-
公开(公告)号：US4978418A
公开(公告)日：1990-12-18
申请号：US233511
申请日：1988-08-18
IPC分类号： C04B41/00 , C04B41/80 , C23F1/02 , G02B6/134 , H01L21/311
CPC分类号： H01L21/31111 , C04B41/0027 , C04B41/80 , C23F1/02 , G02B6/1347
摘要： A process for etching a material such as LiNbO.sub.3 by implanting ions having a plurality of different kinetic energies in an area to be etched, and then contacting the ion implanted area with an etchant. The various energies of the ions are selected to produce implant damage substantially uniformly throughout the entire depth of the zone to be etched, thus tailoring the vertical profile of the damaged zone.
摘要翻译： 通过在待蚀刻的区域中注入具有多个不同动能的离子，然后使离子注入区与蚀刻剂接触来蚀刻诸如LiNbO 3的材料的方法。 选择离子的各种能量以在待蚀刻区域的整个深度上基本均匀地产生植入物损伤，从而调整损伤区域的垂直轮廓。
-
公开(公告)号：US4838989A
公开(公告)日：1989-06-13
申请号：US89206
申请日：1987-08-25
CPC分类号： C04B41/009 , C04B41/5346 , C04B41/91 , C23F1/02 , G02B6/245
摘要： The surfaces of solid ionic substrates are etched by a radiation-driven chemical reaction. The process involves exposing an ionic substrate coated with a layer of a reactant material on its surface to radiation, e.g. a laser, to induce localized melting of the substrate which results in the occurrance of a fusion reaction between the substrate and coating material. The resultant reaction product and excess reactant salt are then removed from the surface of the substrate with a solvent which is relatively inert towards the substrate. The laser-driven chemical etching process is especially suitable for etching ionic salt substrates, e.g., a solid inorganic salt such as LiNbO.sub.3, such as used in electro-optical/acousto-optic devices. It is also suitable for applications wherein the etching process is required to produce an etched ionic substrate having a smooth surface morphology or when a very rapid etching rate is desired.
摘要翻译： 通过辐射驱动的化学反应蚀刻固体离子基质的表面。 该方法包括将涂覆有反应物材料层的离子基质暴露于其表面上，例如辐射。 激光，以引起基板的局部熔化，这导致基板和涂层材料之间的聚变反应的发生。 然后将所得反应产物和过量的反应物盐用对基材相对惰性的溶剂从基材表面除去。 激光驱动的化学蚀刻工艺特别适用于蚀刻离子盐底物，例如LiNbO 3等固体无机盐，例如用在电光/声光器件中。 它也适用于其中需要蚀刻工艺以产生具有光滑表面形态的蚀刻离子基底或当需要非常快速的蚀刻速率时的应用。
-
公开(公告)号：US4978893A
公开(公告)日：1990-12-18
申请号：US249815
申请日：1988-09-27
申请人： Paul J. Brannon , Donald F. Cowgill
发明人： Paul J. Brannon , Donald F. Cowgill
IPC分类号： H01T2/00
CPC分类号： H01T2/00
摘要： A laser-triggered vacuum switch has a material such as a alkali metal halide on the cathode electrode for thermally activated field emission of electrons and ions upon interaction with a laser beam, the material being in contact with the cathode with a surface facing the discharge gap. The material is preferably a mixture of KCl and Ti powders. The laser may either shine directly on the material, preferably through a hole in the anode, or be directed to the material over a fiber optic cable.
摘要翻译： 激光触发真空开关在阴极上具有诸如碱金属卤化物的材料，用于在与激光束相互作用时电子和离子的热激活场发射，该材料与阴极接触，其表面面向放电间隙 。 该材料优选为KCl和Ti粉末的混合物。 激光器可以直接照射在材料上，优选地通过阳极中的孔发光，或者通过光纤电缆被引导到材料上。
-
-
搜索结果
3 条记录 (耗时 0.023 秒)
