公开(公告)号：US20210278611A1

公开(公告)日：2021-09-09

申请号：US16807811

申请日：2020-03-03

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Asli Sahin ,  Colleen Meagher ,  Thomas Houghton ,  Bo Peng ,  Karen Nummy ,  Javier Ayala ,  Yusheng Bian

IPC: G02B6/42 ,  H01L21/84 ,  H01L21/311

Abstract: One illustrative device disclosed herein includes a V-groove in a base semiconductor layer of a semiconductor-on-insulator (SOI) substrate, wherein the V-groove is adapted to have a fiber optics cable positioned therein, and an optical component positioned above the V-groove. The device also includes a first layer of silicon dioxide positioned above the optical component, a second layer of silicon dioxide positioned on and in contact with the first layer of silicon dioxide and a third layer of silicon dioxide positioned on and in contact with the second layer of silicon dioxide.