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1.发明授权Apparatus for reducing plasma constriction by intermediate injection of hydrogen in RF plasma gun 失效用于通过RF等离子体枪中的中间注入氢来减少等离子体收缩的装置
公开(公告)号：US5159173A
公开(公告)日：1992-10-27
申请号：US774909
申请日：1991-10-11
申请人： Gerhard Frind , Sudhir D. Savkar
发明人： Gerhard Frind , Sudhir D. Savkar
IPC分类号： H05H1/24
CPC分类号： H05H1/52
摘要： Apparatus and a method for generating an RF plasma plume wherein hydrogen gas is introduced downstream of the means for injecting plasma gas in order to increase the coupling between the RF coil and the plume and to decrease heat loss to the plasma containment walls.
摘要翻译： 用于产生RF等离子体羽流的装置和方法，其中在用于注入等离子体气体的装置的下游引入氢气，以增加RF线圈和羽流之间的耦合并减少对等离子体容纳壁的热损失。
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2.发明授权Method for reducing plasma constriction by intermediate injection of hydrogen in RF plasma gun 失效通过RF等离子枪中间注入氢气来减少等离子体收缩的方法
公开(公告)号：US5095189A
公开(公告)日：1992-03-10
申请号：US588394
申请日：1990-09-26
申请人： Gerhard Frind , Sudhir D. Savkar
发明人： Gerhard Frind , Sudhir D. Savkar
IPC分类号： H05H1/24
CPC分类号： H05H1/52
摘要： Apparatus and a method for generating an RF plasma plume wherein hydrogen gas is introduced downstream of the means for injecting plasma gas in order to increase the coupling between the RF coil and the plume and to decrease heat loss to the plasma containment walls.
摘要翻译： 用于产生RF等离子体羽流的装置和方法，其中在用于注入等离子体气体的装置的下游引入氢气，以增加RF线圈和羽流之间的耦合并减少对等离子体容纳壁的热损失。
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公开(公告)号：US5233155A
公开(公告)日：1993-08-03
申请号：US654696
申请日：1991-02-13
申请人： Gerhard Frind
发明人： Gerhard Frind
摘要： Strike-over in an RF plasma gun is eliminated by interposing a grounded isolation device between the plasma jet and the RF coil which supplies energy to the plasma. The isolation device comprises a plurality of separated segments spaced apart in a circumferential direction and electrically connected together at one end and to ground potential. The shield substantially eliminates the parasitic distributed capacitance between the RF coil and the plasma by interrupting the electrical field coupling between the coil and the plasma and shunting most of the capacitive current flow to ground. The invention enables reliable operation of the device at frequencies in the 2-4 MHz range.
摘要翻译： 通过在等离子体射流和向等离子体提供能量的RF线圈之间插入接地隔离装置来消除RF等离子体枪中的击穿。 隔离装置包括沿圆周方向间隔开并在一端电连接到一起并具有地电位的多个分离的段。 通过中断线圈和等离子体之间的电场耦合并将大部分电容电流分流到地，屏蔽件基本上消除了RF线圈和等离子体之间的寄生分布电容。 本发明使得器件在2-4MHz范围内的频率可靠地工作。
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4.发明授权Low frequency plasma spray method in which a stable plasma is created by operating a spray gun at less than 1 MHz in a mixture of argon and helium gas 失效低频等离子体喷射方法，其中稳定的等离子体是通过在不超过1MHZ的阿贡和气体混合物中操作喷枪而产生的
公开(公告)号：US5120567A
公开(公告)日：1992-06-09
申请号：US524527
申请日：1990-05-17
CPC分类号： C23C4/137
摘要： A low frequency RF plasma spray deposition method is provided, which is especially effective in reducing losses and improving particle heating. In one aspect of the invention, an RF plasma gun is operated in the frequency range below 1 MHz and an argon-helium mixture to which a third component, such as hydrogen, can also be admixed, is substituted for the standard argon-hydrogen mixture used at frequencies above 2 MHz. In another aspect of the invention, a RF plasma gun is operated in the frequency range of 400-500 kHz and specific start up and operating procedures and conditions are set forth for successful deposition of titanium and refractory metal alloys.
