公开(公告)号：US20200098543A1

公开(公告)日：2020-03-26

申请号：US16310830

申请日：2016-07-22

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Miki ISAWA ,  Ayumi DOI ,  Kazuhisa HASUMI

IPC: H01J37/28 ,  H01J37/22 ,  G01N23/2251 ,  G06T7/00

Abstract: Provided is a pattern evaluation device with which measurement or inspection conditions, supplied for the measurement and inspection of a replica produced by transferring a pattern for a semiconductor wafer or the like, can be easily set, and with which recipes can be easily generated, when measurement and inspection conditions for a semiconductor wafer or the like and recipes in which these conditions are stored have been prepared in advance. The pattern evaluation device in which a pattern formed on a sample is evaluated on the basis of image data or signal waveforms obtained on the basis of beam irradiation or probe scanning of the sample, wherein the device conditions for evaluating a semiconductor wafer are converted to device conditions for evaluating a replica obtained by transferring a semiconductor wafer, and the converted device conditions are used to evaluate the replica.

公开(公告)号：US20150371816A1

公开(公告)日：2015-12-24

申请号：US14763363

申请日：2014-01-17

Applicant: Hitachi High- Technologies Corporation

Inventor： Ayumi DOI ,  Tomohiro FUNAKOSHI ,  Takuma YAMAMOTO ,  Tomohiro TAMORI ,  Tsunehiro SAKAI

IPC: H01J37/26 ,  H01J37/28

CPC classification number: H01J37/263 ,  H01J37/241 ,  H01J37/28 ,  H01J2237/225 ,  H01J2237/281

Abstract: A sample observation device of the invention includes: a charged particle optical column for irradiating a sample with charged particle beams at a first acceleration voltage, the sample having a target part to be observed which is a concave part; an image acquisition part for acquiring an image including the target part to be observed on the basis of signals obtained by irradiation with the charged particle beams; a memory part for memorizing in advance, at each of a plurality of acceleration voltages, information indicating a relationship between a brightness ratio of a concave part to a periphery part of the concave part in a standard sample and a value indicating a structure of the concave part in the standard sample; and an operation part for obtaining a brightness ratio of the concave part to a periphery part of the concave part in the image. The operation part judges appropriateness/inappropriateness of the first acceleration voltage with the use of the information indicating the relationship and the brightness ratio in the image.

Abstract translation: 本发明的样品观察装置包括：带电粒子光学柱，用于以第一加速电压照射带有带电粒子束的样品，所述样品具有作为凹部的观察对象部分; 图像获取部分，用于基于通过照射带电粒子束获得的信号来获取包括要观察的目标部分的图像; 存储器部分，用于在多个加速电压中的每一个处预先存储指示在标准样品中凹部与凹部的周边部分的亮度比与凹部的结构的值之间的关系的信息 标准样品的一部分; 以及用于获得图像中的凹部与凹部的周边部的亮度比的操作部。 操作部通过使用表示图像的关系和亮度比的信息来判断第一加速电压的适当性/不适当性。