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公开(公告)号：US08289674B2
公开(公告)日：2012-10-16
申请号：US12405758
申请日：2009-03-17
IPC分类号： H01H47/00
CPC分类号： H01H59/0009 , G11C23/00 , H01H1/0036 , H01H2001/0047 , H01H2059/0036 , H01H2059/0054 , H01H2059/0063
摘要： Embodiments disclosed herein generally solve a stiction problem in switching devices by using a series of pulses of force which take the switch from being strongly adhered to a landing electrode to the point where it is only weakly adhered. Once in the low adhesion state, the switch can then be pulled away from contact with a lower force provided by either the spring constant of the switch and/or the electrostatic forces resulting from low voltages applied to nearby electrodes.
摘要翻译： 本文公开的实施例通过使用一系列将开关牢固地粘附到着陆电极到仅弱附着点的力的脉冲来解决开关器件中的静电问题。 一旦处于低附着状态，则可以用由开关的弹簧常数提供的较小的力和/或施加到附近电极的低电压产生的静电力将开关拉离开接触。
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公开(公告)号：US07973637B2
公开(公告)日：2011-07-05
申请号：US12732752
申请日：2010-03-26
IPC分类号： H01H61/01
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H37/00 , H01H2001/0047 , H01H2037/008 , H01H2061/006 , H01H2061/008
摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
摘要翻译： 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。
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公开(公告)号：US20110006874A1
公开(公告)日：2011-01-13
申请号：US12919618
申请日：2009-02-23
IPC分类号： H01H37/46 , H01L21/302 , H02N10/00
CPC分类号： H01H61/04 , B81B2201/014 , B81B2201/031 , B81B2203/051 , B81C1/00682 , H01H2001/0047 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A micromechanical actuator includes a movable first spring element having metal and/or silicon. The first spring element is fitted at a first point and can move freely at a second point. A second spring element connected to the first spring element has silicon and is partially arranged on an electrically insulating material which is applied to a substrate. The second spring element is arranged at a distance from the substrate above the substrate on a first plane, and the first spring element is arranged above the second spring element on a second plane which is at a distance from the first plane such that the first and second spring elements can move with respect to the substrate. The actuator has a third spring element which is mechanically coupled to the first spring element. The elastic deformation of the second spring element can be induced by a length change of the third spring element.
摘要翻译： 微机械致动器包括具有金属和/或硅的可移动的第一弹簧元件。 第一弹簧元件安装在第一点上，并可在第二点自由移动。 连接到第一弹簧元件的第二弹簧元件具有硅并且部分地布置在施加到基板的电绝缘材料上。 第二弹簧元件在第一平面上与衬底上方的基板一定距离设置，并且第一弹簧元件布置在第二平面上方的第二平面上，第二平面与第一平面成一定距离，使得第一和 第二弹簧元件可以相对于基底移动。 致动器具有机械地联接到第一弹簧元件的第三弹簧元件。 第二弹簧元件的弹性变形可以由第三弹簧元件的长度变化引起。
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公开(公告)号：US07749793B2
公开(公告)日：2010-07-06
申请号：US12357826
申请日：2009-01-22
IPC分类号： H01L21/302
CPC分类号： H01H37/52 , B81B3/0078 , B81B2201/032 , B81B2203/056 , H01H2001/0047 , H01H2037/008 , H01H2300/032
摘要： A method of making a Lateral-Moving Micromachined Thermal Bimorph which provides the capability of achieving in-plane thermally-induced motion on a microchip, as opposed to the much more common out-of-plane, or vertical, motion seen in many devices. The present invention employs a novel fabrication process to allow the fabrication of a lateral bimorph in a fundamentally planar set of processes. In addition, the invention incorporates special design features that allow the bimorph to maintain material interfaces.
摘要翻译： 一种制造横向移动微机械加热双压电晶片的方法，其提供了在微芯片上实现面内热感应运动的能力，而不是在许多器件中看到的更常见的平面外或垂直运动。 本发明采用新颖的制造工艺，以允许在基本平面的工艺集合中制造横向双压电晶片。 此外，本发明还包含允许双压电晶体保持材料界面的特殊设计特征。
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5.发明申请公开(公告)号：US20090314616A1
公开(公告)日：2009-12-24
申请号：US12087962
申请日：2007-01-19
申请人： Joachim Oberhammer
发明人： Joachim Oberhammer
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01H2001/0047 , H01H2059/0072 , H01H2059/0081
摘要： The invention relates to a method, a system and a multi stable arranged to switch the configuration of the signal path for electrical signals comprising a first moving element (12) and a second moving element (14), wherein the first and second element can be arranged into at least two mechanically stable states: a mechanical interlocked state, wherein the first moving element is mechanically interlocked with the second moving element wherein a signal path in the switch is arranged in a closed configuration; and a non interlocked state, wherein the first moving element is separated from the second moving element and the signal path in the switch is arranged in an open configuration; wherein the switch further comprises a fixated electrostatic electrode (10) configured with a first fixated electrode part arranged to actuate and move at least one of the moving elements when an electrical potential difference is applied between the first fixated electrode and at least one of the moving elements, transitioning the moving elements from one state to another.
