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公开(公告)号：US11143318B2
公开(公告)日：2021-10-12
申请号：US16981738
申请日：2019-02-27
申请人： Hitachi Metals, Ltd.
发明人： Takao Goto
IPC分类号： F16K7/16 , G05D7/06 , F16K31/00 , F16K31/126
摘要： In a diaphragm valve comprising a tubular valve seat, a primary side passage located outside the valve seat, a secondary side passage located inside the valve seat, and pressing member which presses the diaphragm to a seating surface to change a valve opening, a supporting member which contacts with the diaphragm in a valve opening range that is at least one part of an entire opening range from a fully opened state to a fully closed state to obstruct deformation of the diaphragm to the secondary side passage side is disposed in a region between the seating surface and a center of the seating surface. Thereby, even when a pressure difference between both sides of the diaphragm is large, a reduction of a gap at the seating surface can be prevented, and gas can be flowed at a large flow rate.
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公开(公告)号：US20210116039A1
公开(公告)日：2021-04-22
申请号：US16981738
申请日：2019-02-27
申请人： Hitachi Metals, Ltd.
发明人： Takao Goto
摘要： In a diaphragm valve comprising a tubular valve seat, a primary side passage located outside the valve seat, a secondary side passage located inside the valve seat, and pressing member which presses the diaphragm to a seating surface to change a valve opening, a supporting member which contacts with the diaphragm in a valve opening range that is at least one part of an entire opening range from a fully opened state to a fully closed state to obstruct deformation of the diaphragm to the secondary side passage side is disposed in a region between the seating surface and a center of the seating surface. Thereby, even when a pressure difference between both sides of the diaphragm is large, a reduction of a gap at the seating surface can be prevented, and gas can be flowed at a large flow rate.
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公开(公告)号：US10459458B2
公开(公告)日：2019-10-29
申请号：US15760136
申请日：2016-09-21
申请人： HITACHI METALS, LTD.
发明人： Takao Goto
摘要： A recording means records a value of pressure of fluid on a downstream side of a differential pressure generation means during a time period after a flow control valve open and control of a flow rate is started or after the flow control valve is closed and the control of a flow rate is stopped until a measured flow rate becomes stable, and a diagnostic means contrasts a controlled value acquired based in a value of the pressure of the fluid on the downstream side recorded by the recording means, with a controlled value when abnormality has not occurred, and diagnoses that abnormality has occurred in the flow meter when a difference between the both controlled values exceeds a threshold. Thereby, a mass flow controller and a diagnostic method which can simply diagnose generation of abnormality in a differential pressure type flow meter without requiring time only for performing the diagnosis.
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公开(公告)号：US20180253111A1
公开(公告)日：2018-09-06
申请号：US15760136
申请日：2016-09-21
申请人： HITACHI METALS, LTD.
发明人： Takao Goto
CPC分类号： G05D7/0623 , G01F25/0007 , G05D7/0635
摘要： A recording means records a value of pressure of fluid on a downstream side of a differential pressure generation means during a time period after a flow control valve open and control of a flow rate is started or after the flow control valve is closed and the control of a flow rate is stopped until a measured flow rate becomes stable, and a diagnostic means contrasts a controlled value acquired based in a value of the pressure of the fluid on the downstream side recorded by the recording means, with a controlled value when abnormality has not occurred, and diagnoses that abnormality has occurred in the flow meter when a difference between the both controlled values exceeds a threshold. Thereby, a mass flow controller and a diagnostic method which can simply diagnose generation of abnormality in a differential pressure type flow meter without requiring time only for performing the diagnosis.
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公开(公告)号：US08857461B2
公开(公告)日：2014-10-14
申请号：US13765673
申请日：2013-02-12
申请人： Hitachi Metals, Ltd.
发明人： Takao Goto , Makoto Tanaka
CPC分类号： F17D3/01 , G01F1/6847 , G01F1/6965 , G01F5/00 , G01F25/0053 , G05D7/0635 , Y10T137/0324 , Y10T137/0357 , Y10T137/0363 , Y10T137/7722 , Y10T137/7761 , Y10T137/85986
摘要： A process and device enabling accurate mass flow control is described. A mass flow controller can be re-specified corresponding to multiple types of actual process gases and multiple flow rate ranges, even after the mass flow controller has been shipped. Calibration gas data is derived using actual flow rate versus a flow rate setting signal to generate calibration gas data. Actual gas data is derived by measuring actual flow rate versus a flow rate setting signal for each actual gas and saving. Subsequently, prior to operating the mass flow rate control device, the characteristic data for an actual and the calibration gas characteristic data is recalled. The calibration gas characteristic data is then converted to controlled flow rate correction data based on the actual gas characteristic data that is saved to the control unit and the actual gas flow rate is corrected based on this controlled flow rate correction data.
摘要翻译： 描述了能够进行精确质量流量控制的过程和装置。 质量流量控制器可以对应于多种类型的实际工艺气体和多个流量范围，即使在质量流量控制器已经运输之后也可重新指定。 使用实际流量与流量设置信号得出校准气体数据，以产生校准气体数据。 实际气体数据是通过测量实际流量相对于每个实际气体的流量设置信号和节省而得出的。 随后，在操作质量流量控制装置之前，召回实际和校准气体特性数据的特征数据。 基于保存到控制单元的实际气体特性数据，基于该受控流量校正数据校正实际气体流量，校准气体特性数据被转换为受控流量校正数据。
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