公开(公告)号：US09251978B2

公开(公告)日：2016-02-02

申请号：US13875394

申请日：2013-05-02

Applicant: GLOBALFOUNDRIES INC.

Inventor： Qing Cao ,  Kangguo Cheng ,  Zhengwen Li ,  Fei Liu ,  Zhen Zhang

IPC: G01N27/404 ,  H01H29/02 ,  G01N33/00 ,  G01N15/10 ,  G01N27/327 ,  G01N27/447

CPC classification number: H01H29/02 ,  G01N15/1031 ,  G01N27/3278 ,  G01N27/404 ,  G01N27/44795 ,  G01N33/0009 ,  Y10T29/49117

Abstract: Electromechanical sensors that employ Janus micro/nano-components and techniques for the fabrication thereof are provided. In one aspect, a method of fabricating an electromechanical sensor includes the following steps. A back gate is formed on a substrate. A gate dielectric is deposited over the back gate. An intermediate layer is formed on the back gate having a micro-fluidic channel formed therein. Top electrodes are formed above the micro-fluidic channel. One or more Janus components are placed in the micro-fluidic channel, wherein each of the Janus components has a first portion having an electrically conductive material and a second portion having an electrically insulating material. The micro-fluidic channel is filled with a fluid. The electrically insulating material has a negative surface charge at a pH of the fluid and an isoelectric point at a pH less than the pH of the fluid.

Abstract translation: 提供采用Janus微/纳米组件的机电传感器及其制造技术。 一方面，制造机电传感器的方法包括以下步骤。 在基板上形成背栅。 栅极电介质沉积在背栅上。 在背栅上形成中间层，其中形成有微流体通道。 顶部电极形成在微流体通道上方。 一个或多个Janus部件被放置在微流体通道中，其中Janus部件中的每一个具有具有导电材料的第一部分和具有电绝缘材料的第二部分。 微流体通道充满流体。 电绝缘材料在流体的pH下具有负的表面电荷，并且在pH小于流体的pH的pH下具有等电点。

公开(公告)号：US09389319B2

公开(公告)日：2016-07-12

申请号：US14699557

申请日：2015-04-29

Applicant: GLOBALFOUNDRIES INC.

Inventor： Qing Cao ,  Kangguo Cheng ,  Zhengwen Li ,  Fei Liu ,  Zhen Zhang

IPC: G01T1/04 ,  G01T1/06

CPC classification number: G01T1/06

Abstract: A method for colorimetric radiation dosimetry includes subjecting an aggregate including a polymeric matrix having uniformly dispersed nanoparticles therein to radiation. The aggregate is soaked in a solution selected to dissolve decomposed pieces of the polymeric matrix to release into the solution nanoparticles from the decomposed pieces. Color of the solution is compared to a reference to determine a dose of radiation based on number of liberated nanoparticles.

公开(公告)号：US09251979B2

公开(公告)日：2016-02-02

申请号：US14010945

申请日：2013-08-27

Applicant: GLOBALFOUNDRIES INC.

Inventor： Qing Cao ,  Kangguo Cheng ,  Zhengwen Li ,  Fei Liu ,  Zhen Zhang

IPC: G01N27/404 ,  H01H29/02 ,  G01N33/00 ,  G01N15/10 ,  G01N27/327 ,  G01N27/447

CPC classification number: H01H29/02 ,  G01N15/1031 ,  G01N27/3278 ,  G01N27/404 ,  G01N27/44795 ,  G01N33/0009 ,  Y10T29/49117

Abstract: Electromechanical sensors that employ Janus micro/nano-components and techniques for the fabrication thereof are provided. In one aspect, a method of fabricating an electromechanical sensor includes the following steps. A back gate is formed on a substrate. A gate dielectric is deposited over the back gate. An intermediate layer is formed on the back gate having a micro-fluidic channel formed therein. Top electrodes are formed above the micro-fluidic channel. One or more Janus components are placed in the micro-fluidic channel, wherein each of the Janus components has a first portion having an electrically conductive material and a second portion having an electrically insulating material. The micro-fluidic channel is filled with a fluid. The electrically insulating material has a negative surface charge at a pH of the fluid and an isoelectric point at a pH less than the pH of the fluid.