摘要翻译： 提供了一种低频RF等离子体喷涂沉积方法，其特别有效地减少了损耗并改善了颗粒加热。 在本发明的一个方面中，RF等离子体枪在低于1MHz的频率范围内操作，并且也可以混合第三组分如氢的氩 - 氦混合物代替标准氩 - 氢混合物 用于2 MHz以上的频率。 在本发明的另一方面，RF等离子体枪在400-500kHz的频率范围内工作，并且为了成功沉积钛和难熔金属合金，阐述了特定的启动和操作步骤和条件。
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公开(公告)号：US4392035A
公开(公告)日：1983-07-05
申请号：US270056
申请日：1981-06-03
申请人： Gerhard Frind , James J. Carroll , John H. Van Noy
发明人： Gerhard Frind , James J. Carroll , John H. Van Noy
IPC分类号： H01H33/664 , H01H33/66
CPC分类号： H01H33/6641
摘要： Improvement of the peak current interruption performance of a vacuum interrupter is obtained by configuring the conductive leads to the vacuum interrupter in a manner whereby the magnetic field generated by current in the conductive leads and impinging upon the space between a pair of contacts of the vacuum interrupter is minimized, thereby resulting in better performance of the vacuum interrupter.
摘要翻译： 真空断路器的峰值电流中断性能的改善是通过将导电引线配置到真空断路器上而得到的，其中由导电引线中的电流产生的磁场和入射到真空断路器的一对触点之间的空间 被最小化，从而导致真空断路器的更好的性能。
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6.发明授权Apparatus and method for transfer arc cleaning of a substrate in an RF plasma system 失效用于在RF等离子体系统中转移电弧清洁衬底的装置和方法
公开(公告)号：US4902870A
公开(公告)日：1990-02-20
申请号：US330854
申请日：1989-03-31
摘要： An RF plasma gun has a metal annular support ring at the gun's nozzle exit port. The ring is conductively mounted to a metal tank containing a substrate to be processed. The substrate is connected to a manipulator which is electrically isolated from the tank. A DC voltage is impressed between the tank, which contains an inert atmosphere at a pressure below that of ambient atmosphere, and the manipulator. The tank is placed at ground potential and the manipulator at a negative potential relative to the tank. The DC voltage creates an electric arc which flows from the exit port ring via the plasma to the substrate for cleaning the substrate.
摘要翻译： 射频等离子体枪在枪的喷嘴出口处具有金属环形支撑环。 该环导电地安装在含有待处理基板的金属槽中。 基板连接到与罐电隔离的操纵器。 在包含低于环境大气压力的惰性气氛的罐和操纵器之间施加直流电压。 坦克处于地电位，操纵器相对于油箱处于负电位。 DC电压产生电弧，该电弧从出口端口环经由等离子体流到衬底以清洁衬底。
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公开(公告)号：US4224490A
公开(公告)日：1980-09-23
申请号：US958041
申请日：1978-11-06
申请人： Gerhard Frind
发明人： Gerhard Frind
IPC分类号： H01H33/70 , H01H33/915
CPC分类号： H01H33/7023
摘要： The contacts and nozzle of a fluid blast circuit breaker are constructed to have a cross section with a shape other than circular or square. Such cross section facilitates providing the fluid for extinguishing an arc in a circuit breaker at a velocity perpendicular to the arc greater than the fluid velocity in a circular or square configuration nozzle having the same cross sectional area. Such high velocity fluid flow facilitates interrupting the arc by increasing the cooling rate of fluid flow past the arc.
