Interferometric phase shifting method for high resolution
microlithography
    1.
    发明授权
    Interferometric phase shifting method for high resolution microlithography 失效
    用于高分辨率微光刻的干涉相移方法

    公开(公告)号:US5458999A

    公开(公告)日:1995-10-17

    申请号:US82243

    申请日:1993-06-24

    摘要: A phase shifting method uses a special interferometer in which the illuminating beam is divided into two or more components and the mask is irradiated from both sides. The pattern to be transferred onto the wafer (the mask) is generated on an optically transmissive substrate by appropriately combining reflective, transparent and absorptive areas. The optical paths of the beams illuminating the back side and the front side of the mask (that will be called transmitted and reflected beams respectively) are chosen so that the phase of the two beams is different by approximately an odd multiple of .pi. radians at the surface of the mask. The combined beams are projected onto the target wafer by suitable optics. The phase difference between the illuminating beams reduces the edge blurring that results from diffraction effects. This steepens the slope of the intensity profile at the edge of the features making it possible to achieve smaller feature sizes in the microlithographic replication without using those phase shifting elements of the conventional phase shifting method which made mask fabrication difficult. As a consequence of the lack of the phase shifting layers, the wavelength range of the method of this invention can easily be extended towards shorter wavelengths, and, further, the new mask is less vulnerable to optical damage. The additional freedom that the phase relation and intensity of the beams can be varied continuously allows for optimization that can lead to improved resolution, compared to conventional phase shifting techniques.

    摘要翻译: 相移方法使用特殊的干涉仪,其中将照明光束分成两个或更多个部件,并且从两侧照射该掩模。 通过适当地组合反射,透明和吸收区域,在透光性基板上产生要转印到晶片上的图案(掩模)。 选择照射掩模的背侧和前侧(分别被称为透射和反射光束)的光束的光路,使得两个光束的相位在 表面的面具。 组合的光束通过合适的光学器件投射到目标晶片上。 照明光束之间的相位差减少了由衍射效应引起的边缘模糊。 这使得特征边缘处的强度分布的斜率变浅,使得可以在微光刻复制中实现更小的特征尺寸,而不需要使得难以进行掩模制造的常规相移方法的那些相移元件。 由于缺少相移层,本发明方法的波长范围可以容易地扩展到更短的波长,而且新的掩模不太容易受到光学损伤。 与传统的相移技术相比,光束的相位关系和强度可以连续变化的附加自由度允许优化,这可以导致改进的分辨率。

    Phototherapeutical method and system for the treatment of inflammatory and hyperproliferative disorders of the nasal mucosa
    2.
    发明申请
    Phototherapeutical method and system for the treatment of inflammatory and hyperproliferative disorders of the nasal mucosa 审中-公开
    用于治疗鼻粘膜炎症和过度增生性疾病的光疗法和系统

    公开(公告)号:US20060111760A1

    公开(公告)日:2006-05-25

    申请号:US11319684

    申请日:2005-12-28

    IPC分类号: A61N5/06

    摘要: A phototherapeutical apparatus is described, including a light source, generating high intensity visible light, in some embodiments in combination with ultraviolet light, an optical guidance system, and a patient interface. The patient interface can be insertable at least partially into a nasal cavity and is operable to apply the generated light to a tissue surface of the nasal cavity. Applying the apparatus includes providing the phototherapeutical apparatus, preparing for the application of the apparatus, inserting the patient interface into the nasal cavity, and applying the generated light by the patient interface to a tissue surface of the nasal cavity, wherein the tissue of the nasal cavity has an inflammatory or a hyperproliferative disease. The inflammatory diseases include rhinitis, sinusitis, and rhinosinusitis. A photodynamical therapy is also described, applying photosensitizing substances before the treatment with light. The phototherapeutical method is also effective for the prevention of inflammatory or hyperproliferative diseases.

    摘要翻译: 描述了一种光治疗装置,包括光源,在一些实施例中与紫外光,光学引导系统和患者接口相结合产生高强度可见光。 患者界面可以至少部分地插入到鼻腔中并且可操作以将产生的光施加到鼻腔的组织表面。 应用该设备包括提供光疗设备,准备应用该设备,将患者接口插入鼻腔,以及将由患者接口产生的光施加到鼻腔的组织表面,其中鼻腔的组织 空腔具有炎性或过度增生性疾病。 炎性疾病包括鼻炎,鼻窦炎和鼻鼻窦炎。 还描述了光动力疗法,在用光处理之前应用光敏物质。 光疗法对于预防炎性或过度增生性疾病也是有效的。

    Method and apparatus for the acquisition of data for determining the
duration and chirp of ultrashort laser pulses
    3.
    发明授权
    Method and apparatus for the acquisition of data for determining the duration and chirp of ultrashort laser pulses 失效
    获取数据的方法和装置,用于确定超声波激光脉冲的持续时间和数量

    公开(公告)号:US5233182A

    公开(公告)日:1993-08-03

    申请号:US729070

    申请日:1991-07-12

    IPC分类号: G01J11/00

    CPC分类号: G01J11/00

    摘要: For the acquisition of data for determining the duration and chirp (frequency modulation) of a single ultrashort laser radiation pulse said pulse is split into two partial pulses which are each conducted through one of two TREACY compressors having different group delay dispersions and then recorded in succession on the same time basis with a streak camera.

