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7 条记录 (耗时 0.024 秒)

    Vertical stepper
    1.
    发明授权
    Vertical stepper 失效
    垂直步进器

    公开(公告)号：US4979195A

    公开(公告)日：1990-12-18

    申请号：US409713

    申请日：1989-09-20

    申请人： Fumio Tabata ,  Hidenori Sekiguchi ,  Toru Kamada ,  Yuji Sakata

    发明人： Fumio Tabata ,  Hidenori Sekiguchi ,  Toru Kamada ,  Yuji Sakata

    IPC分类号： B23Q1/36 ,  B23Q1/62 ,  B23Q5/50 ,  B23Q11/00 ,  G03F7/20

    CPC分类号： G03F7/70358 ,  B23Q1/36 ,  B23Q1/621 ,  B23Q11/001 ,  B23Q5/50 ,  G03F7/70758

    摘要： A vertical stepper transfers a circuit pattern formed on a mask onto a wafer using synchrotron radiation instead of a light source. The vertical stepper includes a wafer stage for having the wafer mounted thereon in the vertical direction and a mask stage for having the mask mounted thereon in the vertical direction. The wafer stage includes a coarse X-Y stage, a transfer member, and a wafer mounting member. The wafer mounting member is provided with a fine X-Y stage. The wafer mounting member is moved in the horizontal direction between a first position mounted on the coarse X-Y stage and a second position mounted on the mask stage by the transfer member. When exposed to the synchrotron radiation, the wafer mounting member is integrated with the mask stage. After the wafer and the mask are strictly correctly positioned by the fine X-Y stage, the wafer mounting member, integrated with the mask stage, is stepped and repeat exposed by scanning in the vertical direction.

    Circuit board trimming apparatus and method
    2.
    发明授权
    Circuit board trimming apparatus and method 失效
    电路板修边装置及方法

    公开(公告)号：US5355755A

    公开(公告)日：1994-10-18

    申请号：US70853

    申请日：1993-06-03

    申请人： Yuji Sakata ,  Hidenori Sekiguchi ,  Fumio Tabata

    发明人： Yuji Sakata ,  Hidenori Sekiguchi ,  Fumio Tabata

    IPC分类号： B24B1/04 ,  H05K3/04 ,  H05K3/22 ,  B24B7/22 ,  H01P1/205

    CPC分类号： B24B1/04 ,  H05K3/043 ,  H05K3/225 ,  H05K2203/0195 ,  H05K2203/175 ,  Y10T83/0304 ,  Y10T83/04 ,  Y10T83/97

    摘要： It is an object of the present invention to provide a circuit board trimming apparatus and method used, in which apparatus and method a wiring pattern on a printed circuit board is trimmed, and to provide a circuit board trimming apparatus and method, in which apparatus and method a wiring pattern is trimmed efficiently while damage to the circuit board is minimized.A force exerted by a cutter against the circuit board is measured when the wiring pattern is cut by pressing an ultrasonic cutter against the wiring pattern on the circuit board and by moving the circuit board and the cutter relative to each other, a shape of the wiring pattern being determined on the basis of the force thus measured and a cutting process being controlled in accordance with the shape of the wiring pattern.

    摘要翻译： 本发明的目的是提供一种电路板修剪装置和方法，其中对印刷电路板上的布线图案进行修整的装置和方法，并提供一种电路板修剪装置和方法，其中装置和 方法，在对电路板的损坏最小化的同时有效地修整布线图案。 当通过将超声波切割机压靠在电路板上的布线图案上并且相对于彼此移动电路板和切割器而切割布线图案时，测量由切割器对电路板施加的力，布线的形状 基于这样测量的力确定图案，并且根据布线图案的形状来控制切割处理。

    Electrostatic actuator and method of controlling the same
    5.
    发明授权
    Electrostatic actuator and method of controlling the same 失效
    静电执行机构及其控制方法

    公开(公告)号：US5534740A

    公开(公告)日：1996-07-09

    申请号：US966157

    申请日：1993-01-27

    申请人： Toshiro Higuchi ,  Saku Egawa ,  Toshiki Niino ,  Katsuhide Natori ,  Fumio Tabata

    发明人： Toshiro Higuchi ,  Saku Egawa ,  Toshiki Niino ,  Katsuhide Natori ,  Fumio Tabata

    IPC分类号： H02N1/00

    CPC分类号： H02N1/004

    摘要： An electrostatic actuator incorporates a sensor for detecting both position and the state of distribution of charges and is efficiently driven in high-speed operation. A first member has a plurality of driving electrodes thereon, each having the shape of a strip, a second member is placed in contact with the first member, and a control means is provided for changing the voltages applied to the driving electrodes to produce relative movement of the first member and the second member. Detecting electrodes are arranged on the first member at predetermined phases, independently of the driving electrodes, and a detecting unit detects the position of the second member and the state of charges induced on the second member, through the detection of electric signals induced in the detecting electrodes by the charges distributed on the second member.

    摘要翻译： PCT No.PCT / JP92 / 00683 Sec。 371日期：1993年1月27日 102（e）日期1993年1月27日PCT提交1992年5月27日PCT公布。 第WO92 / 22125号PCT公告 日期为1992年12月10日。静电执行器包含用于检测位置和电荷分布状态的传感器，并在高速运行中有效驱动。 第一构件在其上具有多个驱动电极，每个具有带状形状，第二构件与第一构件接触，并且设置有控制装置，用于改变施加到驱动电极的电压以产生相对运动 的第一个成员和第二个成员。 检测电极以预定的相位布置在第一构件上，独立于驱动电极，并且检测单元通过检测在检测中感应的电信号来检测第二构件的位置和感应在第二构件上的电荷状态 电极通过分配在第二构件上的电荷。

    Robot arm control method using open loop control in combination with closed loop control
    7.
    发明授权
    Robot arm control method using open loop control in combination with closed loop control 失效
    机器人手臂控制方法采用开环控制结合闭环控制

    公开(公告)号：US4488242A

    公开(公告)日：1984-12-11

    申请号：US333056

    申请日：1981-12-21

    申请人： Fumio Tabata ,  Kazuo Asakawa ,  Hitoshi Komoriya

    发明人： Fumio Tabata ,  Kazuo Asakawa ,  Hitoshi Komoriya

    IPC分类号： B25J9/16 ,  B25J13/00 ,  G05B19/18 ,  G05B19/39 ,  G05B19/4103 ,  G06F15/46 ,  G05B19/22

    CPC分类号： G05B19/39 ,  G05B2219/45187

    摘要： A method for controlling the locus of an arm of an arm type robot or the like, wherein a control system which drives a first arm of a two-joint arm under open-loop control and a second arm under feedback control is provided. A bang-bang drive system is used for positioning the first arm in a minimum time. The position of the tip of the second arm can be detected either from the rotational angle of each arm or by means of a position recognizing device. Furthermore, an arm positioning method for rapidly bringing the tip of a multi-joint arm to a desired position while detecting the positions of its tip and its joints by simple calculations is disclosed.

    摘要翻译： 一种用于控制臂式机器人等的臂的轨迹的方法，其中提供了一种控制系统，该控制系统在开环控制下驱动双关节臂的第一臂和在反馈控制下的第二臂。 一个爆炸驱动系统用于在最短的时间内定位第一臂。 可以从每个臂的旋转角度或通过位置识别装置检测第二臂的尖端的位置。 此外，公开了一种用于通过简单计算来检测多个关节臂的尖端到期望位置同时检测其尖端及其关节的位置的臂定位方法。