公开(公告)号：US20180246143A1

公开(公告)日：2018-08-30

申请号：US15965175

申请日：2018-04-27

申请人： PRESIDENT AND FELLOWS OF HARVARD COLLEGE

发明人： Michael S. GRINOLDS ,  Sungkun HONG ,  Patrick MALETINSKY ,  Amir YACOBY

IPC分类号： G01Q70/14 ,  G01N21/64 ,  G01R33/60 ,  G01R33/12 ,  G01Q60/54 ,  G01Q60/38

CPC分类号： G01Q70/14 ,  G01N21/645 ,  G01N24/10 ,  G01N2201/10 ,  G01Q30/025 ,  G01Q60/08 ,  G01Q60/38 ,  G01Q60/54 ,  G01R33/022 ,  G01R33/032 ,  G01R33/1284 ,  G01R33/323 ,  G01R33/60

摘要： A sensing probe may be formed of a diamond material comprising one or more spin defects that are configured to emit fluorescent light and are located no more than 50 nm from a sensing surface of the sensing probe. The sensing probe may include an optical outcoupling structure formed by the diamond material and configured to optically guide the fluorescent light toward an output end of the optical outcoupling structure. An optical detector may detect the fluorescent light that is emitted from the spin defects and that exits through the output end of the optical outcoupling structure after being optically guided therethrough. A mounting system may hold the sensing probe and control a distance between the sensing surface of the sensing probe and a surface of a sample while permitting relative motion between the sensing surface and the sample surface.

公开(公告)号：US09304145B2

公开(公告)日：2016-04-05

申请号：US14813306

申请日：2015-07-30

申请人： HITACHI HIGH-TECH FINE SYSTEMS CORPORATION

发明人： Kaifeng Zhang ,  Takenori Hirose ,  Masahiro Watanabe ,  Toshinori Sugiyama ,  Akira Tobita

IPC分类号： G01Q20/02

CPC分类号： G01Q20/02 ,  G01Q60/06 ,  G01Q60/08

摘要： To detect near-field light, which is generated by a thermal assist type magnetic head element, and leaking light with high sensitivity and to more accurately obtain the spatial intensity distribution of a near-field light generation area, an inspection apparatus for a thermal assist type magnetic head element is adapted so that a distance between a cantilever and the surface of a specimen and the excitation amplitude of the cantilever are set to be small to detect near-field light with high sensitivity by the suppression of an influence of other light components, a distance between the cantilever and the surface of the specimen and the excitation amplitude of the cantilever are set to be large to detect other light components present in the vicinity of near-field light with high sensitivity by the suppression of an influence of the amount of detected near-field light when other light components are measured.

摘要翻译： 为了检测由热辅助型磁头元件产生的近场光和具有高灵敏度的泄漏光并且更精确地获得近场光产生区域的空间强度分布，用于热辅助的检查装置 适于使悬臂与样品表面之间的距离和悬臂的激发振幅设定得较小，以便通过抑制其它光成分的影响来检测具有高灵敏度的近场光 将悬臂与试样的表面之间的距离和悬臂的激发振幅设定得较大，以通过抑制量的影响来高灵敏度地检测存在于近场光附近的其他光分量 当测量其他光分量时，检测到的近场光。

公开(公告)号：US20160033548A1

公开(公告)日：2016-02-04

申请号：US14813306

申请日：2015-07-30

申请人： HITACHI HIGH-TECH FINE SYSTEMS CORPORATION

发明人： Kaifeng ZHANG ,  Takenori HIROSE ,  Masahiro WATANABE ,  Toshinori SUGIYAMA ,  Akira TOBITA

IPC分类号： G01Q20/02

CPC分类号： G01Q20/02 ,  G01Q60/06 ,  G01Q60/08

摘要： To detect near-field light, which is generated by a thermal assist type magnetic head element, and leaking light with high sensitivity and to more accurately obtain the spatial intensity distribution of a near-field light generation area, an inspection apparatus for a thermal assist type magnetic head element is adapted so that a distance between a cantilever and the surface of a specimen and the excitation amplitude of the cantilever are set to be small to detect near-field light with high sensitivity by the suppression of an influence of other light components, a distance between the cantilever and the surface of the specimen and the excitation amplitude of the cantilever are set to be large to detect other light components present in the vicinity of near-field light with high sensitivity by the suppression of an influence of the amount of detected near-field light when other light components are measured.

