公开(公告)号：US12000789B2

公开(公告)日：2024-06-04

申请号：US17561497

申请日：2021-12-23

申请人： FEI Company

发明人： Libor Novak ,  Krishna Kanth Neelisetty ,  Veronika Hammerova ,  Jan Lasko

IPC分类号： G01N23/2204 ,  G01N23/2251 ,  G01N23/2273 ,  H01J37/20

CPC分类号： G01N23/2204 ,  G01N23/2251 ,  G01N23/2273 ,  H01J37/20

摘要： A system for positioning a sample in a charged particle apparatus (CPA) or an X-ray photoelectron spectroscopy (XPS) system includes a sample carrier coupled to a stage inside the vacuum chamber of the CPA or XPS system. The system allows transferring of the sample carrier among multiple CPAs, XPS systems and glove boxes in inert gas or in vacuum. The sample carrier is releasably coupled with the stage in the vacuum chamber of the CPA or the XPS. Multiple electrodes in a sample area of the sample carrier are electrically connectable with the stage by multiple spring contacts between the sample carrier and the stage.

公开(公告)号：US12112916B2

公开(公告)日：2024-10-08

申请号：US17584303

申请日：2022-01-25

申请人： FEI Company

发明人： Krishna Kanth Neelisetty ,  Milos Trenz ,  Jindrich Vondruska ,  Jakub Stetina

IPC分类号： H01J37/18

CPC分类号： H01J37/185

摘要： Air sensitive sample may be transferred between charged particle instruments or between charged particle instrument and a glove box using a sample transfer system. The sample transfer system includes a transfer shuttle for receiving a sample carrier and a transfer rod detachable coupled to the transfer shuttle. The transfer rod moves the sample carrier into or out of the transfer shuttle.

公开(公告)号：US12106931B2

公开(公告)日：2024-10-01

申请号：US17748972

申请日：2022-05-19

申请人： FEI Company

发明人： Michal Hrouzek ,  Libor Novak ,  Tomas Vystavel ,  Krishna Kanth Neelisetty ,  Jan Neuzil ,  Ondrej Klvac

IPC分类号： H01J37/20 ,  H01J37/305

CPC分类号： H01J37/20 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/208 ,  H01J2237/31745

摘要： Systems and methods for pre-aligning samples for more efficient processing of multiple samples with a BIB system according to the present invention comprises affixing a sample to an adjustable portion of a sample holder, nesting the sample holder with a first mask having a first mask edge, wherein the first mask is positioned outside of a BIB system, and aligning the sample such that it has a desired geometric relationship to the first mask edge. The first mask may be geometrically similar with a second mask within the BIB system that has a second mask edge such that the geometric relationship between the first mask edge and the sample when the sample holder is nested with the first mask is the same as the geometric relationship between the second mask edge and the sample when the sample holder is nested with the second mask.