , G01N2021/1785 , G01N2021/8887 , G01N2201/06113
摘要： Apparatus for sensing information regarding a surface including a first plurality of optical elements arranged to acquire two dimensional information about a surface, a second plurality of optical elements arranged to acquire topographical information about the surface, wherein the first plurality and the second plurality of optical elements are arranged to simultaneously provide the two dimensional information and the topographical information to at least partially non-overlapping portions of a single sensor array.
摘要翻译： 用于感测关于包括布置成获取关于表面的二维信息的第一多个光学元件的表面的信息的设备，布置成获取关于表面的形貌信息的第二多个光学元件，其中第一多个和第二多个光学元件 布置成同时向单个传感器阵列的至少部分不重叠的部分提供二维信息和形貌信息。
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6.发明申请OPTICAL MEASURING SYSTEM WITH MATCHED COLLECTION LENS AND DETECTOR LIGHT GUIDE 审中-公开光学测量系统，具有匹配的收集镜头和探测器指南公开(公告)号：US20120057154A1
公开(公告)日：2012-03-08
申请号：US12877480
申请日：2010-09-08
申请人： Andrei Brunfeld , Bryan Clark , Gregory Toker , Morey T. Roscrow
发明人： Andrei Brunfeld , Bryan Clark , Gregory Toker , Morey T. Roscrow
IPC分类号： G01N21/88
CPC分类号： G01N21/8806
摘要： An optical surface inspection system provides dark-field detection avoiding ghost images and without capturing, stray, reflected or re-scattered light. The system includes an illumination system that generates an illumination spot on a surface under inspection collecting lens that collects substantially all light scattered from the surface under inspection from the illumination spot. The system also includes a light guide with a first end having a numerical aperture matched to an exit aperture of the collecting lens and a field of view matched to the illumination spot, and a second end coupled to a detector.
摘要翻译： 光学表面检查系统提供暗场检测，避免重影，并且不捕获，杂散，反射或再散射光。 该系统包括照明系统，其在检查收集透镜的表面上产生基本上从照明点检测的表面散射的所有光的照明点。 该系统还包括光导，其具有与收集透镜的出射孔匹配的数值孔径的第一端和与照明点匹配的视场，以及耦合到检测器的第二端。
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公开(公告)号：US07576862B2
公开(公告)日：2009-08-18
申请号：US10928484
申请日：2004-08-26
IPC分类号： G01N21/55
CPC分类号： G01N21/6452 , G01N21/6408 , G01N21/6445 , G01N21/6458 , G01N2021/6484 , G02B21/0048 , G02B21/0068 , G02B21/0076 , G02B21/16
摘要： Methods and apparatus, including computer program products, implementing and using techniques for collecting optical data pertaining to one or more characteristics of a sample. A light beam of a first frequency is scanned onto a sample surface using one or more illumination optical elements. Light of a second frequency is collected from a scan line on the sample surface using one or more collection optical elements. None of the one or more collection optical elements are included among the one or more illumination optical elements. The collected light is transmitted to a detector.
摘要翻译： 方法和装置，包括计算机程序产品，用于收集与样品的一个或多个特征有关的光学数据的实施和使用技术。 使用一个或多个照明光学元件将第一频率的光束扫描到样品表面上。 使用一个或多个收集光学元件从样品表面上的扫描线收集第二频率的光。 在一个或多个照明光学元件中不包括一个或多个收集光学元件。 所收集的光被传送到检测器。
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8.发明授权Resonant ellipsometer and method for determining ellipsometric parameters of a surface 失效用于确定表面椭圆参数的共振椭偏仪和方法公开(公告)号：US07330277B2
公开(公告)日：2008-02-12
申请号：US11156309
申请日：2005-06-17
申请人： Andrei Brunfeld , Gregory Toker , Bryan Clark
发明人： Andrei Brunfeld , Gregory Toker , Bryan Clark
IPC分类号： G01B9/02
CPC分类号： G01N21/211
摘要： A resonant ellipsometer and method for determining ellipsometric parameters of a surface provide an efficient and low-cost mechanism for performing ellipsometric measurements. A surface of interest is included as a reflection point of a resonance optical path within a resonator. The intersection of the resonance optical path with the surface of interest is at an angle away from normal so that the complex reflectivity of the surface alters the phase of the resonance optical path. Intensity measurements of light emitted from a partially reflective surface of the resonator for orthogonal polarizations and for at least two effective cavity lengths provide complete information for computing the ellipsoidal parameters on the surface of interest. The resonator may be a Fabry-Perot resonator or a ring resonator. The wavelength of the illumination can be swept, or the cavity length mechanically or electronically altered to change the cavity length.