摘要翻译： 为了检测由热辅助型磁头元件产生的近场光和具有高灵敏度的泄漏光并且更精确地获得近场光产生区域的空间强度分布，用于热辅助的检查装置 适于使悬臂与样品表面之间的距离和悬臂的激发振幅设定得较小，以便通过抑制其它光成分的影响来检测具有高灵敏度的近场光 将悬臂与试样的表面之间的距离和悬臂的激发振幅设定得较大，以通过抑制量的影响来高灵敏度地检测存在于近场光附近的其他光分量 当测量其他光分量时，检测到的近场光。

公开(公告)号：US08884608B2

公开(公告)日：2014-11-11

申请号：US14351055

申请日：2012-10-10

申请人： Purdue Research Foundation

发明人： Corey P. Neu ,  Babak Ziaie ,  Teimour Maleki-Jafarabadi ,  Charilaos Mousoulis

IPC分类号： G01R33/12 ,  G01R33/20 ,  G01N24/08 ,  G01Q70/16 ,  G01Q30/02 ,  G01R33/48

CPC分类号： G01R33/4808 ,  G01N24/08 ,  G01Q20/04 ,  G01Q30/02 ,  G01Q60/08 ,  G01Q60/52 ,  G01Q70/16 ,  G01R33/341 ,  G01R33/46

摘要： The present disclosure is discloses the development of a new device, system, and method that combines advantages of magnetic resonance and atomic force microscopy technologies, and the utility of the new device, system, and method for a wide range of biomedical and clinical researchers. According to one aspect of the present disclosure, a device for micro-scale spectroscopy is disclosed. The micro-scale spectroscopy device includes a beam having a distal end, a proximal end, a top surface and a bottom surface, where the beam is attached to an anchor at the proximal end and further includes a tip extending substantially perpendicular from the bottom surface at or near the distal end, and a coil having at least one turn mounted to the top surface of the beam at or near the distal end opposite the tip, where the coil is capable of both transmitting and sensing electromagnetic radiation.

摘要翻译： 本公开公开了一种结合磁共振和原子力显微技术的优点的新器件，系统和方法的开发，以及用于广泛的生物医学和临床研究者的新器件，系统和方法的实用性。 根据本公开的一个方面，公开了一种用于微尺度光谱的装置。 微型光谱装置包括具有远端，近端，顶表面和底表面的光束，其中光束附接到近端处的锚固件，并且还包括从底表面基本垂直延伸的尖端 在远端处或附近，以及具有至少一个匝的线圈，其安装到梁的顶表面处，或者与尖端相对的远端附近，其中线圈能够传输和感测电磁辐射。

公开(公告)号：US20020097046A1

公开(公告)日：2002-07-25

申请号：US09966342

申请日：2001-09-27

申请人： JEOL Ltd.

发明人： Shinichi Kitamura

IPC分类号： G01R033/02

CPC分类号： G01R33/0385 ,  G01Q30/16 ,  G01Q60/08 ,  Y10S977/865

摘要： A magnetic force microscope capable of producing a topographic image containing no magnetic information. In the topographic imaging mode, an error amplifier controls the distance between a cantilever and the sample to cause the oscillation frequency of the cantilever to shift from f0 to f1, for causing a probe to tap each observation position (xi, yj) on the sample. According to the results of the control, topographic information in the observation position (xi, yj) is obtained. In the magnetic force imaging mode, the probe is placed on the observation position (xi, yj), and the distance between the cantilever and the sample is held to the distance used in the topographic imaging mode according to information stored in the memory. At this time, the amplitude of the cantilever is so adjusted that the probe does not tap the sample. Magnetic information about the observation position (xi, yj) on the sample is obtained based on the oscillation frequency of the cantilever at this time.

