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公开(公告)号：US20160172951A1
公开(公告)日：2016-06-16
申请号：US14908173
申请日：2013-12-12
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Masakuni KIMOTO , Norihide ADACHI
CPC classification number: G02B26/085 , B81B3/0045 , B81B2201/042 , B81B2203/0154 , G02B26/0816 , G02B26/0858 , G02B26/101 , H02K33/18
Abstract: A torsion bar portion is of a meandering shape including a plurality of straight sections and a plurality of turnover sections. The plurality of straight sections extends in a first direction along a swing axis and is juxtaposed in a second direction intersecting with the first direction. The plurality of turnover sections alternately couples two ends of the straight sections. Wiring is disposed on the torsion bar portion. The wiring includes first wiring sections and second wiring sections. The first wiring sections include damascene wiring sections that are disposed so as to be embedded in grooves formed in the turnover sections and that are made of a first metal material including Cu. The second wiring sections are disposed on the straight sections and are made of a second metal material more resistant to plastic deformation than the first metal material.
Abstract translation: 扭杆部具有包括多个直部和多个周转部的曲折形状。 多个直线部分沿着摆动轴线沿第一方向延伸并且在与第一方向相交的第二方向上并列。 多个翻转部分交替地连接直线部分的两端。 配线设置在扭杆部上。 布线包括第一布线部和第二布线部。 第一布线部分包括镶嵌布线部分，其布置成嵌入在周转部分中形成的凹槽中，并且由包括Cu的第一金属材料制成。 第二配线部分设置在直线部分上，并且由比第一金属材料更能抵抗塑性变形的第二金属材料制成。
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公开(公告)号：US20200180944A1
公开(公告)日：2020-06-11
申请号：US16789795
申请日：2020-02-13
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Yuki MORINAGA , Daiki SUZUKI , Yoshihisa WARASHINA
Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.
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公开(公告)号：US20190016589A1
公开(公告)日：2019-01-17
申请号：US16070562
申请日：2016-12-22
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Yuki MORINAGA , Daiki SUZUKI , Yoshihisa WARASHINA
Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.
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公开(公告)号：US20160154233A1
公开(公告)日：2016-06-02
申请号：US14904213
申请日：2013-12-12
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Masakuni KIMOTO , Norihide ADACHI
IPC: G02B26/08
CPC classification number: G02B26/0816 , B81B3/0021 , B81B2201/042 , G02B26/085 , G02B26/101
Abstract: A mirror device includes a mirror structure including a first movable portion and a second movable portion coupled to a support portion so as to be swingable, and, a mirror, a first coil, and a second coil disposed on the movable portions; a first magnetic portion and a second magnetic portion disposed on a same side as a back surface of the mirror structure to be opposed to the mirror structure, and having a magnetic pole of a first polarity and a magnetic pole of a second polarity, respectively; and a cap structure disposed on a same side as a surface of the mirror structure. The cap structure includes a first region having a magnetic pole of the first polarity, a second region having a magnetic pole of the second polarity, and an unmagnetized third region located between the first region and the second region.
Abstract translation: 镜装置包括：反射镜结构，包括第一可动部分和第二可移动部分，其联接到支撑部分以便可摆动;以及镜子，第一线圈和设置在可动部分上的第二线圈; 第一磁性部分和第二磁性部分，其设置在与镜子结构相对的反射镜结构的背面的相同侧上，并且分别具有第一极性的磁极和第二极性的磁极; 以及盖结构，其设置在与所述镜结构的表面相同的一侧上。 盖结构包括具有第一极性的磁极的第一区域，具有第二极性的磁极的第二区域和位于第一区域和第二区域之间的非磁化的第三区域。
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公开(公告)号：US20180148314A1
公开(公告)日：2018-05-31
申请号：US15316549
申请日：2015-06-10
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Shinya IWASHINA , Masakuni KIMOTO , Yuki MORINAGA
CPC classification number: B81B3/001 , B81B3/00 , B81C3/00 , B81C3/001 , G02B7/1821 , G02B26/085 , G02B26/101
Abstract: A mirror drive device includes a support part, a movable part, a permanent magnet forming a magnetic field in the periphery of the movable part, and a circuit board disposed between the support part and the permanent magnet in a facing direction of a pair of principal surfaces of the movable part so as to cause the movable part to be positioned at an inside of the circuit board when viewed in the facing direction. The movable part includes a mirror disposition portion, a mirror disposed and a drive coil so as to face the permanent magnet. The support part includes a base portion connected to a connection member and a reinforcing portion extending from the base portion toward a side away from the permanent magnet and the circuit board. The drive coil is connected to electrodes by lead-out conductors.
