公开(公告)号：US20030068519A1

公开(公告)日：2003-04-10

申请号：US10218052

申请日：2002-08-12

Applicant: HRL LABORATORIES, LLC

Inventor： Peter D. Brewer ,  Andrew T. Hunter ,  Luisa M. Deckard

IPC: H01L029/12

CPC classification number: H01L24/95 ,  B82Y10/00 ,  B82Y30/00 ,  H01L23/13 ,  H01L24/26 ,  H01L24/83 ,  H01L25/0655 ,  H01L25/50 ,  H01L29/0657 ,  H01L2224/8319 ,  H01L2224/8385 ,  H01L2224/95085 ,  H01L2224/95145 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01024 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01061 ,  H01L2924/01072 ,  H01L2924/01075 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/07802 ,  H01L2924/09701 ,  H01L2924/10158 ,  H01L2924/10329 ,  H01L2924/14 ,  H01L2924/1423 ,  H01L2924/15153 ,  H01L2924/15157 ,  H01L2924/15165 ,  H01L2924/15787 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  Y10T428/12528 ,  H01L2924/00

Abstract: A method for assembly including the steps of: (a) providing a plurality of microstructure components with each of the components having a bottom with the same three dimensional shape; (b) forming a mold with at least one protuberance from a surface thereof so that the at least one protuberance has the same shape; (c) molding a moldable substrate with the mold to form a molded substrate having a surface with at least one recess having the same shape; and (d) positioning a first of the plurality of microstructure components into said at least one recess. Each of the microstructure components may be formed by a masking and etching process, with the mold being formed by the same masking and etching process. The positioning step may consist of mixing the microstructure components with a fluid to form a slurry; and depositing the slurry on the surface of the molded substrate to cause the first of the plurality of microstructure components to self-align in the recess.

Abstract translation: 一种用于组装的方法，包括以下步骤：（a）提供多个微结构部件，每个部件具有具有相同三维形状的底部; （b）从其表面形成具有至少一个突起的模具，使得所述至少一个突起具有相同的形状; （c）用所述模具模制可模制基材以形成具有表面的模制基材，所述表面具有至少一个具有相同形状的凹部; 和（d）将所述多个微结构组件中的第一组件定位到所述至少一个凹部中。 每个微结构组件可以通过掩模和蚀刻工艺形成，其中模具通过相同的掩模和蚀刻工艺形成。 定位步骤可以包括将微结构组件与流体混合以形成浆料; 以及将所述浆料沉积在所述模制基底的表面上，以使所述多个微结构组件中的所述第一微结构组件在所述凹部中自对准。