FLOW RATE CONTROL APPARATUS AND PROGRAM RECORDING MEDIUM HAVING RECORDED THEREIN PROGRAM FOR FLOW RATE CONTROL APPARATUS

    公开(公告)号:US20180173249A1

    公开(公告)日:2018-06-21

    申请号:US15832282

    申请日:2017-12-05

    IPC分类号: G05D7/06 F16K37/00

    CPC分类号: G05D7/0635 F16K37/005

    摘要: A flow rate control apparatus is provided which enables high speed response particularly in a transient response state, such as when a target flow rate falls. The flow rate control apparatus includes: a valve provided with a position sensor to measure an opening degree and disposed in a flow channel; a flow rate sensor disposed upstream of the valve and provided with a restrictor; a first pressure sensor disposed downstream of the restrictor and disposed upstream of the valve; a second pressure sensor disposed downstream of the valve; a storage section to store a characteristic map indicating a relationship between at least the opening degree of the valve, a differential pressure before and after the valve, and a flow rate of a fluid passing through the flow channel; and a valve control section to control the valve so that the flow rate reaches an accepted target flow rate.

    FLUID CONTROL VALVE AND MASS FLOW CONTROLLER
    3.
    发明申请
    FLUID CONTROL VALVE AND MASS FLOW CONTROLLER 有权
    流体控制阀和流量控制器

    公开(公告)号:US20140190578A1

    公开(公告)日:2014-07-10

    申请号:US14141371

    申请日:2013-12-26

    发明人: Shigeyuki Hayashi

    IPC分类号: F16K1/42 G05D7/06

    摘要: In order to, in a short period of time, reduce to zero a measured flow rate value measured after fully closing a fluid control valve, the fluid control valve having a configuration suitable to decrease the inside volume of the fluid control valve is configured together with a valve element member, and a valve seat block provided with: an in-valve flow path that is formed inside of the valve seat block; and a valve seat surface that is brought into contact with or separated from a seating surface of the valve element member is provided with a cutout that is formed in a part of a protruded rim so as to be communicatively connected to a downstream side flow path.

    摘要翻译: 为了在短时间内将完全关闭流体控制阀之后测量的流量值降低到零,具有适于减小流体控制阀的内部体积的结构的流体控制阀与 阀芯构件和阀座块,其设置有形成在阀座块内部的阀内流路; 并且与阀元件的座面接触或分离的阀座面设置有形成在凸缘的一部分中以与下游侧流路连通的切口。

    FLUID CONTROL VALVE
    6.
    发明申请
    FLUID CONTROL VALVE 审中-公开
    流体控制阀

    公开(公告)号:US20160124439A1

    公开(公告)日:2016-05-05

    申请号:US14894932

    申请日:2014-10-15

    IPC分类号: G05D7/06 F16K27/02

    摘要: To provide a fluid control valve that enables the internal volume to be reduced and, for example, the falling response performance to be improved without compromising the accuracy in controlling a pressure, a flow rate, and so on of fluid, a fluid control valve includes a valve seat portion, a valve body capable of making or breaking contact with the valve seat portion, a fluid resistance, and a pair of clamping members that clamps the fluid resistance. The fluid resistance and the pair of clamping members form an in-valve space in which the valve body or at least part of an actuation member that moves the valve body is housed. Fluid passes through the fluid resistance from the downstream-side in-valve space and flows out to the outside.

    摘要翻译: 为了提供能够降低内部体积并且例如降低响应性能而不损害控制流体的压力,流量等的精度的流体控制阀,流体控制阀包括 阀座部分,能够制造或断开与阀座部分接触的阀体,流体阻力以及夹持流体阻力的一对夹紧件。 流体阻力和一对夹持构件形成阀门空间,其中容纳阀体或移动阀体的致动构件的至少一部分。 流体从下游侧的阀内空间流过流体阻力并流出到外部。

    SEALING MEMBER AND METHOD OF MANUFACTURING THE SAME
    7.
    发明申请
    SEALING MEMBER AND METHOD OF MANUFACTURING THE SAME 有权
    密封构件及其制造方法

    公开(公告)号:US20140167366A1

    公开(公告)日:2014-06-19

    申请号:US14133268

    申请日:2013-12-18

    IPC分类号: F16J15/02 C23F1/02

    摘要: The present invention is mainly intended to provide a sealing member which can be easily manufactured and which is capable of sealing with high accuracy and a method of manufacturing the sealing member, wherein the sealing member is a metallic sealing member that is arranged so as to be interposed between a first surface and a second surface which are facing each other. The sealing member is provided with a first protrusion protruded toward the first surface and a pair of second protrusions protruded toward the second surface, wherein the first protrusion is arranged between the paired second protrusions and distal end portions of the first protrusion and second protrusions are mutually parallel flat surfaces.

