利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

7 条记录 (耗时 0.015 秒)

    Method and system for analyzing plasma data
    1.
    发明授权
    Method and system for analyzing plasma data 失效
    血浆数据分析方法和系统

    公开(公告)号：US5546322A

    公开(公告)日：1996-08-13

    申请号：US226781

    申请日：1994-04-12

    申请人： George G. Gifford ,  Brock E. Osborn

    发明人： George G. Gifford ,  Brock E. Osborn

    IPC分类号： G01N21/62 ,  G01N21/71 ,  G01N21/73 ,  H01L21/302 ,  H01L21/3065 ,  H05H1/00 ,  G01N31/00

    CPC分类号： G01N21/71 ,  H05H1/0037

    摘要： Analysis of plasma data indicative of gaseous species therein, such as Optical Emission Spectroscopy (OES) data, is aided through the interactive use of a computer. OES data may be calibrated by the computer with minimal input from the user regarding a gas the user knows or suspects is present. The computer then assumes the presence of that gas and assigns relative intensity peaks to known wavelengths for that gas, allowing calibration to take place. Selective identification of particular gases from the data is also possible. Used in conjunction with selective identification, a learning function allows the system to improve the accuracy of future gaseous species identification. Certain characteristics of a particular gas over time, such as intensity at a particular wavelength or at all wavelengths, may also be automatically plotted.

    摘要翻译： 通过交互式使用计算机来辅助指示其中气态物质的等离子体数据的分析，例如光发射光谱（OES）数据。 OES数据可以由计算机进行校准，其中用户关于用户知道或怀疑存在的气体的最小输入。 然后，计算机假设存在该气体，并将相对强度峰值分配给该气体的已知波长，从而允许进行校准。 从数据中选择性识别特定气体也是可能的。 与选择性识别结合使用，学习功能允许系统提高未来气态物种鉴定的准确性。 特定气体随时间的某些特性，例如在特定波长处或在所有波长处的强度也可以自动绘制。

    Method and system employing optical emission spectroscopy for monitoring and controlling semiconductor fabrication
    2.
    发明授权
    Method and system employing optical emission spectroscopy for monitoring and controlling semiconductor fabrication 失效
    用于监测和控制半导体制造的光发射光谱的方法和系统

    公开(公告)号：US5347460A

    公开(公告)日：1994-09-13

    申请号：US935076

    申请日：1992-08-25

    申请人： George G. Gifford ,  Brock E. Osborn

    发明人： George G. Gifford ,  Brock E. Osborn

    IPC分类号： C30B25/16 ,  G01J3/443 ,  G01N21/62 ,  H01J37/32 ,  H01L21/00 ,  H01L21/02 ,  H01L21/3065 ,  G06F15/46 ,  C23C14/00

    CPC分类号： H01L21/67253 ,  G01J3/443 ,  H01J37/32935 ,  H01J37/32963 ,  H01J37/32972 ,  H01J37/3299 ,  H01J2237/332 ,  H01J2237/334

    摘要： Automated, closed loop method and system for monitor and control of semiconductor fabrication processing are described. Optical emissions spectrometer (OES) data readings from a fabrication plasma chamber are statistically analyzed and a novel pattern model (based on Markov random fields) is used in combination with a selective stochastic relaxation technique to identify gaseous species within the chamber from the OES readings. Wavelength and intensity information is also employed to accurately estimate relative concentration levels of identified gases within the chamber. The unique statistical analysis approach described allows real-time monitor and control of physical processing within the fabrication chamber. Several practical algorithms are set forth, including techniques for OES peak identification, peak sharpening, gas identification, and physical processing control.

    摘要翻译： 描述了半导体制造处理的自动闭环方法和监控系统。 统计分析来自制造等离子体室的光发射光谱仪（OES）数据读数，并将新的模式模型（基于马尔可夫随机场）与选择性随机松弛技术结合使用，以从OES读数中识别腔室内的气态物质。 波长和强度信息也用于准确估计室内识别出的气体的相对浓度水平。 所描述的独特的统计分析方法允许对制造室内的物理处理进行实时监控和控制。 阐述了一些实用的算法，包括OES峰识别，峰值锐化，气体识别和物理处理控制的技术。

    System and method for collecting and analyzing shipment parameter data affecting predicted statistical variables of shipped articles
    3.
    发明授权
    System and method for collecting and analyzing shipment parameter data affecting predicted statistical variables of shipped articles 失效
    收集和分析影响运送物品预测统计变量的运输参数数据的系统和方法

