公开(公告)号：US11374379B2

公开(公告)日：2022-06-28

申请号：US16711690

申请日：2019-12-12

Applicant: Gigaphoton Inc.

Inventor： Masahiko Ando

IPC: H01S3/11 ,  H01S3/10 ,  G02B27/10 ,  G03F7/20 ,  H05G2/00 ,  H01S3/08 ,  H01S3/00 ,  H01S3/23 ,  G02B27/09 ,  G02B26/08 ,  G02B27/28

Abstract: A laser system includes: a pulse laser system configured to emit a first laser beam having a first wavelength component and having a first polarization component and a second laser beam having the first wavelength component and having a second polarization component; a guide laser apparatus configured to emit a third laser beam having a second wavelength component; a polarization conversion mechanism configured to be able to switch between a first state in which the third laser beam is emitted as a first guide laser beam having the first polarization component, and a second state in which the third laser beam is emitted as a second guide laser beam having the second polarization component; a dichroic mirror configured to reflect the first and second laser beams having the first wavelength component or the first and second guide laser beams having the second wavelength component, to transmit the first and second laser beams or the first and second guide laser beams that are not reflected by the dichroic mirror; and a polarization beam splitter configured to reflect the first laser beam and the first guide laser beam, and to transmit the second laser beam and the second guide laser beam.

公开(公告)号：US11355257B2

公开(公告)日：2022-06-07

申请号：US17077172

申请日：2020-10-22

Applicant: Gigaphoton Inc.

Inventor： Masahiko Ando

IPC: H05G2/00 ,  G21K1/06 ,  G02B1/14 ,  G02B5/08 ,  G02B19/00 ,  G03F7/20

Abstract: An extreme ultraviolet light condensation mirror includes a substrate, and a multi-layer reflective film provided on the substrate, formed by alternately stacking an amorphous silicon layer and a layer having a refractive index different from a refractive index of the amorphous silicon layer, and configured to reflect extreme ultraviolet light, a layer on a most surface side in the multi-layer reflective film being the amorphous silicon layer containing a silicon atom bonded with a cyano radical.

公开(公告)号：US09888555B2

公开(公告)日：2018-02-06

申请号：US15422489

申请日：2017-02-02

Applicant: GIGAPHOTON INC.

Inventor： Masahiko Ando ,  Yoshifumi Ueno ,  Toru Suzuki

IPC: G01J3/10 ,  H05G2/00

CPC classification number: H05G2/008 ,  G03F7/70033 ,  G03F7/70808 ,  G03F7/70991

Abstract: The transmission system may include: an optical path adjustment device configured to substantially unify optical paths of a first pre-pulse laser beam and a second pre-pulse laser beam; an optical path separation device configured to separate the optical paths of the substantially unified first pre-pulse laser beam and the second pre-pulse laser beam to an optical path for the first pre-pulse laser beam and an optical path for the second pre-pulse laser beam; a first beam adjustment device disposed on the optical path for the first pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the first pre-pulse laser beam; and a second beam adjustment device disposed on the optical path for the second pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the second pre-pulse laser beam.