Micromechanical shock sensor
    1.
    发明授权
    Micromechanical shock sensor 失效
    微机械式震动传感器

    公开(公告)号:US06737979B1

    公开(公告)日:2004-05-18

    申请号:US10021700

    申请日:2001-12-04

    IPC分类号: G08B2100

    摘要: The invention comprises a micromechanical shock sensor that is formed on the surface of a micro-substrate. A moveable proof mass is formed on the surface with at least one spring connected to the proof mass and the surface. The spring allows the proof mass to move a predetermined distance. Latching means are formed on the surface the predetermined distance from the proof mass. When the sensor is subjected to a sufficient shock, the proof mass moves and contacts the latching means. An indicator means is provided to allow this contact to be readily known by the user.

    摘要翻译: 本发明包括形成在微衬底的表面上的微机械式震动传感器。 在表面上形成有可移动的检验质量块,其中至少一个弹簧连接到检验质量块和表面。 弹簧允许检测质量块移动预定距离。 在距离检验质量块的预定距离的表面上形成有闩锁装置。 当传感器经受足够的冲击时,检测质量块移动并接触锁定装置。 提供指示装置以允许用户容易地知道该接触。

    Mems vertical to horizontal motion translation device
    2.
    发明授权
    Mems vertical to horizontal motion translation device 失效
    Mems垂直于水平运动翻译装置

    公开(公告)号:US06308631B1

    公开(公告)日:2001-10-30

    申请号:US09620128

    申请日:2000-07-20

    IPC分类号: F42L1534

    摘要: A micromechanical device that takes a vertical force to a micro substrate that results into a vertical motion and translates that vertical motion into horizontal motion. A pit is etched onto a micro substrate where the walls of the pit meet the floor of the pit at less than a 90° angle. A vertical force is applied to a structure to push it along the angled wall of the pit and as the structure reaches the bottom of the pit the vertical motion is translated into horizontal motion. By attaching a spring or similar mechanism to the structure, one can store the horizontal momentum for later use by latching the structure in some way before the spring can pull the structure back into its original position.

    摘要翻译: 微机械装置对微型基板施加垂直的力,导致垂直运动并将该垂直运动转换成水平运动。 将凹坑蚀刻到微基板上,其中凹坑的壁以小于90°的角度与凹坑的地板相遇。 一个垂直的力被施加到一个结构上,以推动它沿坑的角度的壁,当结构到达坑的底部,垂直运动被转换成水平运动。 通过将弹簧或类似的机构附接到结构,可以在弹簧能够将结构拉回到其初始位置之前以某种方式通过闩锁结构来存储水平动量用于以后的使用。