公开(公告)号：US20220057445A1

公开(公告)日：2022-02-24

申请号：US17519742

申请日：2021-11-05

Applicant: GlobalFoundries U.S. Inc.

Inventor： Nicholas A. Polomoff ,  Dewei Xu ,  Eric D. Hunt-Schroeder

IPC: G01R31/28

Abstract: Embodiments of the disclosure provide a crack detecting and monitoring system, including: a plurality of electrically conductive structures extending about a protective barrier formed in an inactive region of an integrated circuit (IC), wherein an active region of the IC is enclosed within the protective barrier; and a plurality of stages of sensing circuits connected in series for sensing a change in an electrical characteristic of each of the plurality of structures and for receiving an enable signal, wherein each sensing circuit is coupled to a respective structure of the plurality of structures, the change in the electrical characteristic indicating damage to the respective structure, wherein each sensing circuit includes a circuit for selectively generating the enable signal for a next sensing circuit in the plurality of stages of sensing circuits.

公开(公告)号：US11693048B2

公开(公告)日：2023-07-04

申请号：US17519742

申请日：2021-11-05

Applicant: GlobalFoundries U.S. Inc.

Inventor： Nicholas A. Polomoff ,  Dewei Xu ,  Eric D. Hunt-Schroeder

IPC: G01R31/28

CPC classification number: G01R31/2853

Abstract: Embodiments of the disclosure provide a crack detecting and monitoring system, including: a plurality of electrically conductive structures extending about a protective barrier formed in an inactive region of an integrated circuit (IC), wherein an active region of the IC is enclosed within the protective barrier; and a plurality of stages of sensing circuits connected in series for sensing a change in an electrical characteristic of each of the plurality of structures and for receiving an enable signal, wherein each sensing circuit is coupled to a respective structure of the plurality of structures, the change in the electrical characteristic indicating damage to the respective structure, wherein each sensing circuit includes a circuit for selectively generating the enable signal for a next sensing circuit in the plurality of stages of sensing circuits.

公开(公告)号：US11105846B1

公开(公告)日：2021-08-31

申请号：US16838439

申请日：2020-04-02

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Nicholas A. Polomoff ,  Dirk Breuer ,  Eric D. Hunt-Schroeder ,  Bernhard J Wunder ,  Dewei Xu

IPC: G01R31/28

Abstract: Embodiments of the disclosure provide a system for detecting and monitoring a crack in an integrated circuit (IC), including: at least one electrically conductive perimeter line (PLINE) extending about, and electrically isolated from, a protective structure formed in an inactive region of the IC, wherein an active region of the IC is enclosed within the protective structure; a circuit for sensing a change in an electrical characteristic of the at least one PLINE, the change in the electrical characteristic indicating a presence of a crack in the inactive region of the IC; and a connecting structure for electrically coupling each PLINE to the sensing circuit.

公开(公告)号：US11215661B2

公开(公告)日：2022-01-04

申请号：US16872597

申请日：2020-05-12

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Nicholas A. Polomoff ,  Dewei Xu ,  Eric D. Hunt-Schroeder

IPC: G01R31/28

Abstract: Embodiments of the disclosure provide a crack detecting and monitoring system, including: a plurality of electrically conductive structures extending about a protective barrier formed in an inactive region of an integrated circuit (IC), wherein an active region of the IC is enclosed within the protective barrier; and a plurality of stages of sensing circuits connected in series for sensing a change in an electrical characteristic of each of the plurality of structures and for receiving an enable signal, wherein each sensing circuit is coupled to a respective structure of the plurality of structures, the change in the electrical characteristic indicating damage to the respective structure, wherein each sensing circuit includes a circuit for selectively generating the enable signal for a next sensing circuit in the plurality of stages of sensing circuits.

公开(公告)号：US20210356514A1

公开(公告)日：2021-11-18

申请号：US16872597

申请日：2020-05-12

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Nicholas A. Polomoff ,  Dewei Xu ,  Eric D. Hunt-Schroeder

IPC: G01R31/28

Abstract: Embodiments of the disclosure provide a crack detecting and monitoring system, including: a plurality of electrically conductive structures extending about a protective barrier formed in an inactive region of an integrated circuit (IC), wherein an active region of the IC is enclosed within the protective barrier; and a plurality of stages of sensing circuits connected in series for sensing a change in an electrical characteristic of each of the plurality of structures and for receiving an enable signal, wherein each sensing circuit is coupled to a respective structure of the plurality of structures, the change in the electrical characteristic indicating damage to the respective structure, wherein each sensing circuit incudes a circuit for selectively generating the enable signal for a next sensing circuit in the plurality of stages of sensing circuits.