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    SYSTEM FOR DETECTION OF A PHOTON EMISSION GENERATED BY A DEVICE AND METHODS FOR DETECTING THE SAME
    1.
    发明申请
    SYSTEM FOR DETECTION OF A PHOTON EMISSION GENERATED BY A DEVICE AND METHODS FOR DETECTING THE SAME 有权

    公开(公告)号：US20180128874A1

    公开(公告)日：2018-05-10

    申请号：US15346025

    申请日：2016-11-08

    申请人： Globalfoundries Singapore Pte. Ltd.

    发明人： Lei Zhu ,  Pik Kee Tan ,  Zhihong Mai ,  Huei Hao Yap ,  Jeffrey Chor-Keung Lam

    IPC分类号： G01R31/311 ,  G01R31/307 ,  G01R31/28

    CPC分类号： G01R31/311 ,  G01R31/2894 ,  G01R31/307

    摘要： A system for detection of a photon emission generate by a device of an integrated circuit, and methods for detecting the same are provided. The system includes a device space configured to include the device. The system further includes an electrical probe proximate the device space and configured to couple to the device. The electrical probe is configured to induce the device to generate the photon emission. The system further includes an optical fiber having a first end proximate the device space and a second end spaced from the first end. The first end is configured to receive the photon emission generated by the device. The optical fiber is configured to transmit the photon emission from the first end to the second end. The system further includes a detector in communication with the second end of the optical fiber and configured to detect the photon emission transmitted by the optical fiber.

    Setup for multiple cross-section sample preparation
    3.
    发明授权
    Setup for multiple cross-section sample preparation 有权
    设置多个横截面样品制备

    公开(公告)号：US09496187B2

    公开(公告)日：2016-11-15

    申请号：US14084636

    申请日：2013-11-20

    申请人： GLOBALFOUNDRIES Singapore Pte. Ltd.

    发明人： Tsu Hau Ng ,  Zhihong Mai ,  Mohammed Khalid Bin Dawood ,  Pik Kee Tan ,  Yamin Huang ,  Jeffrey Chor-Keung Lam

    IPC分类号： B24B41/06 ,  H01L21/66 ,  B24B49/12 ,  G01N1/32

    CPC分类号： H01L22/12 ,  B24B49/12 ,  G01N1/32 ,  H01J2237/20

    摘要： A multiple-sample-holder polishing setup for cross-section sample preparation and a method of making a device using the same are presented. The multiple-sample-holder polishing setup includes a frame. The frame has a hollow center, one or more long and short rods and a recess for accommodating a polishing head. The setup includes one or more sample holders. The sample holder is to be attached to the one or more long and short rods of the frame. A paddle is affixed to each sample holder. A sample is attached to the paddle. The sample is coated with a thin epoxy layer prior to polishing thereby allowing for easy inspection for site of interests as well as quick material removal.

    摘要翻译： 提出了用于横截面样品制备的多样品架抛光装置和使用其的装置的制造方法。 多采样架抛光设置包括一个框架。 框架具有中空中心，一个或多个长短杆和用于容纳抛光头的凹部。 该设置包括一个或多个样品架。 样品架应安装在框架的一个或多个长棒和短杆上。 每个样品架上贴上桨叶。 样品附在桨上。 在抛光之前，样品被涂覆有薄的环氧树脂层，从而可以方便地检查感兴趣的位置以及快速的材料去除。