公开(公告)号：US20160188781A1

公开(公告)日：2016-06-30

申请号：US14699705

申请日：2015-04-29

Applicant: GLOBALFOUNDRIES, Inc.

Inventor： Ayman Hamouda ,  Chidam Kallingal ,  Norman Chen

IPC: G06F17/50 ,  G03F1/36

CPC classification number: G06F17/5081 ,  G03F1/36 ,  G03F1/70 ,  G06F2217/12 ,  Y02P90/265

Abstract: Methods for retargeting a circuit design layout for a multiple patterning lithography process and for fabricating a semiconductor device are provided. In an exemplary embodiment, a computer-executed method for retargeting a circuit design layout for a multiple patterning lithography process is provided. The method includes decomposing a circuit design layout file to produce decomposed layout files in a computer. Each decomposed layout file is associated with a respective mask for use in the multiple patterning lithography process. The method includes preparing retargeted layout files in the computer by retargeting selected decomposed layout files based on photolithography limitations specific to each selected decomposed layout file to produce retargeted layout files. Also, the method includes determining in the computer that a combination of layout files includes a spacing conflict. The method further includes resolving the spacing conflict in the computer by modifying the layout file or layout files causing the spacing conflict.

Abstract translation: 提供了用于重新定位用于多图案化光刻工艺的电路设计布局和用于制造半导体器件的方法。 在示例性实施例中，提供了一种用于重新定位用于多图案化光刻工艺的电路设计布局的计算机执行方法。 该方法包括分解电路设计布局文件以在计算机中产生分解的布局文件。 每个分解的布局文件与用于多图案化光刻工艺中的相应掩模相关联。 该方法包括通过基于每个选择的分解布局文件特有的光刻限制重新定位所选择的分解布局文件以产生重定向布局文件来在计算机中准备重定向布局文件。 此外，该方法包括在计算机中确定布局文件的组合包括间隔冲突。 该方法还包括通过修改导致间隔冲突的布局文件或布局文件来解决计算机中的间隔冲突。

公开(公告)号：US20140223390A1

公开(公告)日：2014-08-07

申请号：US13760571

申请日：2013-02-06

Applicant: GLOBALFOUNDRIES INC.

Inventor： Yuyang Sun ,  Chidam Kallingal ,  Norman Chen

IPC: G06F17/50

CPC classification number: G06F17/5081 ,  G06F17/5068 ,  G06F2217/06

Abstract: A method includes receiving a design layout file for an integrated circuit device in a computing apparatus. The design layout file specifies dimensions of a plurality of features. The design layout file is decomposed to a plurality of colored layout files, each colored layout file representing a particular reticle in a multiple patterning process. Each of the colored layout files is retargeted separately in the computing apparatus to generate a plurality of retargeted colored layout files. Retargeting each of the colored layout files includes increasing dimensions of a first plurality of features based on spacings between the first plurality of features and adjacent features. The retargeted layout files are combined to generate a combined layout file. Features in the combined layout file are retargeted in the computing apparatus to increase dimensions of a second plurality of features based on spacings between the second plurality of features and adjacent features.

Abstract translation: 一种方法包括在计算装置中接收用于集成电路装置的设计布局文件。 设计布局文件指定多个特征的尺寸。 将设计布局文件分解为多个彩色布局文件，每个彩色布局文件在多重图案化处理中表示特定的掩模版。 每个彩色布局文件在计算设备中分别重新定位，以产生多个重定向彩色布局文件。 重新定位每个彩色布局文件包括基于第一多个特征和相邻特征之间的间隔来增加第一多个特征的尺寸。 重新定位的布局文件被组合以生成组合的布局文件。 组合布局文件中的特征在计算装置中被重新定位，以基于第二多个特征和相邻特征之间的间隔来增加第二多个特征的尺寸。

公开(公告)号：US08910094B2

公开(公告)日：2014-12-09

申请号：US13760571

申请日：2013-02-06

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yuyang Sun ,  Chidam Kallingal ,  Norman Chen

IPC: G06F17/50

CPC classification number: G06F17/5081 ,  G06F17/5068 ,  G06F2217/06

Abstract: A method includes receiving a design layout file for an integrated circuit device in a computing apparatus. The design layout file specifies dimensions of a plurality of features. The design layout file is decomposed to a plurality of colored layout files, each colored layout file representing a particular reticle in a multiple patterning process. Each of the colored layout files is retargeted separately in the computing apparatus to generate a plurality of retargeted colored layout files. Retargeting each of the colored layout files includes increasing dimensions of a first plurality of features based on spacings between the first plurality of features and adjacent features. The retargeted layout files are combined to generate a combined layout file. Features in the combined layout file are retargeted in the computing apparatus to increase dimensions of a second plurality of features based on spacings between the second plurality of features and adjacent features.

