公开(公告)号：US20150116712A1

公开(公告)日：2015-04-30

申请号：US14587271

申请日：2014-12-31

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yuko OTANI ,  Takehiro TACHIZAKI ,  Masahiro WATANABE ,  Shunichi MATSUMOTO

IPC: G01N21/95 ,  G01N21/47 ,  G01N21/21

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/47 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/8822 ,  G01N2021/8848 ,  G01N2201/06113 ,  G01N2201/063

Abstract: The disclosed device, which, using an electron microscope or the like, minutely observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, can reliably insert a defect to be observed into the field of an electron microscope or the like, and can be a device of a smaller scale. The electron microscope, which observes defects detected by an optical appearance-inspecting device or by an optical defect-inspecting device, has a configuration wherein an optical microscope that re-detects defects is incorporated, and a spatial filter and a distribution polarization element are inserted at the pupil plane when making dark-field observations using this optical microscope. The electron microscope, which observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, has a configuration wherein an optical microscope that re-detects defects is incorporated, and a distribution filter is inserted at the pupil plane when making dark-field observations using this optical microscope.

Abstract translation: 所公开的使用电子显微镜等精细观察由光学外观检查装置或光学缺陷检查装置检测到的缺陷的装置可以将观察到的缺陷可靠地插入电子显微镜领域或 喜欢，可以是一个规模较小的设备。 观察由光学外观检查装置或光学缺陷检查装置检测到的缺陷的电子显微镜具有结合了重新检测缺陷的光学显微镜，并且插入空间滤光器和分布偏振元件 在使用该光学显微镜进行暗视场观察时在瞳孔平面上。 观察由光学外观检查装置或光学缺陷检查装置检测到的缺陷的电子显微镜具有结合了重新检测缺陷的光学显微镜，并且在制造时将分配滤波器插入瞳孔平面 使用该光学显微镜进行暗场观测。

公开(公告)号：US20140092717A1

公开(公告)日：2014-04-03

申请号：US13967695

申请日：2013-08-15

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Teruaki TOKUTOMI ,  Naoya SAITO ,  Yoshinori KITANO ,  Kaifeng ZHANG ,  Masahiro WATANABE ,  Takenori HIROSE

IPC: G11B20/18

CPC classification number: G11B20/1816 ,  G01Q60/08 ,  G11B5/455 ,  G11B2005/0021

Abstract: An apparatus for inspecting a thermal assist type magnetic head is constituted by a scanning probe microscope means including a cantilever having a probe with a magnetic film formed on the surface of a tip portion thereof; a probe unit which provides an alternating current to a terminal formed on the thermal assist type magnetic head element and causes a pulse drive current or pulse drive voltage; a scattered light detection means which scans the near-field light emitting part with the probe to detect the scattered light generated from the probe in the generation region of the near-field light; an imaging means which image the thermal assist type magnetic head element; and a signal process means inspects the thermal assist type magnetic head element and an output signal outputted from the scanning probe microscope means by scanning with the probe while providing an alternating current to the terminal.

Abstract translation: 一种用于检查热辅助型磁头的装置由扫描探针显微镜装置构成，该扫描探针显微镜装置包括悬臂，该悬臂具有形成在其尖端部分的表面上的具有磁性膜的探针; 探针单元，其向形成在所述热辅助型磁头元件上的端子提供交流电流，并产生脉冲驱动电流或脉冲驱动电压; 散射光检测装置，其用探针扫描近场发光部分，以检测在近场光的发生区域中由探针产生的散射光; 成像装置，其对所述热辅助型磁头元件进行成像; 并且信号处理装置通过用探头扫描同时向终端提供交流电流来检查热辅助型磁头元件和从扫描探针显微镜装置输出的输出信号。