Process for manufacturing micro- and nano- devices
    3.
    发明授权
    Process for manufacturing micro- and nano- devices 有权
    制造微型和纳米器件的工艺

    公开(公告)号:US07776227B2

    公开(公告)日:2010-08-17

    申请号:US11658272

    申请日:2005-07-19

    申请人: Sudipta Roy

    发明人: Sudipta Roy

    IPC分类号: C23F1/00

    摘要: A method of depositing or etching a micro- or nano-scale pattern on a work piece is disclosed, including the steps of: (a) placing the work piece in an electrochemical reactor in close proximity to a patterned tool; (b) connecting the work piece such that it is the anode if is to be etched or the cathode if it is to be deposited, and the patterned tool such that it is the counter electrode; (c) pumping electrolytic fluid necessary for the electrolytic operation of the cell formed between the two electrodes; and (d) applying a current across the electrodes to etch or deposit the work piece.

    摘要翻译: 公开了一种在工件上沉积或蚀刻微尺度或纳米尺度图案的方法,包括以下步骤:(a)将工件放置在非常靠近图案化工具的电化学反应器中; (b)连接工件,使其为待蚀刻的阳极,如果要沉积则为阴极;图案化工具使其为对电极; (c)泵送形成在两个电极之间的电池的电解操作所需的电解液; 和(d)在电极上施加电流以蚀刻或沉积工件。

    Process for Manufacturing Micro-and Nano-Devices
    5.
    发明申请
    Process for Manufacturing Micro-and Nano-Devices 有权
    微纳米器件制造工艺

    公开(公告)号:US20080283501A1

    公开(公告)日:2008-11-20

    申请号:US11658272

    申请日:2005-07-19

    申请人: Sudipta Roy

    发明人: Sudipta Roy

    IPC分类号: C23F1/00

    摘要: A method of depositing or etching a micro- or nano-scale pattern on a work piece is disclosed, including the steps of: (a) placing the work piece in an electrochemical reactor in close proximity to a patterned tool; (b) connecting the work piece such that it is the anode if is to be etched or the cathode if it is to be deposited, and the patterned tool such that it is the counter electrode; (c) pumping electrolytic fluid necessary for the electrolytic operation of the cell formed between the two electrodes; and (d) applying a current across the electrodes to etch or deposit the work piece.

    摘要翻译: 公开了一种在工件上沉积或蚀刻微尺度或纳米尺度图案的方法,包括以下步骤:(a)将工件放置在非常靠近图案化工具的电化学反应器中; (b)连接工件,使其为待蚀刻的阳极,如果要沉积则为阴极;图案化工具使其为对电极; (c)泵送形成在两个电极之间的电池的电解操作所需的电解液; 和(d)在电极上施加电流以蚀刻或沉积工件。