公开(公告)号：US20230375445A1

公开(公告)日：2023-11-23

申请号：US17748878

申请日：2022-05-19

Applicant: FEI Company

Inventor： Michal HROUZEK ,  Krishna Kanth NEELISETTY ,  Petr WANDROL ,  Libor NOVAK

IPC: G01N1/32 ,  H01J37/305 ,  H01J37/20 ,  G01N1/28

CPC classification number: G01N1/32 ,  H01J37/3056 ,  H01J37/20 ,  G01N1/286

Abstract: Systems and methods for operating a broad ion beam (BIB) polisher in a sample preparation workflow having improved uptime, are disclosed. An example method for operating a broad ion beam (BIB) polisher having improved uptime according to the present invention comprises causing a first BIB source to emit a first broad ion beam towards a sample positioned within an interior volume of the BIB polisher while the first BIB source is in emitting the first broad ion beam towards the sample, removing a second BIB source from the BIB polisher that is configured to emit a second broad ion beam towards the sample when in use.

公开(公告)号：US20230204525A1

公开(公告)日：2023-06-29

申请号：US17561497

申请日：2021-12-23

Applicant: FEI Company

Inventor： Libor NOVAK ,  Krishna Kanth NEELISETTY ,  Veronika HAMMEROVA ,  Jan LASKO

IPC: G01N23/2204 ,  G01N23/2273 ,  H01J37/20 ,  G01N23/2251

CPC classification number: G01N23/2204 ,  G01N23/2273 ,  H01J37/20 ,  G01N23/2251

Abstract: A system for positioning a sample in a charged particle apparatus (CPA) or an X-ray photoelectron spectroscopy (XPS) system includes a sample carrier coupled to a stage inside the vacuum chamber of the CPA or XPS system. The system allows transferring of the sample carrier among multiple CPAs, XPS systems and glove boxes in inert gas or in vacuum. The sample carrier is releasably coupled with the stage in the vacuum chamber of the CPA or the XPS. Multiple electrodes in a sample area of the sample carrier are electrically connectable with the stage by multiple spring contacts between the sample carrier and the stage.

公开(公告)号：US20230420216A1

公开(公告)日：2023-12-28

申请号：US17748902

申请日：2022-05-19

Applicant: FEI Company

Inventor： Krishna Kanth NEELISETTY ,  Petr WANDROL ,  Ondrej KLVAC ,  Yakub FAM ,  Libor NOVAK ,  Michal HROUZEK

IPC: H01J37/305 ,  H01J37/20 ,  G01N1/32 ,  G01N1/28

CPC classification number: H01J37/3056 ,  G01N1/286 ,  G01N1/32 ,  H01J37/20

Abstract: Systems and methods for operating a combined laser and broad ion beam (BIB) polisher in a sample preparation workflow, are disclosed. An example method for operating a combined laser and broad ion beam (BIB) polisher according to the present invention comprises positioning a sample within the interior volume of the combined BIB and laser sample preparation system, causing a laser source component of the combined BIB and laser sample preparation system to emit an optical beam towards the sample, and causing a BIB source component of the combined BIB and laser sample preparation system to emit a broad ion beam towards the sample. The optical beam and the broad ion beam are each configured to cause a first portion and a second portion of the sample upon which it is incident to be removed, respectively.

公开(公告)号：US20230377834A1

公开(公告)日：2023-11-23

申请号：US17748972

申请日：2022-05-19

Applicant: FEI Company

Inventor： Michal HROUZEK ,  Libor NOVAK ,  Tomas VYSTAVEL ,  Krishna Kanth NEELISETTY ,  Jan NEUZIL ,  Ondrej KLVAC

IPC: H01J37/20 ,  H01J37/305

CPC classification number: H01J37/20 ,  H01J37/3056 ,  H01J2237/31745 ,  H01J2237/2007 ,  H01J2237/208

Abstract: Systems and methods for pre-aligning samples for more efficient processing of multiple samples with a BIB system according to the present invention comprises affixing a sample to an adjustable portion of a sample holder, nesting the sample holder with a first mask having a first mask edge, wherein the first mask is positioned outside of a BIB system, and aligning the sample such that it has a desired geometric relationship to the first mask edge. The first mask may be geometrically similar with a second mask within the BIB system that has a second mask edge such that the geometric relationship between the first mask edge and the sample when the sample holder is nested with the first mask is the same as the geometric relationship between the second mask edge and the sample when the sample holder is nested with the second mask.

公开(公告)号：US20230377833A1

公开(公告)日：2023-11-23

申请号：US17748927

申请日：2022-05-19

Applicant: FEI Company

Inventor： Michal HROUZEK ,  Libor NOVAK ,  Krishna Kanth NEELISETTY ,  Petr WANDROL

IPC: H01J37/20 ,  H01J37/305 ,  H01J37/244 ,  H01J37/302 ,  H01J37/304

CPC classification number: H01J37/20 ,  H01J37/3053 ,  H01J37/244 ,  H01J37/3023 ,  H01J37/304 ,  H01J2237/0822 ,  H01J2237/204 ,  H01J2237/24585

Abstract: Systems and methods for efficiently processing multiple samples with a BIB system, are disclosed. An example method for efficiently processing multiple samples with a BIB system according to the present invention comprises removing an individual sample holder containing a sample from a storage location within the BIB system, wherein the BIB system includes multiple sample holders positioned in one or more storage locations, loading the individual sample holder onto a sample stage configured to hold the sample holder during polishing of the corresponding sample held by the individual sample holder, and causing a BIB source to emit a broad ion beam towards the sample, wherein the broad ion beam removes at least a portion of the sample upon which it is incident. Once a desired portion of the sample is removed, the sample holder is removed from the sample stage and loaded back into the storage location.

公开(公告)号：US20230132874A1

公开(公告)日：2023-05-04

申请号：US17584303

申请日：2022-01-25

Applicant: FEI Company

Inventor： Krishna Kanth NEELISETTY ,  Milos TRENZ ,  Jindrich VONDRUSKA ,  Jakub STETINA

IPC: H01J37/18

Abstract: Air sensitive sample may be transferred between charged particle instruments or between charged particle instrument and a glove box using a sample transfer system. The sample transfer system includes a transfer shuttle for receiving a sample carrier and a transfer rod detachable coupled to the transfer shuttle. The transfer rod moves the sample carrier into or out of the transfer shuttle.