公开(公告)号：US08828250B2

公开(公告)日：2014-09-09

申请号：US13725291

申请日：2012-12-21

Applicant: Hamamatsu Photonics K.K.

Inventor： Yoshihisa Warashina ,  Masayuki Ishida

IPC: B29D11/00

CPC classification number: H01L33/60 ,  G02B6/4214 ,  G02B6/423 ,  H01L25/075 ,  H01L31/02325 ,  H01L33/58 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method of manufacturing an optical element module in which an optical element and a semiconductor circuit element are mounted on one surface of a silicon substrate, a mirror surface inclined at approximately 45 degrees is formed on the other surface, and an optical fiber facing the mirror surface is disposed in a V groove formed along the other surface, the method of manufacturing includes the steps of forming the mirror surface and V-shaped side surfaces of the V groove simultaneously by first crystal anisotropic etching on the other surface, and forming an attaching surface substantially perpendicular to the one surface and the other surface, which is formed at an end side of the V groove, and for attaching an end of the optical fiber, by second crystal anisotropic etching in a crystal plane orientation different from that of the first crystal anisotropic etching.

Abstract translation: 一种光学元件模块的制造方法，其中将光学元件和半导体电路元件安装在硅衬底的一个表面上，在另一个表面上形成大约45度倾斜的镜面，并且与该镜面对置的光纤 表面设置在沿着另一个表面形成的V形槽中，该制造方法包括以下步骤：通过在另一个表面上的第一晶体各向异性蚀刻同时形成V形槽的V形侧表面和V形侧表面，并且形成附着 基本上垂直于形成在V槽的端侧的一个表面和另一个表面的表面，并且用于通过第二晶体各向异性蚀刻在不同于第一 晶体各向异性蚀刻。

公开(公告)号：US20130178005A1

公开(公告)日：2013-07-11

申请号：US13725291

申请日：2012-12-21

Applicant: Hamamatsu Photonics K.K.

Inventor： Yoshihisa Warashina ,  Masayuki Ishida

IPC: H01L33/60 ,  H01L31/0232

CPC classification number: H01L33/60 ,  G02B6/4214 ,  G02B6/423 ,  H01L25/075 ,  H01L31/02325 ,  H01L33/58 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method of manufacturing an optical element module in which an optical element and a semiconductor circuit element are mounted on one surface of a silicon substrate, a mirror surface inclined at approximately 45 degrees is formed on the other surface, and an optical fiber facing the mirror surface is disposed in a V groove formed along the other surface, the method of manufacturing includes the steps of forming the mirror surface and V-shaped side surfaces of the V groove simultaneously by first crystal anisotropic etching on the other surface, and forming an attaching surface substantially perpendicular to the one surface and the other surface, which is formed at an end side of the V groove, and for attaching an end of the optical fiber, by second crystal anisotropic etching in a crystal plane orientation different from that of the first crystal anisotropic etching.

Abstract translation: 一种光学元件模块的制造方法，其中将光学元件和半导体电路元件安装在硅衬底的一个表面上，在另一个表面上形成大约45度倾斜的镜面，并且与该镜面对置的光纤 表面设置在沿着另一个表面形成的V形槽中，该制造方法包括以下步骤：通过在另一个表面上的第一晶体各向异性蚀刻同时形成V形槽的V形侧表面和V形侧表面，并且形成附着 基本上垂直于形成在V槽的端侧的一个表面和另一个表面的表面，并且用于通过第二晶体各向异性蚀刻在不同于第一 晶体各向异性蚀刻。