公开(公告)号：US20250157779A1

公开(公告)日：2025-05-15

申请号：US18506957

申请日：2023-11-10

Applicant: FEI Company

Inventor： Radovan Vašina ,  Bohuslav Sed'a ,  Mostafa Maazouz ,  Lukáš Král

IPC: H01J37/05 ,  H01J37/04 ,  H01J37/10 ,  H01J37/147

Abstract: Charged-particle beam (CPB) optical systems can include a beam acceptance aperture plate defining a first acceptance aperture and at least one second acceptance aperture, situated with respect to a CPB source so that a first CPB is transmitted by the first acceptance aperture and a second CPB is transmitted by a second acceptance aperture. A CPB lens is situated to receive the first and second CPBs from the beam acceptance aperture plate and direct the first and second CPBs towards a filter aperture plate to transmit selected spectral portion of the second CPB. The selected spectral component of the first CPB can be selectively directed to a workpiece by a beam steering deflector along the same axis. In some examples, the first and second CPBs have different beam currents and only one is directed to a workpiece.