公开(公告)号：US20190027350A1

公开(公告)日：2019-01-24

申请号：US16069066

申请日：2016-01-21

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shinichi MURAKAMI ,  Yasushi TERUI

IPC: H01J49/02 ,  H01J49/00 ,  H01J49/42

CPC classification number: H01J49/025 ,  H01J49/0009 ,  H01J49/0036 ,  H01J49/4215

Abstract: An object of the invention is to provide a mass spectrometry device and an ion detection method therefor in which an ion amount can be detected with high accuracy.In order to achieve the object described above, a mass spectrometry device is provided which performs a channel scan measurement by changing a voltage to be applied to a mass separation unit to selectively extract a desired ion. The mass spectrometry device includes: an ion detection unit which detects an ion separated by the mass separation unit and outputs an electric signal; an ion amount measuring unit which measures an ion amount from the output of the ion detection unit; and an ion amount correction unit which corrects a detection amount of ion from an output of the ion amount measuring unit. In a process of a channel scan, the ion amount correction unit performs correction of a detection amount of ion detected in a present channel based on a detection amount of ion in a previous channel.

公开(公告)号：US20190318906A1

公开(公告)日：2019-10-17

申请号：US16251563

申请日：2019-01-18

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Wen LI ,  Shinichi MURAKAMI ,  Hiroyuki TAKAHASHI ,  Yuko SASAKI ,  Minoru YAMAZAKI ,  Hajime KAWANO

IPC: H01J37/147 ,  H01J37/04 ,  H01L21/66 ,  G01N23/2251

Abstract: A low noise blanking unit corresponds to a wide range of acceleration voltages (from several times higher than related voltages to low acceleration voltages) of an electron beam. A blanking unit of the measurement and inspection device includes a blanking control circuit, in which (i) an upper and a lower blanking electrodes are arranged in the irradiation direction of an electron beam; electrodes on the reverse sides of two opposing electrodes in each of the blanking electrodes arranged in the same direction are connected with the ground, (ii) when blanking is ON, positive voltages are output to remaining electrodes of the upper blanking electrode and negative voltages are output to remaining electrodes of the lower blanking electrode, and (iii) when the blanking is OFF, the same ground reference signal is output to the remaining electrodes of the upper blanking electrode and to the remaining electrodes of the lower blanking electrode.