Patterning method
    1.
    发明申请
    Patterning method 有权
    图案化方法

    公开(公告)号:US20050124092A1

    公开(公告)日:2005-06-09

    申请号:US10485419

    申请日:2003-05-28

    摘要: The invention relates to a method for creating a pattern on a substrate comprising a first alignment structure, using an elastomeric stamp comprising a patterning structure and a second alignment structure. The method comprises a moving step for moving the elastomeric stamp towards the substrate, and a deformation step for deforming the patterning structure with a tensile or compressive force generated by cooperation of the first alignment structure and the second alignment structure.

    摘要翻译: 本发明涉及一种用于在包括第一对准结构的基板上形成图案的方法,该方法使用包括图案化结构和第二对准结构的弹性印模。 该方法包括用于将弹性体印模移动到基板的移动步骤,以及用于通过第一对准结构和第二对准结构的协作产生的拉伸或压缩力使图案化结构变形的变形步骤。

    SURFACE STRESS SENSOR
    10.
    发明申请
    SURFACE STRESS SENSOR 有权
    表面应力传感器

    公开(公告)号:US20130133433A1

    公开(公告)日:2013-05-30

    申请号:US13699667

    申请日:2011-05-09

    IPC分类号: G01L1/18

    摘要: Deflection of a free end of one plate-like member, that is caused by uniform stress, is transmitted to the other plate-like member by moving a free end of the other plate-like member. According to this configuration, the uniform stress applied to the one plate-like member is converted into stress induced by a point force in the other plate-like member, and then, the induced stress is concentrated on a fixed end side narrow portion in which a piezoresistor is provided. Thus, a novel structure for a piezoresistive surface stress sensor having high sensitivity to uniform stress applied to the surface of the sensor is provided.

    摘要翻译: 由均匀的应力引起的一个板状构件的自由端的偏移通过移动另一个板状构件的自由端而被传递到另一个板状构件。 根据该结构,施加到一个板状构件的均匀的应力被转换为由另一个板状构件中的点力引起的应力,然后,感应应力集中在固定端侧窄部, 提供一个压敏电阻。 因此,提供了对施加到传感器的表面的均匀应力具有高灵敏度的压阻表面应力传感器的新型结构。