公开(公告)号：US20250104962A1

公开(公告)日：2025-03-27

申请号：US18473035

申请日：2023-09-22

Applicant: FEI Company

Inventor： Christopher Thompson ,  Hans Persoon ,  Ruud Schampers

IPC: H01J37/28 ,  H01J37/20 ,  H01J37/22

Abstract: A sample carrier for a charged particle microscope. The sample carrier comprises a planar or substantially planar body, an opening, and at least one protrusion. The opening is provided in the planar or substantially planar body. The protrusion extends into the opening within a plane defined by the planar or substantially planar body. The protrusion is configured to hold a charged particle microscopy sample.

公开(公告)号：US12123816B2

公开(公告)日：2024-10-22

申请号：US17353604

申请日：2021-06-21

Applicant: FEI Company

Inventor： Ronald Lamers ,  Hans Persoon ,  Alphons Theophile Augusta Maria de Waele ,  Theo Ruijl ,  Hugo van Leeuwen

IPC: G01N1/42 ,  F25D19/00 ,  G01N1/44 ,  H01J37/26

CPC classification number: G01N1/42 ,  F25D19/006 ,  G01N1/44 ,  H01J37/261 ,  H01J2237/2001

Abstract: Apparatus and methods are disclosed for vibration-free cryogenic cooling, suitable for TEM and other analytic equipment. A thermal battery includes one or more of: a cryocooler, a thermal switch, a thermal cold storage reservoir, and a cold finger. The thermal reservoir is mounted outside a sample chamber. The cold finger provides thermal coupling between the reservoir and a sample holder inside the sample chamber. In varying embodiments, sample holder and sample temperatures are regulated by a heater or by an inline variable thermal resistor. Cyclic phased operation includes cooling the reservoir, decoupling the cryocooler from the reservoir, and temperature-regulated passive vibration-free thermal energy extraction from sample to reservoir. The described system delivers a stand time of 12 hours at 20 K. Temperature regulation, a hybrid thermal switch, damping of thermal fluctuations, and material selection are described.

公开(公告)号：US20250003845A1

公开(公告)日：2025-01-02

申请号：US18886921

申请日：2024-09-16

Applicant: FEI Company

Inventor： Ronald Lamers ,  Hans Persoon ,  Alphons Theophile Augusta Maria de Waele ,  Theo Ruijl ,  Hugo van Leeuwen

IPC: G01N1/42 ,  F25D19/00 ,  G01N1/44 ,  H01J37/26

Abstract: Apparatus and methods are disclosed for vibration-free cryogenic cooling, suitable for TEM and other analytic equipment. A thermal battery includes one or more of: a cryocooler, a thermal switch, a thermal cold storage reservoir, and a cold finger. The thermal reservoir is mounted outside a sample chamber. The cold finger provides thermal coupling between the reservoir and a sample holder inside the sample chamber. In varying embodiments, sample holder and sample temperatures are regulated by a heater or by an inline variable thermal resistor. Cyclic phased operation includes cooling the reservoir, decoupling the cryocooler from the reservoir, and temperature-regulated passive vibration-free thermal energy extraction from sample to reservoir. The described system delivers a stand time of 12 hours at 20 K. Temperature regulation, a hybrid thermal switch, damping of thermal fluctuations, and material selection are described.

公开(公告)号：US11802823B2

公开(公告)日：2023-10-31

申请号：US17523246

申请日：2021-11-10

Applicant: FEI Company

Inventor： Vojt{hacek over (e)}ch Dole{hacek over (z)}al ,  Hans Persoon ,  John Mitchels

IPC: G01N1/42 ,  H01J37/20 ,  H01J37/26

CPC classification number: G01N1/42 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2007

Abstract: The invention relates to a Cryo-Charged Particle (CCP) sample handling and storage system. The system is used for storing and handling cryo-samples for use in charged particle microscopy, such as cryo-electron microscope samples for use in cryo-transmission electron microscopy. The system comprises a storage apparatus for storing a plurality of CCP samples, and a Charged Particle Apparatus (CPA), such as a cryo-TEM, at a location remote from said storage apparatus. The system further comprises a transfer device that is releasably connectable to said storage apparatus, and that is releasably connectable to said CPA as well. As defined herein, said transfer device is arranged for acquiring a CCP sample from said plurality of CCP samples when connected to said storage apparatus, and arranged for transferring said CCP sample from said transfer device to said CPA when connected to said CPA.

公开(公告)号：US20220404247A1

公开(公告)日：2022-12-22

申请号：US17353604

申请日：2021-06-21

Applicant: FEI Company

Inventor： Ronald Lamers ,  Hans Persoon ,  Alphons Theophile Augusta Maria de Waele ,  Theo Ruijl ,  Hugo van Leeuwen

IPC: G01N1/42 ,  F25D19/00 ,  G01N1/44 ,  H01J37/26

Abstract: Apparatus and methods are disclosed for vibration-free cryogenic cooling, suitable for TEM and other analytic equipment. A thermal battery includes one or more of: a cryocooler, a thermal switch, a thermal cold storage reservoir, and a cold finger. The thermal reservoir is mounted outside a sample chamber. The cold finger provides thermal coupling between the reservoir and a sample holder inside the sample chamber. In varying embodiments, sample holder and sample temperatures are regulated by a heater or by an inline variable thermal resistor. Cyclic phased operation includes cooling the reservoir, decoupling the cryocooler from the reservoir, and temperature-regulated passive vibration-free thermal energy extraction from sample to reservoir. The described system delivers a stand time of 12 hours at 20 K. Temperature regulation, a hybrid thermal switch, damping of thermal fluctuations, and material selection are described.

公开(公告)号：US20220155193A1

公开(公告)日：2022-05-19

申请号：US17523246

申请日：2021-11-10

Applicant: FEI Company

Inventor： Vojtech Dolezal ,  Hans Persoon ,  John Mitchels

IPC: G01N1/42 ,  H01J37/26 ,  H01J37/20

Abstract: The invention relates to a Cryo-Charged Particle (CCP) sample handling and storage system. The system is used for storing and handling cryo-samples for use in charged particle microscopy, such as cryo-electron microscope samples for use in cryo-transmission electron microscopy. The system comprises a storage apparatus for storing a plurality of CCP samples, and a Charged Particle Apparatus (CPA), such as a cryo-TEM, at a location remote from said storage apparatus. The system further comprises a transfer device that is releasably connectable to said storage apparatus, and that is releasably connectable to said CPA as well. As defined herein, said transfer device is arranged for acquiring a CCP sample from said plurality of CCP samples when connected to said storage apparatus, and arranged for transferring said CCP sample from said transfer device to said CPA when connected to said CPA.