专利检索 ap:("HITACHI HIGH-TECHNOLOGIES CORPORATION") AND inv:"Isao Takahira" 第 1 页

1.

发明授权
Charged particle beam device and installation method 有权

公开(公告)号：US10008361B2

公开(公告)日：2018-06-26

申请号：US15318455

申请日：2016-03-04

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Shuhei Yabu , Naoto Koga , Mitsuo Akatsu , Isao Takahira , Shinichi Tomita , Hiroyuki Noda , Ai Masuda

IPC分类号： H01J37/26 , G21K5/00 , H01J37/16 , H01J37/248

CPC分类号： H01J37/16 , H01J37/248 , H01J37/26 , H01J37/28 , H01J2237/2813

摘要： Provided is a charged particle beam device that is small, high performance, and easy to transport. A charged particle beam device (100) is provided with a detachable body unit (15) and an auxiliary unit (14), the body unit (15) housing a functional unit related to charged particle beams, and the auxiliary unit (14) housing a power source unit (9).