摘要翻译： 能够产生不含磁信息的地形图像的磁力显微镜。 在地形成像模式中，误差放大器控制悬臂与样品之间的距离，使悬臂的振荡频率从f0移动到f1，使探针分别取样上的每个观察位置（xi，yj） 。 根据控制结果，得到观测位置（xi，yj）的地形信息。 在磁力成像模式中，将探针放置在观察位置（xi，yj）上，并且根据存储在存储器中的信息将悬臂与样本之间的距离保持在地形摄像模式中使用的距离。 此时，悬臂的振幅如此调节，使得探头不会敲击样品。 基于此时的悬臂的振荡频率，获得关于样品的观察位置（xi，yj）的磁信息。

公开(公告)号：US6081115A

公开(公告)日：2000-06-27

申请号：US49995

申请日：1998-03-30

申请人： Koichi Mukasa ,  Kazunobu Hayakawa ,  Kazuhisa Sueoka ,  Kohji Nakamura ,  Yuichi Tazuke ,  Hideo Hasegawa ,  Tamio Oguchi

发明人： Koichi Mukasa ,  Kazunobu Hayakawa ,  Kazuhisa Sueoka ,  Kohji Nakamura ,  Yuichi Tazuke ,  Hideo Hasegawa ,  Tamio Oguchi

IPC分类号： G01R33/12 ,  G01N27/00 ,  G01N37/00 ,  G01Q30/20 ,  G01Q60/00 ,  G01Q60/24 ,  G01Q60/50 ,  G01Q60/54 ,  H01F41/30 ,  G01R33/02 ,  G01N24/00

CPC分类号： G01Q60/08 ,  B82Y35/00 ,  B82Y40/00 ,  G01Q60/32 ,  G01Q60/38 ,  G01Q60/54 ,  H01F41/303 ,  B82Y25/00 ,  Y10S977/852

摘要： In a method of measuring an exchange force between a specimen and a probe, the specimen and probe are faced to each other with a distance within a close proximity or RKKY-type exchange interaction region from a distance at which conduction electron clouds begin to be overlapped with each other to a distance at which localized electron clouds are not substantially overlapped with each other, a relative displacement of the specimen and probe is detected to measure a first force under such a condition that directions of magnetic moments of said specimen surface and probe are in parallel with each other to derive a first force and under such a condition that directions of magnetic moments of said specimen surface and probe are in anti-parallel with each other to derive a second force. An exchange force is derived as a difference between said first and second forces. Magnetic property of the specimen can be evaluated on the basis of the thus measured exchange force.

摘要翻译： 在测量样品和探针之间的交换力的方法中，样品和探针彼此面对彼此，距离传导电子云开始重叠的距离在距离近的距离或RKKY型交换相互作用区 彼此相距一定距离，在该距离处局部电子云彼此基本不重叠，检测样本和探针的相对位移，以便在所述样本表面和探针的磁矩方向为 彼此平行地导出第一力并且在所述样本表面和探针的磁矩的方向彼此反平行以导出第二力的条件下。 交换力被导出为所述第一和第二力之间的差。 可以基于如此测量的交换力来评估样品的磁性。

公开(公告)号：US5652377A

公开(公告)日：1997-07-29

申请号：US544117

申请日：1995-10-17

申请人： Akira Yagi

发明人： Akira Yagi

IPC分类号： G01B21/30 ,  G01B5/28 ,  G01N37/00 ,  G01Q10/06 ,  G01Q30/04 ,  G01Q60/08 ,  G01Q60/32 ,  G01Q90/00 ,  H01J37/28

CPC分类号： G01Q60/54 ,  B82Y35/00 ,  G01Q60/08 ,  G01Q60/32 ,  Y10S977/851 ,  Y10S977/852 ,  Y10S977/865

摘要： A scanning method with a scanning probe microscope, wherein the scan time and the timing of data measurement are optimized on the basis of transient characteristics of vibration of the cantilever, and the ruggedness of the sample surface and the influence of the magnetic force inclination are measured in one scanning process, at every point of measurement, using a magnetic probe, so that the ruggedness of the sample surface and the magnetic force distribution are separately detected.

