摘要:
In a slurry composition and a method of polishing a layer using the slurry composition, the slurry composition includes from about 3 to 20 percent by weight of an abrasive, from about 0.1 to 3 percent by weight of an ionic surfactant, from about 0.01 to 0.1 percent by weight of a nonionic surfactant, from about 0.01 to 1 percent by weight of a polish accelerating agent including an amino acid compound, and a remainder of an aqueous solution including a basic pH-controlling agent and water. The slurry composition including the nonionic surfactant and the polish accelerating agent may be used for speedily polishing a stepped upper portion of a silicon oxide layer, and may also enable a lower portion of the silicon oxide layer to function as a polish stop layer.
摘要:
A slurry composition includes an acidic aqueous solution and one or both of, an amphoteric surfactant and a glycol compound. Examples of the amphoteric surfactant include a betaine compound and an amino acid compound, and examples of the amino acid compound include lysine, proline and arginine. Examples of the glycol compound include diethylene glycol, ethylene glycol and polyethylene glycol.
摘要:
The present invention relates to a conditioner device for polishing pad and a chemical mechanical polishing (CMP) apparatus having the same. The conditioner device of the present invention comprises a rotable support plate including a support plate surface comprising a center area located about the rotational axis of the support plate, a mid area surrounding the center area, and a peripheral area surrounding the mid area, a plurality of conditioning zones located within a portion of the mid area of the support plate surface. A plurality of hard particles which are densely arranged within the conditioning zones and are attached to the support plate surface. A plurality of passages defined by the conditioning zones within which a slurry flows, the passages occupying a portion of the mid area which is not occupied by the conditioning zones, the center area and the peripheral area.
摘要:
An additive composition for a slurry contains a first salt of polymeric acid including a first polymeric acid having a first weight average molecular weight and a first base material, and a second salt of polymeric acid including a second polymeric acid having a second weight average molecular weight and a second base material. A slurry composition is prepared by mixing the additive composition, a polishing particle composition, and water. When implementing a chemical mechanical polishing using the slurry composition, a favorable polishing selectivity is realized.
摘要:
A method and apparatus are provided for setting a desired destination in a navigation terminal. A position information message is received. Position coordinates corresponding to the position information included in the position information message are set as the position coordinates of a desired destination related to a certain route.
摘要:
A nonvolatile memory device comprises a bulk region and a plurality of memory cells connected to a source line and a plurality of wordlines. The method comprises applying a source line voltage to the source line with a first magnitude, applying a bulk voltage to the bulk region with a second magnitude lower than the first magnitude, and performing access operations on the plurality of memory cells while maintaining a substantially constant difference between the bulk voltage and the source line voltage.
摘要:
A method for selecting an antenna in an orthogonalized spatial multiplexing system. Upon receipt of at least one symbol from a transmitter via multiple receive antennas, a receiver decodes each of the received symbols; determines a rotation angle between the received symbols, and selects an optimal subset of transmit antennas using a distance between vectors of the decoded symbols; generates feedback information including the determined rotation angle and the selected optimal subset, and transmits the generated feedback information to the transmitter. Upon receipt of the feedback information, the transmitter beam-forms an antenna corresponding to the optimal subset depending on the received feedback information, and transmits a data symbol to the receiver. The receiver detects each of data symbols received from the transmitter.
摘要:
Disclosed is a built-in antenna apparatus comprising a plurality of antenna blocks, and an electrical connection device for connecting adjacent antenna blocks, the electrical connection device selectively connecting the antenna blocks so as to form varieties of the antenna. This enables the antenna blocks to be easily and detachably arranged according to the external shape, available mounting space and antenna characteristics of the mobile communications terminal.