公开(公告)号：US07198887B2

公开(公告)日：2007-04-03

申请号：US10811558

申请日：2004-03-29

申请人： Geun-soo Lee ,  Cheol-kyu Bok ,  Seung-chan Moon ,  Ki-soo Shin ,  Won-wook Lee

发明人： Geun-soo Lee ,  Cheol-kyu Bok ,  Seung-chan Moon ,  Ki-soo Shin ,  Won-wook Lee

IPC分类号： G03F7/20 ,  G03F7/30 ,  G03C1/825 ,  G03C1/835

CPC分类号： G03F7/091

摘要： Disclosed are an organic anti-reflective coating polymer having a structure represented by the following formula I, its preparation method and an organic anti-reflective coating composition with respect to an ultra-fine pattern formation process of the photoresist for photolithography technique using ArF light source with a wavelength of 193 nm or VUV light source with a wavelength of 157 nm. An organic anti-reflective coating polymer capable of protecting a photoresist from amines in the atmosphere to minimize the post exposure delay effect after exposure to light and, at the same time, enhances notching status, such as, a pattern distortion caused by diffused reflection, and reducing reflection rate to minimize the swing effect. wherein m is an integer ranging from 5 to 5000.

摘要翻译： 本发明公开了一种有机抗反射涂层聚合物，其具有由下式I表示的结构，其制备方法和有机抗反射涂层组合物相对于使用ArF光源的光刻技术的光致抗蚀剂的超细图案形成方法 波长为193nm，波长157nm的VUV光源。 能够在大气中保护光致抗蚀剂免受胺的影响的有机抗反射涂层聚合物，以使曝光后的曝光后延迟效果最小化，同时增加凹陷状态，例如由扩散反射引起的图案变形， 并减少反射率以最小化摆动效果。

公开(公告)号：US20050014089A1

公开(公告)日：2005-01-20

申请号：US10811558

申请日：2004-03-29

申请人： Geun-soo Lee ,  Cheol-kyu Bok ,  Seung-chan Moon ,  Ki-soo Shin ,  Won-wook Lee

发明人： Geun-soo Lee ,  Cheol-kyu Bok ,  Seung-chan Moon ,  Ki-soo Shin ,  Won-wook Lee

IPC分类号： G03F7/11 ,  C08F130/02 ,  C08L29/04 ,  C09D5/33 ,  C09D143/02 ,  G03C1/76 ,  G03F7/09 ,  H01L21/027

CPC分类号： G03F7/091

摘要： Disclosed are an organic anti-reflective coating polymer having a structure represented by the following formula I, its preparation method and an organic anti-reflective coating composition with respect to an ultra-fine pattern formation process of the photoresist for photolithography technique using ArF light source with a wavelength of 193 nm or VUV light source with a wavelength of 157 nm. An organic anti-reflective coating polymer capable of protecting a photoresist from amines in the atmosphere to minimize the post exposure delay effect after exposure to light and, at the same time, enhances notching status, such as, a pattern distortion caused by diffused reflection, and reducing reflection rate to minimize the swing effect. wherein m is an integer ranging from 5 to 5000.

摘要翻译： 本发明公开了一种有机抗反射涂层聚合物，其具有由下式I表示的结构，其制备方法和有机抗反射涂层组合物相对于使用ArF光源的光刻技术的光致抗蚀剂的超细图案形成方法 波长为193nm，波长157nm的VUV光源。 能够在大气中保护光致抗蚀剂免受胺的影响的有机抗反射涂层聚合物，以使曝光后的曝光后延迟效果最小化，同时增加凹陷状态，例如由扩散反射引起的图案变形， 并减少反射率以最小化摆动效果。 其中m为5至5000的整数。

公开(公告)号：US20060291906A1

公开(公告)日：2006-12-28

申请号：US11350124

申请日：2006-02-09

申请人： Won-wook Lee

发明人： Won-wook Lee

IPC分类号： G03G15/01

CPC分类号： G03G15/0173 ,  G03G2215/018

摘要： A color image forming apparatus includes a plurality of developers, an exposure unit forming a plurality of latent images on a photosensitive medium, and a power transmission unit simultaneously driving two of the developers that store toners having different polarities and colors. A charging unit converts toner images having different polarities, which are developed on the photosensitive medium, into toner images having the same polarity. The toner images are superpositionally transferred from the photosensitive medium to an intermediate transfer unit to form a color image.

