公开(公告)号：US20130065777A1

公开(公告)日：2013-03-14

申请号：US13513721

申请日：2010-12-03

申请人： Hatice Altug ,  Ahmet Ali Yanik ,  Min Huang ,  Alp Artar ,  John H. Connor

发明人： Hatice Altug ,  Ahmet Ali Yanik ,  Min Huang ,  Alp Artar ,  John H. Connor

IPC分类号： C40B40/10 ,  C40B40/04 ,  C40B30/04 ,  C40B40/00 ,  C40B40/06 ,  B82Y15/00

CPC分类号： G01N21/554 ,  G01N33/54346 ,  G01N33/54373 ,  G01N33/553 ,  G01N35/08 ,  G01N2035/00158

摘要： A sensor scheme combining nano-photonics and nano-fluidics on a single platform through the use of free-standing photonic crystals is described. By harnessing nano-scale openings, both fluidics and light can be manipulated at sub-wavelength scales. The convective flow is actively steered through the nanohole openings for effective delivery of the analytes to the sensor surface, and refractive index changes are detected in aqueous solutions. Systems and methods using cross-polarization measurements to further improve the detection limit by increasing the signal-to-noise ratio are also described.

摘要翻译： 描述了通过使用独立的光子晶体在单个平台上组合纳米光子学和纳米流体的传感器方案。 通过利用纳米级开口，可以在亚波长尺度下操纵流体和光。 通过纳米孔开口有效地引导对流，有效地将分析物传递到传感器表面，并在水溶液中检测折射率变化。 还描述了使用交叉偏振测量以通过增加信噪比来进一步提高检测极限的系统和方法。

公开(公告)号：US10571606B2

公开(公告)日：2020-02-25

申请号：US13509545

申请日：2010-10-22

申请人： Hatice Altug ,  Ahmet Ali Yanik ,  Shyamsunder Erramilli ,  Ronen Adato ,  Serap Aksu ,  Min Huang ,  Alp Artar

发明人： Hatice Altug ,  Ahmet Ali Yanik ,  Shyamsunder Erramilli ,  Ronen Adato ,  Serap Aksu ,  Min Huang ,  Alp Artar

IPC分类号： G02B5/00 ,  G01N21/65 ,  G01N21/552 ,  B82Y20/00 ,  B82Y30/00 ,  B82Y15/00

摘要： The present invention generally relates to nanoantenna arrays and fabrication methods of said nanoantenna arrays. In particular, one aspect relates to nanoantenna arrays including nanostructures of predefined shapes in predefined patterns, which results in collective excitement of surface plasmons. The nanoantenna arrays can be used for spectroscopy and nanospectroscopy. Another aspects of the present invention relate to a method of high-throughput fabrication of nanoantenna arrays includes fabricating a reusable nanostencil for nanostensil lithography (NSL) which provides a mask to deposit materials onto virtually any support, such as flexible and thin-film stretchable supports. The nanostencil lithography methods enable high quality, high-throughput fabrication of nanostructures on conducting, non-conducting and magnetic supports. The nanostencil can be prepared by etching nanoapertures of predefined patterns into a waffer or ceramic membrane. In some embodiments, a nanoantenna array includes plasmonic nanostructures or non-plasmonic nanostructures.

公开(公告)号：US20130148194A1

公开(公告)日：2013-06-13

申请号：US13509545

申请日：2010-10-22

申请人： Hatice Altug ,  Ahmet Ali Yanik ,  Shyamsunder Erramilli ,  Ronen Adato ,  Serap Aksu ,  Min Huang ,  Alp Artar

发明人： Hatice Altug ,  Ahmet Ali Yanik ,  Shyamsunder Erramilli ,  Ronen Adato ,  Serap Aksu ,  Min Huang ,  Alp Artar

IPC分类号： G02B5/00

CPC分类号： G02B5/008 ,  B82Y15/00 ,  B82Y20/00 ,  B82Y30/00 ,  G01N21/554 ,  G01N21/658 ,  Y10S977/932

摘要： The present invention generally relates to nanoantenna arrays and methods of their fabrication. In particular, one aspect relates to nanoantenna arrays comprising nanostructures of predefined shapes in predefined patterns, which results in collective excitement of surface plasmons. In some embodiments the nanoantenna arrays can be used for spectroscopy and nanospectroscopy. Another aspects of the present invention relate to a method of high-throughput fabrication of nanoantenna arrays includes fabricating a reusable nanostencil for nanostensil lithography (NSL) which provides a mask to deposit materials onto virtually any support, such as flexible and thin-film stretchable supports. The nanostencil lithography methods enable high quality, high-throughput fabrication of nanostructures on conducting, non-conducting and magnetic supports. The nanostencil can be prepared by etching nanoapertures of predefined patterns into a waffer or ceramic membrane. In some embodiments, a nanoantenna array comprises plasmonic nanostructures or non-plasmonic nanostructures.

摘要翻译： 本发明一般涉及纳米天线阵列及其制造方法。 特别地，一个方面涉及包含预定图案中预定形状的纳米结构的纳米天线阵列，其导致表面等离子体激元的集体兴奋。 在一些实施方案中，纳米天线阵列可用于光谱学和纳米光谱学。 本发明的另一方面涉及一种纳米天线阵列的高通量制造方法，包括制造用于纳米尺度光刻（NSL）的可再利用纳米模板，其提供掩模以将材料沉积到几乎任何支撑物上，例如柔性和薄膜可拉伸支撑 。 纳米模版光刻方法能够在导电，非导电和磁性载体上实现高质量，高通量的纳米结构的制造。 可以通过将预定图案的纳米孔径蚀刻到瓦片或陶瓷膜中来制备纳米模板。 在一些实施方案中，纳米天线阵列包括等离子体激元纳米结构或非等离子体激元纳米结构。