摘要翻译： 本发明涉及一种布置为切换包括第一移动元件（12）和第二移动元件（14）的电信号的信号路径的配置的方法，系统和多稳定性，其中第一和第二元件可以是 布置成至少两个机械稳定状态：机械互锁状态，其中所述第一移动元件与所述第二移动元件机械互锁，其中所述开关中的信号路径以闭合配置布置; 和非互锁状态，其中所述第一移动元件与所述第二移动元件分离，并且所述开关中的信号路径布置成打开构造; 其中所述开关还包括固定静电电极（10），所述固定静电电极（10）被配置为当第一固定电极与所述移动的至少一个之间施加电势差时，所述第一固定电极部分被布置成致动和移动所述移动元件中的至少一个， 元素，将移动元素从一个状态转移到另一个状态。
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公开(公告)号：US20090201119A1
公开(公告)日：2009-08-13
申请号：US12318634
申请日：2009-01-05
申请人： Paul J. Rubel
发明人： Paul J. Rubel
CPC分类号： F03G7/06 , B81B3/0059 , B81B2201/018 , B81B2201/032 , B81B2201/054 , H01H61/02 , H01H61/04 , H01H2001/0047 , H01H2001/0068 , H01H2061/006 , H01H2061/008 , H02N10/00 , Y10T29/49105
摘要： A MEMS hysteretic thermal actuator may have a plurality of beams disposed over a heating element formed on the surface of the substrate. The plurality of beams may be coupled to a passive beam which is not disposed over the heating element. One of the plurality of beams may be formed in a first plane parallel to the substrate, whereas another of the plurality of beams may be formed in a second plane closer to the surface of the substrate. When the heating element is activated, it heats the plurality of beams such that they move the passive beam in a trajectory that is neither parallel to nor perpendicular to the surface of the substrate. When the beams are cooled, they may move in a different trajectory, approaching the substrate before moving laterally across it to their initial positions. By providing one electrical contact on the distal end of the passive beam and another stationary electrical contact on the substrate surface, the MEMS hysteretic actuator may form a reliable electrical switch that is relatively simple to manufacture and operate.
摘要翻译： MEMS迟滞热致动器可以具有设置在形成在基板的表面上的加热元件上的多个光束。 多个光束可以耦合到未设置在加热元件上方的无源光束。 多个光束中的一个可以形成在平行于衬底的第一平面中，而多个光束中的另一个可以形成在靠近衬底表面的第二平面中。 当加热元件被激活时，它加热多个光束，使得它们以不平行于或垂直于衬底表面的轨迹移动被动束。 当梁被冷却时，它们可以以不同的轨迹移动，在横向移动到其初始位置之前接近基板。 通过在被动束的远端上提供一个电接触，并在衬底表面上提供另一个固定的电触点，MEMS滞后致动器可形成可靠的电开关，其制造和操作相对简单。
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公开(公告)号：US07280015B1
公开(公告)日：2007-10-09
申请号：US11006426
申请日：2004-12-06
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H2001/0047 , H01H2059/0054
摘要： Apparatus for a micro-electro-mechanical switch that provides single pole, double throw switching action. The switch has two input lines and two output lines. The switch has a seesaw cantilever arm with contacts at each end that electrically connect the input lines with the output lines. The cantilever arm is latched into position by frictional forces between structures on the cantilever arm and structures on the substrate in which the cantilever arm is disposed. The state of the switch is changed by applying an electrostatic force at one end of the cantilever arm to overcome the mechanical force holding the other end of the cantilever arm in place.
