公开(公告)号：US20180240645A1

公开(公告)日：2018-08-23

申请号：US15440111

申请日：2017-02-23

申请人： Hermes Microvision Inc.

发明人： HSUAN-BIN HUANG ,  CHUN-LIANG LU ,  CHIN-FA TU ,  WEN-SHENG LIN ,  YOU-JIN WANG

IPC分类号： H01J37/26 ,  H01J37/28 ,  H01J37/20 ,  G01B11/00

CPC分类号： H01J37/261 ,  G01B11/00 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/022 ,  H01J2237/20292 ,  H01J2237/28 ,  H01L21/67201 ,  H01L21/67265 ,  H01L21/67766

摘要： A load lock system for charged particle beam imaging with a particle shielding plate, a bottom seal plate and a plurality of sensor units is provided. The sensor units are located above the wafer, the shield plate is designed to have a few number of screws, and the bottom seal plate contains no cable, no contact sensors and fewer screws used. In the invention, the system is designed to improve the contamination particles from components in the load lock system of charged particle beam inspection tool and also to simplify its assembly.