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    Method of examining a sample using a charged particle microscope
    2.
    发明授权
    Method of examining a sample using a charged particle microscope 有权

    公开(公告)号：US11971372B2

    公开(公告)日：2024-04-30

    申请号：US16886716

    申请日：2020-05-28

    Applicant: FEI Company

    Inventor： Jan Klusá{hacek over (c)}ek ,  Tomá{hacek over (s)} Tůma ,  Ji{hacek over (r)}í Pet{hacek over (r)}ek

    IPC: G01N23/2251 ,  G01N23/2206 ,  G01N23/2252 ,  G06V10/762 ,  G06V20/69

    CPC classification number: G01N23/2251 ,  G01N23/2206 ,  G01N23/2252 ,  G06V10/763 ,  G06V20/69

    Abstract: The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample; scanning said charged particle beam over said sample at a plurality of sample locations; and detecting, using a first detector, emissions of a first type from the sample in response to the beam scanned over the plurality of sample locations. Spectral information of detected emissions of the first type is used to assign a plurality of mutually different phases to said sample at said plurality of sample locations. Information relating to at least one previously assigned phase and its respective sample location is used for establishing an estimated phase for at least one other of the plurality of sample locations. Said estimated phase is assigned to said other sample location. A control unit is used to provide a data representation of said sample containing at least information on said plurality of sample locations and said phases.

    Method of examining a sample using a charged particle microscope
    4.
    发明授权
    Method of examining a sample using a charged particle microscope 有权

    公开(公告)号：US11598733B2

    公开(公告)日：2023-03-07

    申请号：US16941253

    申请日：2020-07-28

    Applicant: FEI Company

    Inventor： Tomas Tûma ,  Jan Klusá{hacek over (c)}ek ,  Jiri Petrek

    IPC: G01N23/22 ,  G01N23/2206 ,  G01N23/203 ,  G01N23/2252

    Abstract: The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample; scanning said charged particle beam over said sample; and detecting, using a first detector, emissions of a first type from the sample in response to the beam scanned over the sample. Spectral information of detected emissions of the first type is used for assigning a plurality of mutually different phases to said sample. In a further step, a corresponding plurality of different color hues—with reference to an HSV color space—are associated to said plurality of mutually different phases. Using a second detector, emissions of a second type from the sample in response to the beam scanned over the sample are detected. Finally an image representation of said sample is provided.

    Method of examining a sample using a charged particle microscope
    5.
    发明授权
    Method of examining a sample using a charged particle microscope 有权

    公开(公告)号：US11519871B2

    公开(公告)日：2022-12-06

    申请号：US16867770

    申请日：2020-05-06

    Applicant: FEI Company

    Inventor： Jan Klusá{hacek over (c)}ek ,  Tomá{hacek over (s)} Tůma ,  Ji{hacek over (r)}í Pet{hacek over (r)}ek

    IPC: G01N23/2254 ,  G01N23/203 ,  H01J37/22 ,  H01J37/28

    Abstract: The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample, and scanning said charged particle beam over said sample. A first detector is used for detecting emissions of a first type from the sample in response to the beam scanned over the sample. Using spectral information of detected emissions of the first type, a plurality of mutually different phases are assigned to said sample. An image representation of said sample is provided, wherein said image representation contains different color hues. The color hues are selected from a pre-selected range of consecutive color hues in such a way that the selected color hues comprise mutually corresponding intervals within said pre-selected range of consecutive color hues.

    Method of examining a sample using a charged particle microscope
    6.
    发明授权
    Method of examining a sample using a charged particle microscope 有权

    公开(公告)号：US11327032B2

    公开(公告)日：2022-05-10

    申请号：US16867972

    申请日：2020-05-06

    Applicant: FEI Company

    Inventor： Jan Klusá{hacek over (c)}ek ,  Tomá{hacek over (s)} Tůma

    IPC: G01N23/2206 ,  G01N23/2209 ,  G01N23/2251 ,  H01J37/244 ,  H01J37/28

    Abstract: The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample, and scanning said charged particle beam over at least part of said sample. A first detector is used for obtaining measured detector signals corresponding to emissions of a first type from the sample at a plurality of sample positions. According to the method, a set of data class elements is provided, wherein each data class element relates an expected detector signal to a corresponding sample information value. The measured detector signals are processed, and processing comprises comparing said measured detector signals to said set of data class elements; determining at least one probability that said measured detector signals belong to a certain one of said set of data class elements; and assigning at least one sample information value and said at least one probability to each of the plurality of sample positions. Finally, sample information values and corresponding probability can be represented in data.

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