Abstract translation: 一种方法包括在计算装置中接收用于集成电路装置的设计布局文件。 设计布局文件指定多个特征的尺寸。 将设计布局文件分解为多个彩色布局文件，每个彩色布局文件在多重图案化处理中表示特定的掩模版。 每个彩色布局文件在计算设备中分别重新定位，以产生多个重定向彩色布局文件。 重新定位每个彩色布局文件包括基于第一多个特征和相邻特征之间的间隔来增加第一多个特征的尺寸。 重新定位的布局文件被组合以生成组合的布局文件。 组合布局文件中的特征在计算装置中被重新定位，以基于第二多个特征和相邻特征之间的间隔来增加第二多个特征的尺寸。

公开(公告)号：US09443055B2

公开(公告)日：2016-09-13

申请号：US14699705

申请日：2015-04-29

Applicant: GLOBALFOUNDRIES, Inc.

Inventor： Ayman Hamouda ,  Chidam Kallingal ,  Norman Chen

IPC: G06F17/50 ,  G03F1/36

CPC classification number: G06F17/5081 ,  G03F1/36 ,  G03F1/70 ,  G06F2217/12 ,  Y02P90/265

Abstract: Methods for retargeting a circuit design layout for a multiple patterning lithography process and for fabricating a semiconductor device are provided. In an exemplary embodiment, a computer-executed method for retargeting a circuit design layout for a multiple patterning lithography process is provided. The method includes decomposing a circuit design layout file to produce decomposed layout files in a computer. Each decomposed layout file is associated with a respective mask for use in the multiple patterning lithography process. The method includes preparing retargeted layout files in the computer by retargeting selected decomposed layout files based on photolithography limitations specific to each selected decomposed layout file to produce retargeted layout files. Also, the method includes determining in the computer that a combination of layout files includes a spacing conflict. The method further includes resolving the spacing conflict in the computer by modifying the layout file or layout files causing the spacing conflict.

Abstract translation: 提供了用于重新定位用于多图案化光刻工艺的电路设计布局和用于制造半导体器件的方法。 在示例性实施例中，提供了一种用于重新定位用于多图案化光刻工艺的电路设计布局的计算机执行方法。 该方法包括分解电路设计布局文件以在计算机中产生分解的布局文件。 每个分解的布局文件与用于多图案化光刻工艺中的相应掩模相关联。 该方法包括通过基于每个选择的分解布局文件特有的光刻限制重新定位所选择的分解布局文件以产生重定向布局文件来在计算机中准备重定向布局文件。 此外，该方法包括在计算机中确定布局文件的组合包括间隔冲突。 该方法还包括通过修改导致间隔冲突的布局文件或布局文件来解决计算机中的间隔冲突。

公开(公告)号：US09064086B2

公开(公告)日：2015-06-23

申请号：US14525833

申请日：2014-10-28

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yuyang Sun ,  Chidam Kallingal ,  Norman Chen

IPC: G06F17/50

CPC classification number: G06F17/5081 ,  G06F17/5068 ,  G06F2217/06

Abstract: A method includes receiving a design layout file for an integrated circuit device in a computing apparatus. The design layout file specifies dimensions of a plurality of features. The design layout file is decomposed to a plurality of colored layout files, each colored layout file representing a particular reticle in a multiple patterning process. Each of the colored layout files is retargeted separately in the computing apparatus to generate a plurality of retargeted colored layout files. Retargeting each of the colored layout files includes increasing dimensions of a first plurality of features based on spacings between the first plurality of features and adjacent features. The retargeted layout files are combined to generate a combined layout file. Features in the combined layout file are retargeted in the computing apparatus to increase dimensions of a second plurality of features based on spacings between the second plurality of features and adjacent features.

Abstract translation: 一种方法包括在计算装置中接收用于集成电路装置的设计布局文件。 设计布局文件指定多个特征的尺寸。 将设计布局文件分解为多个彩色布局文件，每个彩色布局文件在多重图案化处理中表示特定的掩模版。 每个彩色布局文件在计算设备中分别重新定位，以产生多个重定向彩色布局文件。 重新定位每个彩色布局文件包括基于第一多个特征和相邻特征之间的间隔来增加第一多个特征的尺寸。 重新定位的布局文件被组合以生成组合的布局文件。 组合布局文件中的特征在计算装置中重新定位，以基于第二多个特征和相邻特征之间的间隔来增加第二多个特征的尺寸。