公开(公告)号：US11817395B2

公开(公告)日：2023-11-14

申请号：US17037276

申请日：2020-09-29

Applicant: FEI Company

Inventor： Sean Morgan-Jones ,  Mark Najarian ,  Michael Schmidt ,  Victoriea Bird

IPC: H01L23/544 ,  H01J37/305 ,  H01J37/09 ,  H01L21/263 ,  H01L21/285 ,  C23C16/48 ,  H01L21/02

CPC classification number: H01L23/544 ,  H01J37/09 ,  H01J37/3053 ,  C23C16/486 ,  H01J2237/3174 ,  H01J2237/31732 ,  H01L21/02115 ,  H01L21/02271 ,  H01L21/2633 ,  H01L21/28568 ,  H01L2223/54426

Abstract: Redeposition of substrate material on a fiducial resulting from charged particle beam (CPB) or laser beam milling of a substrate can be reduced with a shield formed on the substrate surface. The shield typically has a suitable height that can be selected based on proximity of an area to be milled to the fiducial. The shield can be formed with the milling beam using beam-assisted chemical vapor deposition (CVD). The same or different beams can be used for milling and beam-assisted CVD.

公开(公告)号：US12260583B2

公开(公告)日：2025-03-25

申请号：US17171781

申请日：2021-02-09

Applicant: FEI Company

Inventor： Mark Najarian ,  Victoriea Bird ,  Peter D. Carleson ,  Sean Morgan-Jones

IPC: G06T7/73 ,  G06T7/33 ,  G06T7/55 ,  G06T7/66 ,  G06T17/10 ,  H01J37/20 ,  H01J37/22 ,  H01J37/28 ,  H10B41/27 ,  H10B43/27

Abstract: Systems for and methods for generating precise structure reconstruction using slice and view images, are disclosed. An example method comprises, obtaining a slice and view images of a sample that depicts a 3D fiducial and cross-sections of a structure in the sample. The 3D fiducial is configured such that when a layer of material having a uniform thickness is removed from a surface of the sample that includes the 3D fiducial the cross-sectional shape of the 3D fiducial in the new surface is consistent. Relative positions are determined between the 3D fiducial the cross-sections of the structure in individual images. Positional relationships are then determined between the cross-sections of the structure in different images in a common reference frame based on the relative positions.

公开(公告)号：US20220102284A1

公开(公告)日：2022-03-31

申请号：US17037276

申请日：2020-09-29

Applicant: FEI Company

Inventor： Sean Morgan-Jones ,  Mark Najarian ,  Michael Schmidt ,  Victoriea Bird

IPC: H01L23/544 ,  H01J37/305 ,  H01J37/09

Abstract: Redeposition of substrate material on a fiducial resulting from charged particle beam (CPB) or laser beam milling of a substrate can be reduced with a shield formed on the substrate surface. The shield typically has a suitable height that can be selected based on proximity of an area to be milled to the fiducial. The shield can be formed with the milling beam using beam-assisted chemical vapor deposition (CVD). The same or different beams can be used for milling and beam-assisted CVD.