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62 条记录 (耗时 0.016 秒)

    Linear output, closed loop mover assembly
    1.
    发明申请
    Linear output, closed loop mover assembly 有权
    线性输出，闭环动力组件

    公开(公告)号：US20040212279A1

    公开(公告)日：2004-10-28

    申请号：US10829413

    申请日：2004-04-21

    发明人： Eric C. Williams ,  David F. Arnone ,  Manish Sharma

    IPC分类号： H01L041/08

    CPC分类号： H02N2/0095 ,  B23Q1/34 ,  B23Q1/58 ,  B23Q5/50 ,  H02N2/101 ,  H02N2/126

    摘要： A mover assembly (16) that moves or positions an object (12) along a first axis includes a motor (20) and a coupling assembly (22). The motor (20) includes a motor output (332) that is moved along the first axis and about the first axis. The coupling assembly (22) includes a stage (344) that couples the motor output (332) to the object (12) and a stage guide (346) that guides the motion of the stage (344) along the first axis. In one embodiment, the stage guide (346) is a linear bearing that allows for motion of the stage (344) along the first axis and inhibits motion of the stage (344) about the first axis, along a second axis and along a third axis. Additionally, the coupling assembly (22) can include a measurement system (28) that monitors the movement of the stage (344).

    摘要翻译： 沿着第一轴移动或定位物体（12）的动子组件（16）包括马达（20）和联接组件（22）。 马达（20）包括沿第一轴线和第一轴线移动的马达输出（332）。 联接组件（22）包括将马达输出（332）耦合到物体（12）的台（344）和引导台（344）沿着第一轴的运动的平台引导件（346）。 在一个实施例中，平台引导件（346）是线性轴承，其允许平台（344）沿着第一轴线的运动并且沿着第二轴线并沿着第三轴线阻止台架（344）围绕第一轴线的运动 轴。 另外，联接组件（22）可以包括监测台（344）的运动的测量系统（28）。

    Apparatus for positioning sample
    2.
    发明授权
    Apparatus for positioning sample 失效
    用于定位样品的设备

    公开(公告)号：US5142791A

    公开(公告)日：1992-09-01

    申请号：US709317

    申请日：1991-06-03

    申请人： Toshinori Kobayashi ,  Masahiro Tsunoda ,  Takayasu Furukawa ,  Isao Kobayashi

    发明人： Toshinori Kobayashi ,  Masahiro Tsunoda ,  Takayasu Furukawa ,  Isao Kobayashi

    IPC分类号： B23Q1/34 ,  B23Q1/36 ,  B23Q1/62 ,  B23Q5/40 ,  B23Q5/50 ,  G03F7/20

    CPC分类号： G03F7/70716 ,  B23Q1/34 ,  B23Q1/36 ,  B23Q1/621 ,  B23Q5/408 ,  B23Q5/50 ,  Y10T74/20207

    摘要： An apparatus for positioning a sample comprises a fine adjustment stage and a coarse adjustment stage. The fine adjustment stage is held by three Z axis fine adjustment driving structures above the first base. The fine adjustment stage has a number of through holes. The fine adjustment stage is provided X and Y axes fine adjustment driving structures other than the Z axis fine adjustment driving structures. The coarse adjustment stage comprises the second base which is provided above the first base and a number of protrusions which are provided dispersively on the second base. The coarse adjustment stage is connected to X and Y axes coarse adjustment driving structures through flexible and elastic members. The sectional areas of the protrusions are selected to a size which is movable freely within the through holes, respectively. By adjusting the Z axis fine adjustment driving structures, a sample hold base is held either the coarse adjustment stage or the fine adjustment stage.

    摘要翻译： 用于定位样品的装置包括微调台和粗调阶段。 微调阶段由位于第一基座上方的三个Z轴微调驱动结构保持。 微调阶段有多个通孔。 在微调阶段中，设置除了Z轴微调驱动结构之外的X轴和Y轴微调驱动结构。 粗调阶段包括设置在第一基座上方的第二基座和分散地设置在第二基座上的多个突起。 粗调阶段通过柔性和弹性构件连接到X和Y轴粗调驱动结构。 突起的截面积分别选择为在通孔内可自由移动的尺寸。 通过调整Z轴微调驱动结构，可以将样本保持基座保持在粗调阶段或微调阶段。

