公开(公告)号：US20160329246A1

公开(公告)日：2016-11-10

申请号：US15213723

申请日：2016-07-19

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Makoto NAKANO ,  Koji KUNO ,  Tetsuya OSAJIMA ,  Takashi INOUE ,  Masayoshi KUMAGAI

IPC分类号： H01L21/78 ,  C03B33/02 ,  B23K26/53 ,  B23K26/064 ,  H01L23/544 ,  B23K26/00

CPC分类号： H01L21/78 ,  B23K26/0006 ,  B23K26/046 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0861 ,  B23K26/128 ,  B23K26/40 ,  B23K26/402 ,  B23K26/53 ,  B23K2103/50 ,  B23K2103/56 ,  B28D1/221 ,  B28D5/00 ,  C03B33/0222 ,  H01L23/544 ,  H01L2223/54453 ,  Y10T29/49826

摘要： An object is irradiated with a laser light modulated by a reflection type spatial light modulator such that aberration of the laser light converged inside the object becomes a predetermined aberration or less. Therefore, aberration of the laser light generated at a position on which a converging point of the laser light is located is made as small as possible, to enhance the energy density of the laser light at that position, which makes it possible to form a modified region with a high function as a starting point for cutting. In addition, because the reflection type spatial light modulator is used, it is possible to improve the utilization efficiency of the laser light as compared with a transmissive type spatial light modulator.

摘要翻译： 用由反射型空间光调制器调制的激光照射物体，使得会聚在物体内的激光的像差成为预定像差或更小。 因此，在激光的会聚点所在的位置处产生的激光的像差尽可能地小，以增强该位置处的激光的能量密度，这使得可以形成经修改的 具有高功能的区域作为切割的起点。 此外，由于使用反射型空间光调制器，与透射型空间光调制器相比，可以提高激光的利用效率。