摘要翻译： 彩色图像形成装置包括多个显影剂，在感光介质上形成多个潜像的曝光单元和同时驱动存储具有不同极性和颜色的调色剂的两个显影剂的电力传输单元。 充电单元将在感光介质上显影的具有不同极性的调色剂图像转换成具有相同极性的调色剂图像。 将调色剂图像从感光介质重叠地转印到中间转印单元以形成彩色图像。

公开(公告)号：US07702259B2

公开(公告)日：2010-04-20

申请号：US11441057

申请日：2006-05-26

申请人： Jong-moon Eun ,  Hisao Okada ,  Hyun-cheol Lee ,  Won Choe ,  Hyun-wook Bae ,  Won-wook Lee ,  So-won Sheen ,  In-cheol Jeon

发明人： Jong-moon Eun ,  Hisao Okada ,  Hyun-cheol Lee ,  Won Choe ,  Hyun-wook Bae ,  Won-wook Lee ,  So-won Sheen ,  In-cheol Jeon

IPC分类号： G03G15/01

CPC分类号： G03G15/00 ,  G03G15/04045

摘要： Provided are a multi-pass image forming apparatus and an image forming method using the same. The multi-pass image forming apparatus includes a plurality of developers for forming a plurality of electrostatic latent images using toners having different polarities and colors in one development process and for forming a multi-color image in at least two development processes; an exposure unit for forming the plurality of the electrostatic latent images on a photosensitive medium; and an intermediate transferring unit for having a toner images transferred thereon from the photosensitive medium that overlap to form the multi-color image, wherein the toner image may overlap another toner image on the intermediate transferring unit.

摘要翻译： 提供一种多遍图像形成装置和使用其的图像形成方法。 多遍图像形成装置包括：多个显影剂，用于在一个显影过程中使用具有不同极性和颜色的调色剂形成多个静电潜像，并且用于在至少两个显影过程中形成多色图像; 用于在感光介质上形成多个静电潜像的曝光单元; 以及中间转印单元，用于使从其上重叠形成多色图像的感光介质转印到其上的调色剂图像，其中调色剂图像可能与中间转印单元上的另一个调色剂图像重叠。

公开(公告)号：US20060285883A1

公开(公告)日：2006-12-21

申请号：US11441057

申请日：2006-05-26

申请人： Jong-moon Eun ,  Hisao Okada ,  Hyun-cheol Lee ,  Won Choe ,  Hyun-wook Bae ,  Won-wook Lee ,  So-won Sheen ,  In-cheol Jeon

发明人： Jong-moon Eun ,  Hisao Okada ,  Hyun-cheol Lee ,  Won Choe ,  Hyun-wook Bae ,  Won-wook Lee ,  So-won Sheen ,  In-cheol Jeon

IPC分类号： G03G15/01

CPC分类号： G03G15/00 ,  G03G15/04045

摘要： Provided are a multi-pass image forming apparatus and an image forming method using the same. The multi-pass image forming apparatus includes a plurality of developers for forming a plurality of electrostatic latent images using toners having different polarities and colors in one development process and for forming a multi-color image in at least two development processes; an exposure unit for forming the plurality of the electrostatic latent images on a photosensitive medium; and an intermediate transferring unit for having a toner images transferred thereon from the photosensitive medium that overlap to form the multi-color image, wherein the toner image may overlap another toner image on the intermediate transferring unit.

摘要翻译： 提供一种多遍图像形成装置和使用其的图像形成方法。 多遍图像形成装置包括：多个显影剂，用于在一个显影过程中使用具有不同极性和颜色的调色剂形成多个静电潜像，并且用于在至少两个显影过程中形成多色图像; 用于在感光介质上形成多个静电潜像的曝光单元; 以及中间转印单元，用于使从其上重叠形成多色图像的感光介质转印到其上的调色剂图像，其中调色剂图像可能与中间转印单元上的另一个调色剂图像重叠。