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公开(公告)号：US11291966B2
公开(公告)日：2022-04-05
申请号：US16217423
申请日：2018-12-12
发明人： Masanori Terasaka , Hidenori Oba
摘要： A mixer is adapted to include: a flow path forming member formed with an internal flow path; and an insertion member inserted into the internal flow path, in which: the inner circumferential surface forming the internal flow path in the flow path forming member or the outer circumferential surface of the insertion member is formed with a first groove and a second groove merging with the first groove and branching from the first groove, and the inner circumferential surface and the outer circumferential surface are fitted to each other; and the first groove and the second groove are formed as a mixing flow path for, between the flow path forming member and the insertion member, branching and merging fluid flowing from one side of the internal flow path and guiding the fluid to the other side of the internal flow path.
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公开(公告)号：US11448535B2
公开(公告)日：2022-09-20
申请号：US16800670
申请日：2020-02-25
摘要： In order to accurately calculate an estimated flow rate by a dynamic constant volume method, a flow rate calculation system including a tank into which fluid flows, an inflow line through which the fluid flows into the tank, and a pressure sensor that detects the pressure inside the tank is adapted to include: a pressure change data storage part that stores pressure change data indicating a temporal change in the pressure detected by the pressure sensor during an inflow period; a flow rate calculation part that calculates the estimated flow rate during the inflow period based on a pressure change rate; and a flow rate correction part that, on the basis of first pressure detected by the pressure sensor after a predetermined time has elapsed after the inflow period and second pressure included in the pressure change data and higher than the first pressure, corrects the estimated flow rate.
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公开(公告)号：US20200278226A1
公开(公告)日：2020-09-03
申请号：US16800670
申请日：2020-02-25
摘要： In order to accurately calculate an estimated flow rate by a dynamic constant volume method, a flow rate calculation system including a tank into which fluid flows, an inflow line through which the fluid flows into the tank, and a pressure sensor that detects the pressure inside the tank is adapted to include: a pressure change data storage part that stores pressure change data indicating a temporal change in the pressure detected by the pressure sensor during an inflow period; a flow rate calculation part that calculates the estimated flow rate during the inflow period based on a pressure change rate; and a flow rate correction part that, on the basis of first pressure detected by the pressure sensor after a predetermined time has elapsed after the inflow period and second pressure included in the pressure change data and higher than the first pressure, corrects the estimated flow rate.
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公开(公告)号：US20190184350A1
公开(公告)日：2019-06-20
申请号：US16217423
申请日：2018-12-12
发明人： Masanori Terasaka , Hidenori Oba
IPC分类号： B01F5/06
CPC分类号： B01F5/0609 , B01F2005/0005 , B01F2005/0037 , B01F2005/0091
摘要： A mixer is adapted to include: a flow path forming member formed with an internal flow path; and an insertion member inserted into the internal flow path, in which: the inner circumferential surface forming the internal flow path in the flow path forming member or the outer circumferential surface of the insertion member is formed with a first groove and a second groove merging with the first groove and branching from the first groove, and the inner circumferential surface and the outer circumferential surface are fitted to each other; and the first groove and the second groove are formed as a mixing flow path for, between the flow path forming member and the insertion member, branching and merging fluid flowing from one side of the internal flow path and guiding the fluid to the other side of the internal flow path.
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公开(公告)号：US10240233B2
公开(公告)日：2019-03-26
申请号：US14290864
申请日：2014-05-29
发明人： Masanori Terasaka
IPC分类号： C23C16/448 , B01D1/00 , F27D19/00
摘要： A heating vaporization system provided with: a container that heats and vaporizes a source to produce source gas; a pipe for leading out the source gas; a sensor flow path that is provided in the pipe; a flow rate detecting part that is provided with a thermal type flow rate sensor provided in the sensor flow path, and measures a flow rate of the source gas flowing through the pipe; a flow rate regulating part that regulates the flow rate of the source gas flowing through the pipe located upstream of the flow rate detecting part; and a control part that uses a result of the detection by the flow rate detecting part to control the flow rate regulating part.
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公开(公告)号：US20140356796A1
公开(公告)日：2014-12-04
申请号：US14290864
申请日：2014-05-29
发明人： Masanori Terasaka
IPC分类号： F27D19/00
CPC分类号： C23C16/4485 , B01D1/0082 , F17C2270/0518 , F27D2019/0028
摘要： A heating vaporization system provided with: a container that heats and vaporizes a source to produce source gas; a pipe for leading out the source gas; a sensor flow path that is provided in the pipe; a flow rate detecting part that is provided with a thermal type flow rate sensor provided in the sensor flow path, and measures a flow rate of the source gas flowing through the pipe; a flow rate regulating part that regulates the flow rate of the source gas flowing through the pipe located upstream of the flow rate detecting part; and a control part that uses a result of the detection by the flow rate detecting part to control the flow rate regulating part.
摘要翻译： 一种加热蒸发系统，其具有：加热和蒸发源以产生源气体的容器; 用于引导源气体的管道; 设置在管道中的传感器流路; 流量检测部，其设置有设置在所述传感器流路中的热式流量传感器，并且测量流过所述管的源气体的流量; 流量调节部，其调节流过位于所述流量检测部的上游的管的所述源气体的流量; 以及控制部，其使用流量检测部的检测结果来控制流量调节部。
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