公开(公告)号：US20150346457A1

公开(公告)日：2015-12-03

申请号：US14737289

申请日：2015-06-11

Applicant: GIGAPHOTON INC.

Inventor： Yasufumi KAWASUJI ,  Hidenobu KAMEDA

IPC: G02B7/182 ,  H05G2/00 ,  G02B26/08

CPC classification number: G02B7/1827 ,  G02B5/0891 ,  G02B7/198 ,  G02B26/0816 ,  G03F7/70033 ,  G03F7/70825 ,  G21K1/06 ,  H05G2/003 ,  H05G2/008

Abstract: A mirror unit may include a mirror, a first holding member holding the mirror, a second holding member holding the first holding member to allow the first holding member to pivot on a first pivot shaft, an actuator provided on the second holding member and configured to allow the first holding member to pivot, and a counter weight provided on the first holding member to allow a centroid of a structure to be substantially coincident with a center of a reflection surface of the mirror. The structure includes the mirror and is pivotable on the first pivot shaft.

Abstract translation: 反射镜单元可以包括反射镜，保持反射镜的第一保持构件，保持第一保持构件以允许第一保持构件在第一枢转轴上枢转的第二保持构件，设置在第二保持构件上的致动器， 允许第一保持构件枢转，并且设置在第一保持构件上的配重，以允许结构的质心与反射镜的反射表面的中心大致重合。 该结构包括反射镜并且可在第一枢轴上枢转。

公开(公告)号：US20140348188A1

公开(公告)日：2014-11-27

申请号：US14454494

申请日：2014-08-07

Applicant: GIGAPHOTON INC.

Inventor： Takashi SUGANUMA ,  Hidenobu KAMEDA ,  Masato MORIYA ,  Osamu WAKABAYASHI

IPC: H01S3/10

CPC classification number: H01S3/10 ,  H01S3/005 ,  H01S3/0971 ,  H01S3/10007 ,  H01S3/10023 ,  H01S3/1003 ,  H01S3/104 ,  H01S3/13 ,  H01S3/1301 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/2308 ,  H01S3/2316 ,  H01S3/2325 ,  H01S3/2391 ,  H05G2/008

Abstract: A laser apparatus may include a master oscillator, an optical unit provided in a beam path of a laser beam from the master oscillator, a beam adjusting unit provided upstream from the optical unit in a beam path of the laser beam and configured for adjusting at least one of a beam path and a wavefront of the laser beam, a first detection unit provided between the beam adjusting unit and the optical unit in a beam path of the laser beam and configured for detecting the laser beam, a second detection unit provided downstream from the optical unit in a beam path of the laser beam and configured for detecting the laser beam, and a controller configured for controlling the beam adjusting unit based on outputs from the first and second detection units.

Abstract translation: 激光装置可以包括主振荡器，设置在来自主振荡器的激光束的光束路径中的光学单元，光束调节单元，其设置在激光束的光束路径中的光学单元的上游，并被配置为至少调节 激光束的光束路径和波前的一个;第一检测单元，设置在激光束的光束路径中的光束调整单元和光学单元之间，并且被配置为检测激光束;第二检测单元， 激光束的光束路径中的光学单元，被配置为检测激光束;以及控制器，被配置为基于来自第一和第二检测单元的输出来控制光束调整单元。