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Patent Agency Ranking
公开(公告)号：US20170293136A1
公开(公告)日：2017-10-12
申请号：US15634296
申请日：2017-06-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Masakuni KIMOTO , Norihide ADACHI
CPC classification number: G02B26/085 , B81B3/0045 , B81B2201/042 , B81B2203/0154 , G02B26/0816 , G02B26/0858 , G02B26/101 , H02K33/18
Abstract: A torsion bar portion is of a meandering shape including a plurality of straight sections and a plurality of turnover sections. The plurality of straight sections extends in a first direction along a swing axis and is juxtaposed in a second direction intersecting with the first direction. The plurality of turnover sections alternately couples two ends of the straight sections. Wiring is disposed on the torsion bar portion. The wiring includes first wiring sections and second wiring sections. The first wiring sections include damascene wiring sections that are disposed so as to be embedded in grooves formed in the turnover sections and that are made of a first metal material including Cu. The second wiring sections are disposed on the straight sections and are made of a second metal material more resistant to plastic deformation than the first metal material.
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公开(公告)号：US20240190699A1
公开(公告)日：2024-06-13
申请号：US18581466
申请日：2024-02-20
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Yuki MORINAGA , Daiki SUZUKI , Yoshihisa WARASHINA
CPC classification number: B81B7/0006 , B81B3/0075 , G02B26/08 , G02B26/085 , B81B2201/042 , B81B2201/045 , B81B2203/0154 , B81B2203/0181 , B81B2203/058 , B81B2207/07
Abstract: An actuator device includes a support portion, a movable portion, a connection portion, a first wiring provided to the connection portion, a second wiring provided to the movable portion, a first insulation layer which includes a first opening exposing a surface opposite to the movable portion in a first connection part located at the movable portion in one wiring of the first and second wirings, a second insulation layer covering the first and second wirings. The other wiring of the first and second wirings is connected to the surface of the first connection part in the first opening. A region corresponding to a corner of the other wiring of the first and second wirings in a surface opposite to the movable portion in the second insulation layer is curved in a convex shape toward an opposite side to the movable portion.
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公开(公告)号：US20220242721A1
公开(公告)日：2022-08-04
申请号：US17725804
申请日：2022-04-21
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Yuki MORINAGA , Daiki SUZUKI , Yoshihisa WARASHINA
Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.
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公开(公告)号：US20190031500A1
公开(公告)日：2019-01-31
申请号：US16071558
申请日：2016-12-22
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Yuki MORINAGA , Daiki SUZUKI , Yoshihisa WARASHINA
Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis so that the movable portion is swingable about the second axis, a first wiring which is provided on the connection portion, and a second wiring which is provided on the support portion. The rigidity of a first metal material forming the first wiring is higher than that of a second metal material forming the second wiring. The second wiring is connected to a surface opposite to the support portion in a first connection part located on the support portion in the first connection part.
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公开(公告)号：US20160170200A1
公开(公告)日：2016-06-16
申请号：US14908627
申请日：2013-12-12
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Masakuni KIMOTO , Norihide ADACHI
IPC: G02B26/08
CPC classification number: G02B26/085 , B81B3/0021 , B81B2201/042 , B81B2207/07
Abstract: A mirror drive device is provided as one capable of efficiently gaining a driving force. The mirror drive device 1 has a fixed frame 5; a movable portion 7 supported so as to be swingable relative to the fixed frame 5, through torsion bars 10a, 10b extending on an identical straight line, and being of a circular shape; a mirror 9 arranged on a principal surface 7a of the movable portion 7; and a permanent magnet 3 forming a magnetic field around the movable portion 7; the movable portion 7 has a drive coil 12 arranged below the mirror 9; the drive coil 12 is of a 2n-sided polygon shape (where n is an integer of 3 or more) when viewed from a direction orthogonal to the principal surface 7a, at least one side of which is orthogonal to a direction of the magnetic field F.
Abstract translation: 镜驱动装置被提供为能够有效地获得驱动力的镜驱动装置。 镜驱动装置1具有固定框架5; 通过在相同的直线上延伸的扭杆10a，10b相对于固定框架5而被支撑的可动部7，并且是圆形的; 布置在可动部分7的主表面7a上的反射镜9; 以及形成围绕可动部7的磁场的永磁体3; 可动部分7具有布置在反射镜9下方的驱动线圈12; 当从与主表面7a正交的方向观察时，驱动线圈12具有2n边多边形形状（其中n为3以上的整数），其至少一侧与磁场方向正交 F。
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