公开(公告)号：US20230377834A1

公开(公告)日：2023-11-23

申请号：US17748972

申请日：2022-05-19

Applicant: FEI Company

Inventor： Michal HROUZEK ,  Libor NOVAK ,  Tomas VYSTAVEL ,  Krishna Kanth NEELISETTY ,  Jan NEUZIL ,  Ondrej KLVAC

IPC: H01J37/20 ,  H01J37/305

CPC classification number: H01J37/20 ,  H01J37/3056 ,  H01J2237/31745 ,  H01J2237/2007 ,  H01J2237/208

Abstract: Systems and methods for pre-aligning samples for more efficient processing of multiple samples with a BIB system according to the present invention comprises affixing a sample to an adjustable portion of a sample holder, nesting the sample holder with a first mask having a first mask edge, wherein the first mask is positioned outside of a BIB system, and aligning the sample such that it has a desired geometric relationship to the first mask edge. The first mask may be geometrically similar with a second mask within the BIB system that has a second mask edge such that the geometric relationship between the first mask edge and the sample when the sample holder is nested with the first mask is the same as the geometric relationship between the second mask edge and the sample when the sample holder is nested with the second mask.