    摘要翻译: 本发明主要是为了提供一种可以容易地制造并且能够高精度地密封的密封构件和密封构件的制造方法,其中密封构件是金属密封构件,其被布置为 插入在彼此面对的第一表面和第二表面之间。 密封构件设置有朝向第一表面突出的第一突起和朝向第二表面突出的一对第二突起,其中第一突起布置在第一突起的一对第二突起和远端部之间,第二突起相互 平行平面。

    Fluid control valve
    8.
    发明授权

    公开(公告)号:US09746102B2

    公开(公告)日:2017-08-29

    申请号:US14226167

    申请日:2014-03-26

    IPC分类号: F16K41/10 F16K31/00

    摘要: In order to make it possible to increase a diameter and output thereof, a diaphragm structure is provided that has low repulsiveness, can be largely deformed to increase a stroke even without being applied with a large force from an actuator, and is unlikely to give rise to a defect or fault even when formed thin, and a fluid control valve is provided with the diaphragm structure and the actuator that presses the diaphragm structure, wherein the diaphragm structure is provided with: a protruding part that is formed in a tubular shape and pressed by the actuator; a brim part that spreads from a base end of the protruding part outward with respect to the protruding part; and a support part that is formed on an outer circumference of the brim part and attached to another member, and the brim part is formed in a film shape.

    Fluid control valve and mass flow controller
    9.
    发明授权
    Fluid control valve and mass flow controller 有权
    流体控制阀和质量流量控制器

    公开(公告)号:US09328826B2

    公开(公告)日:2016-05-03

    申请号:US14141371

    申请日:2013-12-26

    发明人: Shigeyuki Hayashi

    摘要: In order to, in a short period of time, reduce to zero a measured flow rate value measured after fully closing a fluid control valve, the fluid control valve having a configuration suitable to decrease the inside volume of the fluid control valve is configured together with a valve element member, and a valve seat block provided with: an in-valve flow path that is formed inside of the valve seat block; and a valve seat surface that is brought into contact with or separated from a seating surface of the valve element member is provided with a cutout that is formed in a part of a protruded rim so as to be communicatively connected to a downstream side flow path.

    摘要翻译: 为了在短时间内将完全关闭流体控制阀之后测量的流量值降低到零,具有适于减小流体控制阀的内部体积的结构的流体控制阀与 阀芯构件和阀座块,其设置有形成在阀座块内部的阀内流路; 并且与阀元件的座面接触或分离的阀座面设置有形成在凸缘的一部分中以与下游侧流路连通的切口。

    FLUID CONTROL VALVE
    10.
    发明申请
    FLUID CONTROL VALVE 有权
    流体控制阀

    公开(公告)号:US20140290778A1

    公开(公告)日:2014-10-02

    申请号:US14226167

    申请日:2014-03-26

    IPC分类号: F16K15/14

    摘要: In order to make it possible to increase a diameter and output thereof, a diaphragm structure is provided that has low repulsiveness, can be largely deformed to increase a stroke even without being applied with a large force from an actuator, and is unlikely to give rise to a defect or fault even when formed thin, and a fluid control valve is provided with the diaphragm structure and the actuator that presses the diaphragm structure, wherein the diaphragm structure is provided with: a protruding part that is formed in a tubular shape and pressed by the actuator; a brim part that spreads from a base end of the protruding part outward with respect to the protruding part; and a support part that is formed on an outer circumference of the brim part and attached to another member, and the brim part is formed in a film shape.

    摘要翻译: 为了增加其直径和输出量,可以提供具有低排斥性的隔膜结构,即使不受到来自致动器的大的力的影响,也能够大幅度地变形以增加行程,并且不太可能产生 即使形成薄而具有缺陷或故障,并且流体控制阀设置有膜结构和按压膜结构的致动器,其中隔膜结构设置有:形成为管状并被按压的突出部 由致动器 从所述突出部的基端部相对于所述突出部向外侧扩展的边缘部; 以及支撑部,其形成在边缘部的外周并且附接到另一构件,并且边缘部形成为膜状。