摘要翻译： 用于微机电开关的装置，其提供单极双掷切换动作。 开关有两条输入线和两条输出线。 开关具有跷跷板悬臂，每端具有触点，将输入线与输出线电连接。 悬臂由于悬臂上的结构与设置有悬臂的基板上的结构之间的摩擦力而被锁定到位。 通过在悬臂的一端施加静电力来克服将悬臂的另一端保持就位的机械力来改变开关的状态。
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公开(公告)号：US20070170811A1
公开(公告)日：2007-07-26
申请号：US11334438
申请日：2006-01-19
申请人： Paul Rubel
发明人： Paul Rubel
IPC分类号： H02N10/00
CPC分类号： H02N10/00 , F03G7/06 , H01H61/02 , H01H61/04 , H01H2001/0047 , H01H2001/0068 , H01H2061/006 , H01H2061/008 , Y10T29/42 , Y10T29/49155 , Y10T29/49204
摘要： A MEMS hysteretic thermal device may have a cantilevered beam which bends about one or more points in at least two substantially different directions. In one exemplary embodiment, the MEMS hysteretic thermal device is made from a first segment coupled to an anchor point, and also coupled to a second segment by a joint. Heating two respective drive beams causes the first segment to bend in a direction substantially about the anchor point and the second segment to bend in a direction substantially about the joint. By cooling the first drive beam faster than the second drive beam, the motion of the MEMS thermal device may be hysteretic. The MEMS hysteretic thermal device may be used for example, as an electrical switch or as a valve or piston.
摘要翻译： MEMS迟滞热装置可以具有悬臂梁，其在至少两个基本上不同的方向上围绕一个或多个点弯曲。 在一个示例性实施例中，MEMS滞后热装置由耦合到锚定点的第一段制成，并且还通过接头耦合到第二段。 加热两个相应的驱动梁使得第一段在基本上围绕锚点的方向上弯曲，而第二段在基本上围绕接头的方向上弯曲。 通过比第二驱动光束更快地冷却第一驱动光束，MEMS热装置的运动可能是滞后的。 MEMS迟滞热装置可以例如用作电开关或阀或活塞。
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9.发明申请公开(公告)号：US20050038950A1
公开(公告)日：2005-02-17
申请号：US10640063
申请日：2003-08-13
申请人： Todd Adelmann
发明人： Todd Adelmann
IPC分类号： G01R31/26 , G06F12/00 , G11B9/00 , G11B9/06 , G11B11/00 , G11B11/16 , G11C5/00 , G11C5/06 , G11C11/56 , H01L21/66
CPC分类号： G11C11/56 , B82Y10/00 , G11B9/062 , G11B9/14 , G11B9/1445 , G11B9/1472 , G11B11/007 , G11B11/16 , G11B2005/0021 , G11C5/06 , H01H2001/0047
摘要： A storage device comprises a probe and storage cell having moveable parts that are actuatable to plural positions to represent respective different data states. The probe interacts with the moveable parts to selectively actuate the moveable parts to the plural positions.
摘要翻译： 存储装置包括探针和存储单元，其具有可致动到多个位置的可移动部分，以表示各自的不同数据状态。 探针与可移动部件相互作用以选择性地将可移动部件致动到多个位置。
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公开(公告)号：US06360036B1
公开(公告)日：2002-03-19
申请号：US09483669
申请日：2000-01-14
申请人： James G. Couillard
发明人： James G. Couillard
IPC分类号： G02B635
CPC分类号： G02B6/3596 , G02B6/3518 , G02B6/3546 , G02B6/3566 , G02B6/357 , G02B6/358 , G02B6/3584 , H01H2001/0047
摘要： An optical switch on a planar optical circuit substrate includes a cantilevered arm having a control element selectively movable in a direction into the plane of the substrate into a waveguide slot of the substrate for switching optical signals carried by the waveguide. The arm can be actuated by thermal or piezoelectric actuators to deflect between a rest position allowing signal information from a waveguide to continue along the waveguide and a second position with the control element of the cantilevered arm extending into the slot for selectively blocking or changing the direction of the incoming signal. In an alternative embodiment of the invention, a second arm is provided which moves laterally and can be selectively actuated in sequence with the first cantilevered arm for overlying and latching the switching arm in the second or light controlling position, such that the MEMS switch can remain in an active state without further application of a control signal thereto. Arrays of MEMS switches are formed on a single wafer by selective etching and are bonded to arrays of optical waveguides to provide multiple switch modules.
摘要翻译： 平面光电路基板上的光开关包括悬臂，所述悬臂具有可选择地沿着基板平面的方向移动到基板的波导槽中的控制元件，用于切换由波导承载的光信号。 臂可以由热或压电致动器致动，以在静止位置之间偏转，允许来自波导的信号信息沿着波导继续，并且第二位置与悬臂的控制元件延伸到槽中以选择性地阻挡或改变方向 的输入信号。 在本发明的替代实施例中，提供了第二臂，其横向移动并且可以依次用第一悬臂臂选择性地致动，以在第二或光控制位置上覆盖和锁定开关臂，使得MEMS开关可以保持 处于活动状态，而不进一步施加控制信号。 MEMS开关的阵列通过选择性蚀刻形成在单个晶片上，并且被结合到光波导阵列以提供多个开关模块。
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