    摘要翻译: 为了获取用于确定单个超短激光辐射脉冲的持续时间和啁啾(频率调制)的数据,所述脉冲被分成两个部分脉冲,每个部分脉冲通过具有不同组延迟分散的两个TREACY压缩机之一传导,然后连续记录 在同一时间基础上与条纹相机。

    Process for the preparation of reactive penicillanic acid and
cephalosporanic acid derivatives
    5.
    发明授权
    Process for the preparation of reactive penicillanic acid and cephalosporanic acid derivatives 失效
    反应性青霉烷酸和头孢烷酸衍生物的制备方法

    公开(公告)号:US4304717A

    公开(公告)日:1981-12-08

    申请号:US36756

    申请日:1979-05-07

    CPC分类号: C07D499/00

    摘要: This invention relates to a process for the preparation of acid amides having the formula (I) or their salts ##STR1## wherein R.sup.1 is hydrogen or an easily removable ester-forming or salt-forming group, preferably a trialkylamine, trialkylsilyl, trichloroethyl, acetoxymethyl, phenacyl, substituted phenacyl, substituted phenyl or benzyl group,R.sup.2 is hydrogen, alkyl group, alkenyl group, alkyl group having an aryl or heterocyclic (preferably furyl or thienyl) - substituent, an aryl group having an alkyl substituent (preferably xylyl), or an aryl, aralkyl or heterocyclic group (preferably a phenyl, thienyl, or furyl group) which can have one or more substituents,R.sup.3 is hydrogen, or substituted or unsubstituted aryl, alkyl, cycloalkyl or aralkyl group, andX is a group of one of the formulae ##STR2## according to the invention an amine of the formula (II), ##STR3## wherein R.sup.4 is an easily removable ester-forming group, preferably a trialkylamino, trialkylsilyl, trichloroethyl, acetoxymethyl, phenacyl, substituted phenacyl, substituted phenyl or benzyl group, or a salt formed preferably with an alkali metal or a trialkylamine, is acylated with an ester of the formula (III), ##STR4## wherein R.sup.5 is a substituted or unsubstituted aryl, alkyl, cycloalkyl or aralkyl group, and, if desired, substituents R.sup.4 and/or R.sup.5 of the obtained product can be split off, and/or, if desired, the obtained product is converted into its salt or a salt is converted into the free acid.

    摘要翻译: 本发明涉及一种制备具有式(I)的酸酰胺或其盐(Ⅰ)的方法,其中R1是氢或易于除去的形成酯或成盐基团,优选三烷基胺,三烷基甲硅烷基, 三氯乙基,乙酰氧基甲基,苯甲酰甲基,取代的苯甲酰甲基,取代的苯基或苄基,R2是氢,烷基,烯基,具有芳基或杂环(优选呋喃基或噻吩基) - 取代基的烷基,具有烷基取代基的芳基 二甲苯基)或可具有一个或多个取代基的芳基,芳烷基或杂环基(优选苯基,噻吩基或呋喃基),R 3为氢或取代或未取代的芳基,烷基,环烷基或芳烷基,X为 根据本发明的一组式(IMAGE),式(II)的胺,其中R 4是易于除去的酯形成基团,优选三烷基氨基,三烷基甲硅烷基,三氯乙基,乙酰氧基 乙基,苯甲酰甲基,取代的苯甲酰甲基,取代的苯基或苄基,或优选与碱金属或三烷基胺形成的盐,用式(III)的酯,其中R5是取代或 未取代的芳基,烷基,环烷基或芳烷基,并且如果需要,所得产物的取代基R 4和/或R 5可以被分离,和/或如果需要,将得到的产物转化为其盐或盐被转化 进入游离酸。

    Biological Microbeads for Various Flow Cytometric Applications
    7.
    发明申请
    Biological Microbeads for Various Flow Cytometric Applications 审中-公开
    用于各种流式细胞术应用的生物微珠

    公开(公告)号:US20080020382A1

    公开(公告)日:2008-01-24

    申请号:US11575859

    申请日:2005-10-07

    CPC分类号: G01N33/554

    摘要: The invention relates to biological microbeads, and in certain embodiments, to the use thereof in flow-cytometric applications. Biological microbeads are fixed cells that may be surface-modified with proteins or other molecules that have specific binding properties. These surface-bound proteins may bind to target compounds bearing fluorescent labels that facilitate detection by flow cytometry. Provided are compositions and methods for the use of biological microbeads as an inexpensive alternative to synthetic microbeads for in an extensive number of flow-cytometric applications, including quantitative PCR, detection of nucleases, detection of proteases, and immunoassays.