摘要翻译： 使用扫描探针显微镜的扫描方法，其中基于悬臂的振动的瞬态特性优化扫描时间和数据测量的定时，并且测量样品表面的粗糙度和磁力倾斜的影响 在一个扫描过程中，在每个测量点，使用磁性探针，以便分别检测样品表面的坚固性和磁力分布。

公开(公告)号：US11815528B2

公开(公告)日：2023-11-14

申请号：US17675156

申请日：2022-02-18

申请人： President and Fellows of Harvard College

发明人： Michael S. Grinolds ,  Sungkun Hong ,  Patrick Maletinsky ,  Amir Yacoby

IPC分类号： G01Q70/14 ,  G01N24/10 ,  G01R33/032 ,  G01Q60/54 ,  G01R33/12 ,  G01R33/60 ,  G01R33/022 ,  G01N21/64 ,  G01Q60/38 ,  G01Q30/02 ,  G01Q60/08 ,  G01R33/32

CPC分类号： G01Q70/14 ,  G01N21/645 ,  G01N24/10 ,  G01Q60/38 ,  G01Q60/54 ,  G01R33/022 ,  G01R33/032 ,  G01R33/1284 ,  G01R33/60 ,  G01N2201/10 ,  G01Q30/025 ,  G01Q60/08 ,  G01R33/323

摘要： A sensing probe may be formed of a diamond material comprising one or more spin defects that are configured to emit fluorescent light and are located no more than 50 nm from a sensing surface of the sensing probe. The sensing probe may include an optical outcoupling structure formed by the diamond material and configured to optically guide the fluorescent light toward an output end of the optical outcoupling structure. An optical detector may detect the fluorescent light that is emitted from the spin defects and that exits through the output end of the optical outcoupling structure after being optically guided therethrough. A mounting system may hold the sensing probe and control a distance between the sensing surface of the sensing probe and a surface of a sample while permitting relative motion between the sensing surface and the sample surface.

公开(公告)号：US11762046B2

公开(公告)日：2023-09-19

申请号：US17001486

申请日：2020-08-24

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

发明人： Baohua Niu ,  Ji-Feng Ying

IPC分类号： G01R33/26 ,  G01R33/12 ,  G01Q60/08 ,  G01Q60/52 ,  G01Q70/14 ,  G01Q30/02 ,  G01R33/32 ,  G01R33/032 ,  G01Q60/38

CPC分类号： G01R33/26 ,  G01Q30/025 ,  G01Q60/08 ,  G01Q60/52 ,  G01Q70/14 ,  G01R33/032 ,  G01R33/12 ,  G01R33/323 ,  G01Q60/38

摘要： An apparatus for measuring a magnetic field strength is provided. The apparatus includes a stage on which a sample to be measured is placed, a cantilever having a tip, an optical system having a light source and a light receiver, and a microwave power source. The tip is a diamond tip having a nitrogen vacancy defect. The optical system is configured such that excitation light from the light source is focused at the diamond tip. The cantilever is configured as a coaxial microwave antenna through which microwaves from the microwave power source are supplied to the diamond tip.

公开(公告)号：US07841016B2

公开(公告)日：2010-11-23

申请号：US11915611

申请日：2006-05-23

申请人： Daniel Paget ,  Jacques Peretti ,  Alistair Rowe ,  Georges Lampel ,  Bruno Gerard ,  Shailendra Bansropun

发明人： Daniel Paget ,  Jacques Peretti ,  Alistair Rowe ,  Georges Lampel ,  Bruno Gerard ,  Shailendra Bansropun

IPC分类号： G01Q60/54

CPC分类号： G01Q60/04 ,  G01Q60/08 ,  G01Q70/14 ,  G01Q80/00

摘要： The invention is directed to a spin-polarized electron injector using a semiconductor tip, in which tip the injected electrons are photocreated by a circularly polarized light excitation incident on the rear of the tip. This tip is supported by a transparent lever or cantilever and undergoes a surface treatment for the purpose of removing the surface oxide layer, to prevent said layer from reforming and to improve the proportion of injected electrons.

摘要翻译： 本发明涉及一种使用半导体尖端的自旋极化电子注入器，其中尖端注入的电子被入射在尖端后部的圆偏振光激发光照。 该尖端由透明的杠杆或悬臂支撑，并进行表面处理以去除表面氧化物层，以防止所述层重整并提高注入电子的比例。