摘要翻译： 用于确定表面的椭偏参数的共振椭偏仪和方法为执行椭圆测量提供了一种有效和低成本的机制。 感兴趣的表面被包括在谐振器内的谐振光路的反射点。 共振光路与感兴趣的表面的交点与正常的角度成一角度，使得表面的复反射率改变了共振光路的相位。 从谐振器的部分反射表面发射的用于正交偏振和至少两个有效腔长度的强度测量提供用于计算感兴趣的表面上的椭圆体参数的完整信息。 谐振器可以是法布里 - 珀罗谐振器或环形谐振器。 可以扫描照明的波长，或者机械地或电子地改变空腔长度以改变腔的长度。
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9.发明授权Method and system for optical measurement via a resonator having a non-uniform phase profile 有权通过具有不均匀相位分布的谐振器进行光学测量的方法和系统公开(公告)号：US07193725B2
公开(公告)日：2007-03-20
申请号：US10770866
申请日：2004-02-02
申请人： Andrei Brunfeld , Bryan Clark
发明人： Andrei Brunfeld , Bryan Clark
IPC分类号： G01B9/02
CPC分类号： G01J3/4338 , G01N21/39 , G02B26/001
摘要： A method and system for optical measurement via a resonator having a non-uniform phase profile provides a mechanism for measuring and/or detecting sub-micron surface features with increased resolution. A second surface forming part of a resonator is illuminated through a first partially reflective surface that has a non-uniform phase profile that transitions from negative to positive phase with respect to a resonance phase value of the resonator. As a result, a reduced spot size is produced at the second surface, which enhances the resolution of a measurement and/or detection of surface features on the second surface. Additionally, if a discontinuity is provided in the non-uniform phase profile, interaction of the discontinuity with surface features of the second surface will provide enhanced resolution of the surface features. The resolution of the system is improved over the resolution that can be attained using a Fabry-Perot resonator.
摘要翻译： 通过具有不均匀相位轮廓的谐振器进行光学测量的方法和系统提供用于以更高分辨率测量和/或检测亚微米表面特征的机构。 通过第一部分反射表面照射形成谐振器的一部分的第二表面，其具有相对于谐振器的谐振相位值从负相转变到正相的非均匀相位分布。 结果，在第二表面产生了减小的光点尺寸，这提高了测量的分辨率和/或第二表面上的表面特征的检测。 另外，如果在非均匀相位轮廓中提供不连续性，则不连续性与第二表面的表面特征的相互作用将提供增强的表面特征分辨率。 相对于使用法布里 - 珀罗谐振器可以获得的分辨率，系统的分辨率得到改善。
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公开(公告)号：US07170605B2
公开(公告)日：2007-01-30
申请号：US10647855
申请日：2003-08-25
IPC分类号： G01N21/25
CPC分类号： G01N21/6454 , B01J2219/00693 , B01J2219/00702 , B01L3/5085 , B01L2300/0654 , B01L2300/0829
摘要： An active sensor a method for optical illumination and detection provides low cost and high-speed optical scanning of bio-arrays, DNA samples/chips, semiconductors, micro-electromechanical systems and other samples requiring inspection or measurement. A plurality of illumination sources forming a parallel multi-pixel array is used to illuminate one or more samples via an imaging system or by placement in close proximity to the samples. The array may be a line array or a two-dimensional array. A plurality of detectors is integrated within the multi-pixel illumination array or provided in a separate array, each detector for detecting optical properties of the sample that results from illumination by one or more associated illumination sources. One detector may be associated with multiple illuminators or one illuminator may be associated with multiple detectors. Filters may be integrated within the illumination path and/or detection paths to provide wavelength and/or polarization discrimination capability and microlenses may also be incorporated within the illumination path and/or detection paths to provide focusing or imaging. The illumination sources may be provided by TFT-LCD devices, diode emitters, organic LEDs (OLEDs), vertical cavity emitting lasers (VCELs) or other light sources that may be integrated to form a high-density illumination matrix. The detectors may be PIN photo-diodes or other suitable detectors that are capable of integration within the illumination matrix.
摘要翻译： 有源传感器用于光学照明和检测的方法提供生物阵列，DNA样品/芯片，半导体，微机电系统和需要检查或测量的其它样品的低成本和高速光学扫描。 形成并行多像素阵列的多个照明光源用于经由成像系统照亮一个或多个样品，或通过放置在样品附近。 阵列可以是线阵列或二维阵列。 多个检测器集成在多像素照明阵列内或者设置在单独的阵列中，每个检测器用于检测由一个或多个相关照明源照明产生的样品的光学性质。 一个检测器可以与多个照明器相关联，或者一个照明器可以与多个检测器相关联。 滤光器可以集成在照明路径和/或检测路径内以提供波长和/或极化鉴别能力，并且微透镜还可以并入照明路径和/或检测路径内以提供聚焦或成像。 照明源可以由TFT-LCD器件，二极管发射器，有机LED（OLED），垂直腔发射激光器（VCEL）或其它可以集成以形成高密度照明矩阵的光源提供。 检测器可以是能够集成在照明矩阵内的PIN光电二极管或其它合适的检测器。
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