    摘要翻译: 本发明涉及生物微珠,并且在某些实施方案中涉及其在流式细胞术应用中的用途。 生物微珠是可以用具有特异性结合特性的蛋白质或其他分子进行表面修饰的固定细胞。 这些表面结合的蛋白质可能与携带荧光标记物的靶化合物结合,便于通过流式细胞术检测。 提供的是使用生物微珠作为合成微珠的廉价替代物的组合物和方法,用于大量流式细胞术应用,包括定量PCR,核酸酶检测,蛋白酶检测和免疫测定。

    Phototherapeutical apparatus and method for the treatment and prevention of diseases of body cavities
    8.
    发明申请
    Phototherapeutical apparatus and method for the treatment and prevention of diseases of body cavities 审中-公开
    用于治疗和预防体腔疾病的光疗法和方法

    公开(公告)号:US20060235492A1

    公开(公告)日:2006-10-19

    申请号:US11453736

    申请日:2006-06-15

    IPC分类号: A61N5/06

    摘要: A phototherapeutical apparatus and method are described. The apparatus includes an ultraviolet light source, an optical guidance system, and a patient interface. The patient interface is insertable at least partially into a body cavity and is operable to apply the guided ultraviolet light to a tissue surface of a body cavity. The method includes providing the phototherapeutical apparatus, preparing for the application of the phototherapeutical apparatus, inserting the patient interface at least partially into a body cavity, and applying the ultraviolet light by the patient interface to a tissue surface of a body cavity, wherein the tissue of the body cavity has an inflammatory or a hyperproliferative disease. The inflammatory diseases include rhinitis, sinusitis and rhinosinusitis. A photochemotherapeutical method is also described, using photosensitizing substances, such as psoralen before treatment with ultraviolet light. The phototherapeutical method is also effective for the prevention of inflammatory or hyperproliferative diseases.

    摘要翻译: 描述了光治疗装置和方法。 该装置包括紫外线光源,光学引导系统和患者接口。 患者界面至少部分地插入体腔内,并且可操作以将被引导的紫外线施加到体腔的组织表面。 该方法包括提供光疗设备,准备应用光疗设备,将患者界面至少部分地插入体腔,以及将患者界面的紫外线施加到体腔的组织表面,其中组织 的体腔具有炎性或过度增生性疾病。 炎性疾病包括鼻炎,鼻窦炎和鼻鼻窦炎。 还描述了使用光敏物质,例如用紫外线处理之前的补骨脂素的光化学治疗方法。 光疗法对于预防炎性或过度增生性疾病也是有效的。

    Process for the preparation of propargyl amines
    10.
    发明授权
    Process for the preparation of propargyl amines 失效
    炔丙胺的制备方法

    公开(公告)号:US4564706A

    公开(公告)日:1986-01-14

    申请号:US514149

    申请日:1983-07-14

    CPC分类号: C07C209/08

    摘要: The invention relates to a new process for the preparation of propargyl ammonium chlorides of the Formula I ##STR1## by alkaline decomposition of the d-tartarate of the 1-isomer of an amine of the Formula II ##STR2## and subsequent reaction of the amine of the Formula II with a halide of the Formula IIIX--CH.sub.2 --C.tbd.CH (III)in the presence of an organic solvent, alkali and waterin which in Formulae II and III respectively,n is 1 or 0 andX stands for halogenwhich comprises reacting the d-tartarate of the 1-isomer of an amine of the Formula II in aqueous suspension with an alkali, dissolving the base of the Formula II, thus set free without isolation in a water non-miscible organic solvent and reacting the same in the said phase with a halide of the Formula III, and thereafter--preferably after separating the aqueous layer--reacting the mixture which contains the amines of the Formulae II and IV ##STR3## in the organic phase in the presence of water with an organic acid or a solution which has a pH value of 1.5-6 and consists of an inorganic acid and water, thus dissolving in the two-phase mixture formed the salt of the amine of the Formula II in the aqueous layer and selectively separating the amine of the Formula II from the amine of the Formula IV, and thereafter adding after the separation of the phases hydrogen chloride to the amine of the Formula IV being in the organic phase and thus precipitating the salt of the Formula I.The compounds of Formula I are known pharmaceutical active ingredients. The advantage of the process of the present invention that it is highly economical and enables the recovery of the starting materials on large scale production too.

    摘要翻译: 本发明涉及通过碱式分解通式II(XIIX)的胺的1-异构体的d-酒石酸来制备式I的炔丙基氯化铵的新方法(I) 和随后的式II的胺与式III的X-CH 2 -C 3 CH 3(III)的卤化物在有机溶剂,碱和水的存在下分别反应,其中式II和III分别为n为1 或0和X表示卤素,其包括使式II的胺的1-异构体在水悬浮液中与碱反应,溶解式II的碱,因此在不分离的情况下在水中非游离 在所述相中与其反应,与式III的卤化物反应,然后优选在将含有式II和IV的胺的混合物(IV)的水层分离成 在有机酸存在下的有机相 或pH值为1.5-6且由无机酸和水组成的溶液,因此溶解在两相混合物中形成水性层中式II的胺的盐,并选择性地分离 式II的式II化合物,然后在将相氯化氢分离为式IV的胺之后加入有机相,由此沉淀式I的盐。式I的化合物是已知的 药用活性成分。 本发明方法的优点是高度经济且能够在大规模生产中回收原料。