公开(公告)号：US11971372B2

公开(公告)日：2024-04-30

申请号：US16886716

申请日：2020-05-28

Applicant: FEI Company

Inventor： Jan Klusá{hacek over (c)}ek ,  Tomá{hacek over (s)} Tůma ,  Ji{hacek over (r)}í Pet{hacek over (r)}ek

IPC: G01N23/2251 ,  G01N23/2206 ,  G01N23/2252 ,  G06V10/762 ,  G06V20/69

CPC classification number: G01N23/2251 ,  G01N23/2206 ,  G01N23/2252 ,  G06V10/763 ,  G06V20/69

Abstract: The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample; scanning said charged particle beam over said sample at a plurality of sample locations; and detecting, using a first detector, emissions of a first type from the sample in response to the beam scanned over the plurality of sample locations. Spectral information of detected emissions of the first type is used to assign a plurality of mutually different phases to said sample at said plurality of sample locations. Information relating to at least one previously assigned phase and its respective sample location is used for establishing an estimated phase for at least one other of the plurality of sample locations. Said estimated phase is assigned to said other sample location. A control unit is used to provide a data representation of said sample containing at least information on said plurality of sample locations and said phases.

公开(公告)号：US11703468B2

公开(公告)日：2023-07-18

申请号：US17365832

申请日：2021-07-01

Applicant: FEI Company

Inventor： Oleksii Kaplenko ,  Jan Klusá{hacek over (c)}ek ,  Tomá{hacek over (s)} Tůma ,  Mykola Kaplenko ,  Ond{hacek over (r)}ej Machek

IPC: G01N23/2252 ,  G01N23/20 ,  G01N23/203 ,  G01N23/04 ,  G06N3/02 ,  G01N23/083 ,  H01J37/28

CPC classification number: G01N23/2252 ,  G01N23/04 ,  G01N23/083 ,  G01N23/203 ,  G01N23/20083 ,  G06N3/02 ,  G01N2223/072 ,  H01J37/28 ,  H01J2237/2807

Abstract: Method and system are disclosed for determining sample composition from spectral data acquired by a charged particle microscopy system. Chemical elements in a sample are identified by processing the spectral data with a trained neural network (NN). If the identified chemical elements not matching with a known elemental composition of the sample, the trained NN is retrained with the spectral data and the known elemental composition of the sample. The retrained NN can then be used to identify chemical elements within other samples.

公开(公告)号：US11519871B2

公开(公告)日：2022-12-06

申请号：US16867770

申请日：2020-05-06

Applicant: FEI Company

Inventor： Jan Klusá{hacek over (c)}ek ,  Tomá{hacek over (s)} Tůma ,  Ji{hacek over (r)}í Pet{hacek over (r)}ek

IPC: G01N23/2254 ,  G01N23/203 ,  H01J37/22 ,  H01J37/28

Abstract: The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample, and scanning said charged particle beam over said sample. A first detector is used for detecting emissions of a first type from the sample in response to the beam scanned over the sample. Using spectral information of detected emissions of the first type, a plurality of mutually different phases are assigned to said sample. An image representation of said sample is provided, wherein said image representation contains different color hues. The color hues are selected from a pre-selected range of consecutive color hues in such a way that the selected color hues comprise mutually corresponding intervals within said pre-selected range of consecutive color hues.

公开(公告)号：US11327032B2

公开(公告)日：2022-05-10

申请号：US16867972

申请日：2020-05-06

Applicant: FEI Company

Inventor： Jan Klusá{hacek over (c)}ek ,  Tomá{hacek over (s)} Tůma

IPC: G01N23/2206 ,  G01N23/2209 ,  G01N23/2251 ,  H01J37/244 ,  H01J37/28

Abstract: The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample, and scanning said charged particle beam over at least part of said sample. A first detector is used for obtaining measured detector signals corresponding to emissions of a first type from the sample at a plurality of sample positions. According to the method, a set of data class elements is provided, wherein each data class element relates an expected detector signal to a corresponding sample information value. The measured detector signals are processed, and processing comprises comparing said measured detector signals to said set of data class elements; determining at least one probability that said measured detector signals belong to a certain one of said set of data class elements; and assigning at least one sample information value and said at least one probability to each of the plurality of sample positions. Finally, sample information values and corresponding probability can be represented in data.