    Vertical stepper
    3.
    发明授权
    Vertical stepper 失效
    垂直步进器

    公开(公告)号：US4979195A

    公开(公告)日：1990-12-18

    申请号：US409713

    申请日：1989-09-20

    申请人： Fumio Tabata ,  Hidenori Sekiguchi ,  Toru Kamada ,  Yuji Sakata

    发明人： Fumio Tabata ,  Hidenori Sekiguchi ,  Toru Kamada ,  Yuji Sakata

    IPC分类号： B23Q1/36 ,  B23Q1/62 ,  B23Q5/50 ,  B23Q11/00 ,  G03F7/20

    CPC分类号： G03F7/70358 ,  B23Q1/36 ,  B23Q1/621 ,  B23Q11/001 ,  B23Q5/50 ,  G03F7/70758

    摘要： A vertical stepper transfers a circuit pattern formed on a mask onto a wafer using synchrotron radiation instead of a light source. The vertical stepper includes a wafer stage for having the wafer mounted thereon in the vertical direction and a mask stage for having the mask mounted thereon in the vertical direction. The wafer stage includes a coarse X-Y stage, a transfer member, and a wafer mounting member. The wafer mounting member is provided with a fine X-Y stage. The wafer mounting member is moved in the horizontal direction between a first position mounted on the coarse X-Y stage and a second position mounted on the mask stage by the transfer member. When exposed to the synchrotron radiation, the wafer mounting member is integrated with the mask stage. After the wafer and the mask are strictly correctly positioned by the fine X-Y stage, the wafer mounting member, integrated with the mask stage, is stepped and repeat exposed by scanning in the vertical direction.

    Device for feeding and discharging a work in an automatic hollow-pipe cutting apparatus
    8.
    发明授权
    Device for feeding and discharging a work in an automatic hollow-pipe cutting apparatus 失效
    用于在自动空心管切割装置中进给和排出工件的装置

    公开(公告)号：US5937717A

    公开(公告)日：1999-08-17

    申请号：US681841

    申请日：1996-07-29

    申请人： Mitsunobu Iino

    发明人： Mitsunobu Iino

    IPC分类号： B23D33/00 ,  B23B13/02 ,  B23D21/00 ,  B23D33/02 ,  B23Q5/34 ,  B23Q5/50 ,  B23Q7/04 ,  B26D5/42 ,  B26D7/06

    CPC分类号： B23D21/00 ,  B23B13/024 ,  B23D33/02 ,  B23Q5/341 ,  B23Q5/50 ,  B23Q7/042 ,  Y10T83/2137 ,  Y10T83/2211 ,  Y10T83/445 ,  Y10T83/4506 ,  Y10T83/461 ,  Y10T83/4632 ,  Y10T83/6664

    摘要： A device for feeding and discharging a work in an automatic hollow-pipe cutting apparatus comprises: a cutter device for cutting a hollow pipe; a cam lever driving mechanism for sending the hollow pipe to the cutter device; a fixed chuck device disposed near the cutter device; a movable chuck device disposed away from the cutter device; a movable die core disposed inside the cutter device and inside the hollow pipe; another cam lever driving mechanism for moving the movable chuck device; a stopper and ejector fitted to the fixed die core; whereby when the hollow pipe is fed to the cutter device, the fixed chuck device grasps and release the hollow pipe and the movable chuck device also grasps and release the hollow pipe but at timing different from grasping and releasing by the fixed chuck means and the feeding of the hollow pipe into the cutter device is performed by movement of the movable chuck device by means of the other cam lever driving mechanism, and after the hollow pipe is cut, during lowering of a slider which accommodate the stopper and ejector and a movable shearing cutter of the cutter device, the stopper and ejector is sent back by means of a cam in the direction reverse to the feeding direction of the hollow pipe into the cutter device so that a cut piece is discharged.

    摘要翻译： 一种用于在自动空心管切割装置中进给和排出工件的装置包括：切割装置，用于切割中空管; 凸轮杆驱动机构，用于将中空管发送到切割装置; 设置在切割装置附近的固定卡盘装置; 远离切割装置设置的活动卡盘装置; 设置在切割装置内部和中空管内的活动模芯; 用于移动可动卡盘装置的另一凸轮杆驱动机构; 安装在固定模芯上的塞子和喷射器; 由此当中空管被供给到切割装置时，固定卡盘装置抓住并释放中空管，并且可动卡盘装置也抓住并释放中空管，但是不同于固定卡盘装置的抓取和释放的时间 通过可动夹盘装置通过另一个凸轮杆驱动机构的移动来执行中空管进入切割装置的过程，并且在中空管被切割之后，在容纳止动器和喷射器的滑块的下降期间和可移动剪切 切割装置的刀具，止动器和喷射器通过凸轮沿与中空管的进给方向相反的方向被送回到切割装置中，从而排出切割片。

    Stepping gear mechanism
    9.
    发明授权
    Stepping gear mechanism 失效
    步进齿轮机构

