公开(公告)号：US09934936B2

公开(公告)日：2018-04-03

申请号：US14884520

申请日：2015-10-15

申请人： FEI Company

发明人： Pavel Potocek ,  Franciscus Martinus Henricus Maria van Laarhoven ,  Faysal Boughorbel ,  Remco Schoenmakers ,  Peter Christiaan Tiemeijer

IPC分类号： H01J37/21 ,  H01J37/28 ,  H01J37/26

CPC分类号： H01J37/21 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/216 ,  H01J2237/2802

摘要： A Charged Particle Microscope includes A specimen holder, for holding a specimen; A source, for producing a beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; and A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation. The illuminator includes: An aperture plate comprising an aperture region in a path of said beam, for defining a geometry of the beam prior to its impingement upon said specimen. The aperture region includes a distribution of multiple holes, each of which is smaller than a diameter of the beam incident on the aperture plate.

公开(公告)号：US20160111247A1

公开(公告)日：2016-04-21

申请号：US14884520

申请日：2015-10-15

申请人： FEI Company

发明人： Pavel Potocek ,  Franciscus Martinus Henricus Maria van Laarhoven ,  Faysal Boughorbel ,  Remco Schoenmakers ,  Peter Christiaan Tiemeijer

IPC分类号： H01J37/21 ,  H01J37/05 ,  H01J37/28

CPC分类号： H01J37/21 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/216 ,  H01J2237/2802

摘要： A Charged Particle Microscope, comprising: includes A specimen holder, for holding a specimen; A source, for producing a beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; and A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation. The illuminator includes: An aperture plate comprising an aperture region in a path of said beam, for defining a geometry of the beam prior to its impingement upon said specimen. The aperture region includes a distribution of multiple holes, each of which is smaller than a diameter of the beam incident on the aperture plate.

摘要翻译： 带电粒子显微镜，包括：包括用于保持样本的样本保持器; 用于生产带电粒子束的源头; 用于引导所述光束以照射所述样本的照明器; 和A检测器，用于响应于所述照射来检测从样品发出的辐射通量。 照明器包括：孔板，其包括在所述梁的路径中的孔区域，用于在其撞击到所述样本之前限定所述梁的几何形状。 开口区域包括多个孔的分布，每个孔小于入射在孔板上的束的直径。