    公开(公告)号：US06643608B1

    公开(公告)日：2003-11-04

    申请号：US09510321

    申请日：2000-02-22

    申请人： John E. Hershey ,  Brock E. Osborn ,  Scott C. Evans ,  Kenneth B. Welles, II

    发明人： John E. Hershey ,  Brock E. Osborn ,  Scott C. Evans ,  Kenneth B. Welles, II

    IPC分类号： G06F1718

    CPC分类号： G06Q10/08 ,  G06F17/18

    摘要： A system for collecting and analyzing shipment parameter data, e.g., temperature, vibration, acceleration, shock, humidity, barometric pressure, pH, transit time, container position, etc., affecting predicted statistical variables of articles is provided. Examples of the predicted statistical variables may include article life expectancy, warranty costs, service and/or maintenance schedules, etc. The system is made up of a plurality of data collection subsystems for respectively collecting shipment parameter data encountered by respective articles being shipped, and a data analysis subsystem coupled to receive the collected shipment data for adjusting the respective predicted statistical variables of the articles.

    摘要翻译： 提供了一种用于收集和分析影响物品的预测统计变量的装运参数数据的系统，例如温度，振动，加速度，冲击，湿度，大气压力，pH，渡越时间，容器位置等。 预测的统计变量的示例可以包括物品预期寿命，保修成本，服务和/或维护计划等。该系统由多个数据收集子系统组成，用于分别收集被运送的各个物品遇到的装运参数数据，以及 耦合到数据分析子系统，用于接收收集的装运数据，用于调整各个物品的预测统计变量。

    Method, System and Program Product for Intelligent Prediction of Industrial Gas Turbine Maintenance Workscope
    6.
    发明申请
    Method, System and Program Product for Intelligent Prediction of Industrial Gas Turbine Maintenance Workscope 审中-公开
    工业燃气轮机维修工作示意图智能预测方法，系统和程序产品

    公开(公告)号：US20130179388A1

    公开(公告)日：2013-07-11

    申请号：US13344180

    申请日：2012-01-05

    申请人： Anurag Agarwal ,  Harish Agarwal ,  Michael E. Graham ,  Anurag Kasyap Vejjupalle Subramanyam ,  Brock E. Osborn

    发明人： Anurag Agarwal ,  Harish Agarwal ,  Michael E. Graham ,  Anurag Kasyap Vejjupalle Subramanyam ,  Brock E. Osborn

    IPC分类号： G06N5/02

    CPC分类号： G06Q10/06 ,  Y02P90/86

    摘要： A computer-implemented maintenance/repair workscope development tool uses one or more sources of gas turbine engine/fleet operational condition data, gas turbine engine/fleet historical data and gas turbine engine/fleet specific information, including other historical, statistical and maintenance/engineering records data to develop a recommended maintenance/repair workscope. A method, system and program product are described for producing a recommended maintenance/repair workscope for individual machines and/or machines on a fleet level. Relevant domain knowledge/information models along with appropriate application rules defining maintenance/repair requirements are predetermined and maintained in a network accessible database/repository. A rules/reasoner engine is used to develop logical inferences and make intelligent workscope choices based upon user input situational data, operational condition data stored in data/information databases and the predetermined knowledge/information models and rules. A disclosed non-limiting example workscope prediction/recommendation tool develops quantitative recommendations for the type of work needed to be performed to an individual gas turbine engine or an entire fleet.

    摘要翻译： 计算机维护/维修工作示波器开发工具使用一个或多个燃气轮机发动机/车队运行状况数据来源，燃气轮机发动机/车队历史数据和燃气轮机/车队特定信息，包括其他历史，统计和维护/工程 记录数据以开发推荐的维护/修理工作台。 描述了一种方法，系统和程序产品，用于为车队级的单个机器和/或机器生成推荐的维护/维修工作视图。 有关的领域知识/信息模型以及定义维护/修理要求的适当的应用规则是预先确定的，并在网络可访问数据库/存储库中维护。 根据用户输入的情境数据，存储在数据/信息数据库中的操作条件数据以及预定的知识/信息模型和规则，使用规则/推理器引擎来开发逻辑推理并做出智能的工作选择。 公开的非限制性示例工作台预测/推荐工具针对需要对单个燃气涡轮发动机或整个车队执行的工作类型开发定量建议。