公开(公告)号：US10037866B2

公开(公告)日：2018-07-31

申请号：US15217460

申请日：2016-07-22

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Momoyo Enyama ,  Muneyuki Fukuda ,  Hideyuki Kazumi ,  Koichi Hamada ,  Sayaka Tanimoto

IPC: H01J37/26 ,  H01J37/22

CPC classification number: H01J37/265 ,  H01J37/153 ,  H01J37/21 ,  H01J37/222 ,  H01J37/226 ,  H01J2237/049 ,  H01J2237/103 ,  H01J2237/1534 ,  H01J2237/223 ,  H01J2237/24542 ,  H01J2237/24592 ,  H01J2237/2801

Abstract: A charged particle beam apparatus with improved depth of focus and maintained/improved resolution has a charged particle source, an off-axis illumination aperture, a lens, a computer, and a memory unit. The apparatus acquires an image by detecting a signal generated by irradiating a sample with a charged particle beam caused from the charged particle source via the off-axis illumination aperture. The computer has a beam-computing-process unit to estimate a beam profile of the charged particle beam and an image-sharpening-process unit to sharpen the image using the estimated beam profile.

公开(公告)号：US09521372B2

公开(公告)日：2016-12-13

申请号：US13898620

申请日：2013-05-21

Applicant: Hitachi High-Technologies Corporation

Inventor： Yoshinori Momonoi ,  Koichi Hamada ,  Yuji Takagi ,  Michio Hatano ,  Hideyuki Kazumi

IPC: H04N7/18 ,  G06T7/00

CPC classification number: H04N7/18 ,  G06T7/0006 ,  G06T2207/10016 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: There is provided a technique to correctly select and measure a pattern to be measured even when contours of the pattern are close to each other in a sample including a plurality of patterns on a substantially same plane.A pattern measuring apparatus that scans a sample with charged particles, forms a detected image by detecting secondary charged particles or backscattered charged particles generated from the sample, and measures a pattern imaged on the detected image includes: an image acquiring section acquiring a plurality of detected images taken at a substantially same location on the sample under different imaging conditions; a contour extracting section extracting a plurality of pattern contours from the plurality of detected images; a contour reconstructing section reconstructing a contour to be measured by combining the plurality of pattern contours; and a contour measuring section making a measurement using the reconstructed contour to be measured.

Abstract translation: 一种用带电粒子扫描样品的图形测量装置，通过检测从样品产生的二次带电粒子或反向散射带电粒子形成检测图像，并测量在检测图像上成像的图案，包括：图像获取部分，获取多个检测到的 在不同成像条件下在样品上基本相同位置拍摄的图像; 轮廓提取部，从所述多个检测图像中提取多个图案轮廓; 轮廓重建部，通过组合多个图案轮廓来重建要测量的轮廓; 以及轮廓测量部，其使用要测量的重构轮廓进行测量。

公开(公告)号：US20130321610A1

公开(公告)日：2013-12-05

申请号：US13898620

申请日：2013-05-21

Applicant: Hitachi High-Technologies Corporation

Inventor： Yoshinori Momonoi ,  Koichi Hamada ,  Yuji Takagi ,  Michio Hatano ,  Hideyuki Kazumi

IPC: H04N7/18

CPC classification number: H04N7/18 ,  G06T7/0006 ,  G06T2207/10016 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: There is provided a technique to correctly select and measure a pattern to be measured even when contours of the pattern are close to each other in a sample including a plurality of patterns on a substantially same plane.A pattern measuring apparatus that scans a sample with charged particles, forms a detected image by detecting secondary charged particles or backscattered charged particles generated from the sample, and measures a pattern imaged on the detected image includes: an image acquiring section acquiring a plurality of detected images taken at a substantially same location on the sample under different imaging conditions; a contour extracting section extracting a plurality of pattern contours from the plurality of detected images; a contour reconstructing section reconstructing a contour to be measured by combining the plurality of pattern contours; and a contour measuring section making a measurement using the reconstructed contour to be measured.

Abstract translation: 提供了一种技术，即使在图案的轮廓在基本上相同的平面上的包括多个图案的样本中彼此接近的情况下，也能正确地选择和测量待测量的图案。 一种用带电粒子扫描样品的图形测量装置，通过检测从样品产生的二次带电粒子或反向散射带电粒子形成检测图像，并测量在检测图像上成像的图案，包括：图像获取部分，获取多个检测到的 在不同成像条件下在样品上基本相同位置拍摄的图像; 轮廓提取部，从所述多个检测图像中提取多个图案轮廓; 轮廓重建部，通过组合多个图案轮廓来重建要测量的轮廓; 以及轮廓测量部，其使用要测量的重构轮廓进行测量。