    公开(公告)号：US5916324A

    公开(公告)日：1999-06-29

    申请号：US983222

    申请日：1998-01-14

    申请人： Ulrich Baumann

    发明人： Ulrich Baumann

    IPC分类号： B23Q5/50 ,  B23Q16/02 ,  B23Q16/06 ,  F16H27/04

    CPC分类号： F16H27/04 ,  B23Q16/025 ,  B23Q5/50 ,  Y10T74/1441 ,  Y10T74/18528

    摘要： The stepping gear mechanism is provided in particular for motion control of a machine tool turret and comprises two cam plates adapted to be driven in rotation in the same sense about an axis of rotation each and arranged in such manner with respect to a roller supporting member that circular stop zones of both cam plates each engage a roller at the same time and in mutually counteracting fashion, whereby the roller supporting member is prevented from rotating. Subsequently, a projection of a cam plate engages one roller, while another roller dips into an indentation of the other cam plate so that the roller supporting member will be rotated. The cam plates are disposed adjacent each other and their projections are movable past each other in overlapping relationship such that, alternating with these conditions of engagement, the stop zones of both cam plates engage one and the same roller simultaneously and opposingly, whereby the roller supporting member once again is prevented from rotating. Thereafter, the projection of a cam plate engages a roller, while the very same roller dips into the indentation of the other cam plate so that the roller supporting member is rotated again. As a result, the number of indexing positions at which the turret is arrested during each revolution is twice as great as the number of rollers mounted on the roller supporting member.

    摘要翻译： PCT No.PCT / EP97 / 02350 Sec。 371日期：1998年1月14日 102（e）日期1998年1月14日PCT提交1997年5月7日PCT公布。 出版物WO97 / 43565 日期1997年11月20日特别提供了步进齿轮机构用于机床转台的运动控制，并且包括两个凸轮板，其适于以相同的意义围绕旋转轴线旋转驱动，并且以相对于 一个辊支撑件，两个凸轮板的圆形止动区各自同时并且相互抵消的方式与辊接合，从而防止辊支撑件旋转。 随后，凸轮板的突起接合一个辊子，而另一个辊子凹陷到另一个凸轮板的凹陷中，使得辊支撑构件将旋转。 凸轮板彼此相邻设置，并且它们的凸起可以以重叠的关系相互移动，使得与这些接合条件交替，两个凸轮板的停止区域同时并相对地啮合同一个辊，由此滚子支撑 会员再次被阻止旋转。 此后，凸轮板的突出部与滚子接合，同时，相同的辊子进入另一个凸轮板的压痕，使得滚子支撑部件再次旋转。 结果，在每转期间转塔停止的分度位置的数量是安装在辊支撑构件上的辊的数量的两倍。

    Inchworm type driving mechanism
    10.
    发明授权
    Inchworm type driving mechanism 失效
    内网式驱动机构

    公开(公告)号：US5034647A

    公开(公告)日：1991-07-23

    申请号：US412104

    申请日：1989-09-25

    申请人： Masaru Ohtsuka

    发明人： Masaru Ohtsuka

    IPC分类号： H02N2/00 ,  B23Q1/28 ,  B23Q1/34 ,  B23Q5/50 ,  H01L21/68 ,  H01L41/09

    CPC分类号： H02N2/101 ,  B23Q1/28 ,  B23Q1/34 ,  B23Q5/50 ,  H01L21/68

    摘要： An inchworm type driving mechanism usable as a fine positioning device is disclosed. The mechanism includes at least two clamps for clamping a movable member, and an expansible/contractable device for driving the movable member. Each clamp includes a plurality of levers each having a pivot provided by a resilient hinge and an electrostrictive device disposed between end portions of the levers. Through the actuation of the electrostrictive device, the other end portions of the levers sandwich the opposite sides of the movable member to clamp the same. In one preferred form, each clamp is supported by a support, with low rigidity in the clamping direction, but with high rigidity in a direction perpendicular to the clamping direction. Thus, undesirable deformation or distortion of the movable member can be avoided and, therefore, high-precision positioning of the movable member is assured.

    摘要翻译： 公开了一种可用作精细定位装置的蚯蚓型驱动机构。 该机构包括用于夹持可移动部件的至少两个夹具和用于驱动可移动部件的可膨胀/收缩装置。 每个夹具包括多个杠杆，每个杠杆具有由弹性铰链提供的枢轴和设置在杠杆的端部之间的电致伸缩装置。 通过致动电致伸缩装置，杆的另一端部将活动件的相对侧夹在其上。 在一个优选形式中，每个夹具由支撑件支撑，在夹紧方向上具有低刚性，但在垂直于夹紧方向的方向上具有高刚性。 因此，可以避免可动件的不期望的变形或变形，因此确保了可动部件的高精度定位。