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公开(公告)号：US11908709B2
公开(公告)日：2024-02-20
申请号：US16748826
申请日：2020-01-22
发明人： Marcia Cole-Yocom , Bryan Hinzie
CPC分类号： H01L21/67023 , B08B3/08 , B08B9/08 , B65D1/0215 , B65D1/40 , B65D1/42 , B65D23/02
摘要： A container for containing a raw material of a chemical liquid and a method of preparing a container are provided. The container at least includes an inner wall and solvent-treated surface of the inner wall. The method of preparing a container includes treating a surface of the inner wall with water and treating the surface the inner wall with an organic solvent.
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公开(公告)号：US20210387937A1
公开(公告)日：2021-12-16
申请号：US17342581
申请日：2021-06-09
发明人： Yuan Chen , Eduardo Ramirez Romero , Bryan Hinzie
摘要： The present disclosure is directed to methods and systems of purifying solvents. The purified solvents can be used, e.g., as pre-wet liquids, solution developers, and cleaners in a multistep semiconductor manufacturing process.
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公开(公告)号：US11440866B2
公开(公告)日：2022-09-13
申请号：US17342581
申请日：2021-06-09
发明人： Yuan Chen , Eduardo Ramirez Romero , Bryan Hinzie
IPC分类号： C07C45/82 , B01D3/00 , C07C45/78 , B01D3/14 , B01D39/16 , B01D36/00 , C11D11/00 , B01J20/26 , C11D7/50
摘要： The present disclosure is directed to methods and systems of purifying solvents. The purified solvents can be used, e.g., as pre-wet liquids, solution developers, and cleaners in a multistep semiconductor manufacturing process.
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公开(公告)号：US20190308117A1
公开(公告)日：2019-10-10
申请号：US16368866
申请日：2019-03-29
发明人： Bryan Hinzie , Marcia Cole-Yocom , Michael Barker , Perry Westberg , Yuan Chen , Jack Helzer
摘要： A chemical liquid manufacturing apparatus, including a first system and a second system, is provided. The first system includes at least one first filtration medium, selected from a first filter, a first ion exchange membrane and a first ion adsorption membrane, wherein the first system is configured to process a material of at least one time. The second system includes at least one second filtration medium, selected from a second filter, a second ion exchange membrane and a second ion adsorption membrane, wherein the second system is configured for recirculation and to process the material of at least two times.
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公开(公告)号：US20230042919A1
公开(公告)日：2023-02-09
申请号：US17961566
申请日：2022-10-07
摘要： A chemical liquid manufacturing apparatus is provided. The manufacturing apparatus at least includes an ion exchange medium and an ion adsorption medium configured downstream from the ion exchange medium. A material of the ion adsorption medium includes a resin material having an amide bond or an imide bond.
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公开(公告)号：US11498033B2
公开(公告)日：2022-11-15
申请号：US16690133
申请日：2019-11-21
摘要： A chemical liquid manufacturing apparatus is provided. The manufacturing apparatus at least includes an ion exchange medium and an ion adsorption medium configured downstream from the ion exchange medium. A material of the ion adsorption medium includes a resin material having an amide bond or an imide bond. A manufacturing method of a chemical liquid using the apparatus is also provided.
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公开(公告)号：US20210220754A1
公开(公告)日：2021-07-22
申请号：US17149836
申请日：2021-01-15
IPC分类号： B01D15/36 , B01D24/00 , B01D61/02 , B01D61/08 , B01D69/02 , B01D71/26 , B01D71/36 , B01D71/56
摘要： The present disclosure is directed to methods and systems of purifying solvents. The purified solvents can be used for cleaning a semiconductor substrate in a multistep semiconductor manufacturing process.
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公开(公告)号：US20200266080A1
公开(公告)日：2020-08-20
申请号：US16748826
申请日：2020-01-22
发明人： Marcia Cole-Yocom , Bryan Hinzie
摘要： A container for containing a raw material of a chemical liquid and a method of preparing a container are provided. The container at least includes an inner wall and solvent-treated surface of the inner wall. The method of preparing a container includes treating a surface of the inner wall with water and treating the surface the inner wall with an organic solvent.
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公开(公告)号：US20200156013A1
公开(公告)日：2020-05-21
申请号：US16690133
申请日：2019-11-21
摘要： A chemical liquid manufacturing apparatus is provided. The manufacturing apparatus at least includes an ion exchange medium and an ion adsorption medium configured downstream from the ion exchange medium. A material of the ion adsorption medium includes a resin material having an amide bond or an imide bond. A manufacturing method of a chemical liquid using the apparatus is also provided.
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公开(公告)号：US20240153789A1
公开(公告)日：2024-05-09
申请号：US18412619
申请日：2024-01-15
发明人： Marcia Cole-Yocom , Bryan Hinzie
CPC分类号： H01L21/67023 , B08B3/08 , B08B9/08 , B65D1/0215 , B65D1/40 , B65D1/42 , B65D23/02
摘要： A container for containing a raw material of a chemical liquid and a method of preparing a container are provided. The container at least includes an inner wall and solvent-treated surface of the inner wall. The method of preparing a container includes treating a surface of the inner wall with water and treating the surface the inner wall with an organic solvent.
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