摘要翻译： 流体鼓风断路器的触点和喷嘴被构造成具有除了圆形或正方形之外的形状的横截面。 这种横截面有助于提供流体以垂直于弧的速度在断路器中熄灭电弧，大于具有相同横截面积的圆形或正方形配置喷嘴中的流体速度。 这种高速流体流动有助于通过增加流过电弧的流体流的冷却速率来中断电弧。
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公开(公告)号：US5225656A
公开(公告)日：1993-07-06
申请号：US540974
申请日：1990-06-20
申请人： Gerhard Frind
发明人： Gerhard Frind
IPC分类号： B23K10/02
CPC分类号： B23K10/027
摘要： Apparatus and method for an RF plasma gun with injection probe that imparts feed material with a controllable radial component of motion by providing a conical exit port for the injection probe or a mesh screen therein.
摘要翻译： 一种具有注射探针的射频等离子体枪的装置和方法，其通过为其中的注射探针或网眼屏幕提供锥形出口而使饲料具有可控制的径向运动分量。
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公开(公告)号：US4661665A
公开(公告)日：1987-04-28
申请号：US884326
申请日：1986-07-10
申请人： James J. Carroll , Gerhard Frind , John H. VanNoy
发明人： James J. Carroll , Gerhard Frind , John H. VanNoy
IPC分类号： H01H11/00 , H01H33/664 , H01H33/66
CPC分类号： H01H33/6641 , H01H11/0006
摘要： A vacuum interrupter includes an evacuated envelope and a pair of facing contacts situated therein. The contacts are relatively movable along a first axis from an engaged position to a disengaged position. Conductors extending through the envelope are provided for connecting the contacts to an external circuit. A pair of magnetic field coils are disposed on opposite sides of the contacts and connected in series therewith for establishing an axial magnetic field in the space between the contacts when the contacts are in the disengaged position.
摘要翻译： 真空断路器包括抽真空的外壳和位于其中的一对面对触头。 接触件可沿着第一轴线从接合位置相对移动到脱离位置。 提供延伸穿过信封的导体用于将触点连接到外部电路。 一对磁场线圈设置在触点的相对侧上并与之串联连接，以便当触头处于分离位置时在触头之间的空间中建立轴向磁场。
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公开(公告)号：US4638283A
公开(公告)日：1987-01-20
申请号：US799711
申请日：1985-11-19
IPC分类号： H01H85/042 , H01H85/38 , H01H85/04
CPC分类号： H01H85/38 , H01H85/042
摘要： An exothermically assisted electric fuse, having at least one exothermic body disposed in heat transfer relationship with at least a portion of each fusible element of the fuse, a triggering circuit for initiating an exothermic reaction in response to an overcurrent through the fuse, and a containment body partially enclosing the exothermic body for directing the heat energy released by the exothermic reaction. The containment body is disposed so as to confine and direct the heat energy in a direction which is substantially perpendicular to a plane containing the portion of the fusible element which is in heat transfer relationship with the exothermic body. In a preferred embodiment of such a fuse, the fusible element is wound around a support so that the fuse windings form the general shape of a cylinder, and the containment body is disposed so that the heat energy is directed in a radial direction with respect to the cylinder formed by the fuse windings. The exothermic body preferably comprises a two-part structure in which a mixture of boron and potassium perchlorate acts as a primer for a larger body of exothermic material formed from a mixture of aluminum and potassium perchlorate.
摘要翻译： 一种放热辅助电熔丝，其具有至少一个与保险丝的每个可熔元件的至少一部分热传递关系的放热体，用于响应于通过保险丝的过电流引发放热反应的触发电路， 身体部分地封闭放热体，用于引导放热反应释放的热能。 容纳体被设置成将热能限制在大致垂直于包含与放热体传热关系的可熔元件的部分的平面的方向上。 在这种保险丝的优选实施例中，可熔元件缠绕在支撑件上，使得保险丝绕组形成圆柱体的大致形状，并且容纳体被设置成使热能相对于 保险丝圈由圆筒形成。 放热体优选包括两部分结构，其中硼和高氯酸钾的混合物用作由高氯酸铝和高氯酸钾的混合物形成的更大体积的放热材料的底漆。
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