公开(公告)号：US5117085A

公开(公告)日：1992-05-26

申请号：US579788

申请日：1990-09-10

Applicant: Dieter Fritz ,  Helmut Spruck

Inventor： Dieter Fritz ,  Helmut Spruck

IPC: H01J1/18 ,  H01J37/065

CPC classification number: H01J1/18 ,  H01J37/065

Abstract: The cathode holder 4 has two terminals 8, 9 which are rigidly connected to one another and together form a flange 20 which by means of a pressure bearing with spheres 27, 28 made of a ceramic material is supported in a carrier flange 3 connected to the control electrode 5. The spheres 27, 28 rest in rolling paths aligned in radial direction to the optical axis 14 and provide a centering of the cathode 7 with respect to the control electrode 6 which is independent of expansions.

Abstract translation: 阴极保持器4具有彼此刚性地连接并且一起形成凸缘20的两个端子8,9，凸缘20通过压力承载而由陶瓷材料制成的球体27,28被支撑在连接到 控制电极5.球体27,28保持在与光轴14径向对准的滚动路径中，并且相对于控制电极6提供与扩展无关的阴极7的定心。

公开(公告)号：US4622453A

公开(公告)日：1986-11-11

申请号：US624987

申请日：1984-06-27

Applicant: Helmut Spruck

Inventor： Helmut Spruck

IPC: H01J3/02 ,  H01J37/06 ,  H01J37/065 ,  H01J37/18 ,  H01J37/305 ,  B23K15/00

CPC classification number: H01J37/18 ,  H01J37/065 ,  H01J37/305

Abstract: An electron beam gun comprising a beam generator (4), an acceleration chamber (7) and a beam-guide chamber (10). The beam-guide chamber is formed by a jacket tube (19) and a beam-guide tube (18), which extends to the work chamber (1) and is surrounded by a focusing lens (15) and a deflecting device (17). For the purpose of readily adapting the equipment to suit various objective distances and for making cleaning and inspection easier, the jacket tube (19) takes the form of a hollow cylinder and is secured between two connecting flanges (20, 21) in a manner whereby it can be replaced. The upper connecting flange (20) carries a centering flange (28), on which the beam-guide tube is suspended, a shut-off valve (11) being optionally provided between the centering flange and the beam-guide tube. The lower connecting flange (21) surrounds a vacuum-connecting flange (34) in which is fitted the lower end of the beam-guide tube (18). Thus, when the beam generator (4) is removed, the beam-guide tube (18) can be extracted from the focusing lens (15) and from the deflector unit (17) through the acceleration chamber (7), together with the centering flange (28). The boundary between the vacuum and the atmosphere lies in the zone of the beam-guide tube (18) and of its various sealing elements.

Abstract translation: 一种包括光束发生器（4），加速室（7）和光束引导室（10）的电子束枪。 光束引导室由延伸到工作室（1）并被聚焦透镜（15）和偏转装置（17）包围的护套管（19）和光束引导管（18）形成， 。 为了容易地使设备适应各种客观距离并使得清洁和检查变得更容易，套管（19）采用中空圆柱体的形式并且以如下方式固定在两个连接凸缘（20,21）之间，从而 它可以更换。 上连接凸缘（20）承载定中心凸缘（28），梁导向管悬挂在该中心凸缘（28）上，可选地设置在定心凸缘和导梁之间的截止阀（11）。 下连接法兰（21）围绕真空连接法兰（34），其中安装有引导管（18）的下端。 因此，当光束发生器（4）被移除时，可以将引导管（18）与聚焦透镜（15）和偏转器单元（17）通过加速室（7）一起从中心位置 法兰（28）。 真空和大气之间的边界位于导光管（18）及其各种密封元件的区域中。

公开(公告)号：US4574178A

公开(公告)日：1986-03-04

申请号：US650403

申请日：1984-09-13

Applicant: Helmut Spruck

Inventor： Helmut Spruck

IPC: H01J37/065 ,  H01J37/248

CPC classification number: H01J37/248 ,  H01J37/065

Abstract: An electron gun with a beam generator 4, a high-voltage connection 25 and a high-voltage insulator 23 is equipped with at least one insulating transformer 26, 27 and circuit elements 43 for producing auxiliary voltages at high-voltage potential. The beam generator 4 and the high-voltage insulator 23. are surrounded by a grounded metallic jacket 32. The insulating transformer is arranged above the high-voltage insulator 23. For the purpose of solving the problem of permitting use of a single-pole high-voltage cable, the one or more insulating transformers 26, 27 are embedded in an insulating member 24 which is mounted directly on the high-voltage insulator 23. The portion of the insulating member 24 that projects beyond the grounded jacket 32 is surrounded by a metallic hood which, together with the jacket 32, forms a common Faraday cage. The circuit elements 43 for the auxiliary voltages are likewise arranged in the Faraday cage.

Abstract translation: 具有光束发生器4，高压连接25和高压绝缘体23的电子枪配备有至少一个绝缘变压器26,27和用于产生高电压电位的辅助电压的电路元件43。 光束发生器4和高压绝缘体23由接地的金属护套32围绕。绝缘变压器布置在高压绝缘体23的上方。为了解决允许使用单极高的问题 电压电缆，一个或多个绝缘变压器26,27嵌入直接安装在高压绝缘体23上的绝缘构件24中。突出超过接地护套32的绝缘构件24的部分被 与护套32一起形成公共法拉第笼的金属罩。 用于辅助电压的电路元件43同样布置在法拉第笼中。