公开(公告)号：US07716807B2

公开(公告)日：2010-05-18

申请号：US11481290

申请日：2006-07-05

申请人： Hideryo Matsudo ,  Shigeto Yotuya ,  Jun Katase ,  Takahiro Ohtsuka

发明人： Hideryo Matsudo ,  Shigeto Yotuya ,  Jun Katase ,  Takahiro Ohtsuka

IPC分类号： H04R31/00

CPC分类号： G01C19/5607 ,  H03H3/02 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/49005 ,  Y10T29/49156 ,  Y10T29/49574

摘要： A manufacturing method produces an angular velocity sensor element easily with a high degree of accuracy. The manufacturing method includes forming a number of tuning fork shaped crystal elements on a single crystal wafer by a photo-etching technique, the crystal elements having protrusion ridge line sections in the lengthwise direction of +X faces of the crystal, caused by etching anisotropy. A step is included for forming a metallic film on each side face including both principal planes and said +X face of said tuning fork shaped crystal element of the single crystal wafer. The method also includes dividing the metallic film of the +X face along the protrusion ridge line section and forming first and second sensor electrodes.

摘要翻译： 制造方法以高精度容易地产生角速度传感器元件。 该制造方法包括通过光蚀刻技术在单晶晶片上形成多个音叉形状的晶体元件，由蚀刻各向异性引起的晶体的+ X面长度方向具有突出脊线部分的晶体元件。 包括用于在包括单晶晶片的所述音叉形结晶元件的主平面和所述+ X面的每个侧面上形成金属膜的步骤。 该方法还包括沿着突起脊线部分划分+ X面的金属膜并形成第一和第二传感器电极。

公开(公告)号：US20060250051A1

公开(公告)日：2006-11-09

申请号：US11481290

申请日：2006-07-05

申请人： Hideryo Matsudo ,  Shigeto Yotuya ,  Jun Katase ,  Takahiro Ohtsuka

发明人： Hideryo Matsudo ,  Shigeto Yotuya ,  Jun Katase ,  Takahiro Ohtsuka

IPC分类号： H03H9/21

CPC分类号： G01C19/5607 ,  H03H3/02 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/49005 ,  Y10T29/49156 ,  Y10T29/49574

摘要： The present invention provides an angular velocity sensor element that can be produced easily with a high degree of accuracy, and a manufacturing method thereof. In the angular velocity sensor element of the present invention, the lengthwise direction of a tuning fork shaped crystal element is a Y axis of a crystal axis, the widthwise direction is an X axis and the depthwise direction is a Z axis, and mutually electrically separated first and second sensor electrodes for angular velocity detection are provided on at least one face among side faces of the tuning fork arm. The tuning fork shaped crystal element is formed from a single crystal wafer by a photo-etching technique, and the side face of the tuning fork arm on which the first and second sensor electrodes are formed is a +X face of the crystal, and the first and second sensor electrodes are arranged on both sides of a protrusion ridge line section on the +X face that occurs in the lengthwise direction of the side face due to crystallinity of the crystal.

公开(公告)号：US07075218B2

公开(公告)日：2006-07-11

申请号：US10959930

申请日：2004-10-06

申请人： Hideryo Matsudo ,  Shigeto Yotuya ,  Jun Katase ,  Takahiro Ohtsuka

发明人： Hideryo Matsudo ,  Shigeto Yotuya ,  Jun Katase ,  Takahiro Ohtsuka

IPC分类号： H01L41/08

CPC分类号： G01C19/5607 ,  H03H3/02 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/49005 ,  Y10T29/49156 ,  Y10T29/49574

摘要： The present invention provides an angular velocity sensor element that can be produced easily with a high degree of accuracy, and a manufacturing method thereof. In the angular velocity sensor element of the present invention, the lengthwise direction of a tuning fork shaped crystal element is a Y axis of a crystal axis, the widthwise direction is an X axis and the depthwise direction is a Z axis, and mutually electrically separated first and second sensor electrodes for angular velocity detection are provided on at least one face among side faces of the tuning fork arm. The tuning fork shaped crystal element is formed from a single crystal wafer by a photo-etching technique, and the side face of the tuning fork arm on which the first and second sensor electrodes are formed is a +X face of the crystal, and the first and second sensor electrodes are arranged on both sides of a protrusion ridge line section on the +X face that occurs in the lengthwise direction of the side face due to crystallinity of the crystal.

摘要翻译： 本发明提供一种能够以高精度容易地制造的角速度传感器元件及其制造方法。 在本发明的角速度传感器元件中，音叉形晶体的长度方向为晶轴的Y轴，宽度方向为X轴，深度方向为Z轴，并相互电隔离 用于角速度检测的第一传感器电极和第二传感器电极设置在音叉臂的侧面中的至少一个面上。 音叉形晶体元件由光刻技术由单晶晶片形成，并且其上形成有第一和第二传感器电极的音叉臂的侧面是晶体的+ X面，并且 第一传感器电极和第二传感器电极被布置在由于晶体的结晶性而在侧面的长度方向上出现的+ X面上的突起脊线部分的两侧。

公开(公告)号：US20050122006A1

公开(公告)日：2005-06-09

申请号：US10959930

申请日：2004-10-06

申请人： Hideryo Matsudo ,  Shigeto Yotuya ,  Jun Katase ,  Takahiro Ohtsuka

发明人： Hideryo Matsudo ,  Shigeto Yotuya ,  Jun Katase ,  Takahiro Ohtsuka

IPC分类号： G01C19/56 ,  G01C19/5628 ,  H01L41/08 ,  H01L41/18 ,  H01L41/22 ,  H01L41/29 ,  H01L41/332 ,  H03H3/02 ,  H03H9/21

CPC分类号： G01C19/5607 ,  H03H3/02 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/49005 ,  Y10T29/49156 ,  Y10T29/49574

摘要： The present invention provides an angular velocity sensor element that can be produced easily with a high degree of accuracy, and a manufacturing method thereof. In the angular velocity sensor element of the present invention, the lengthwise direction of a tuning fork shaped crystal element is a Y axis of a crystal axis, the widthwise direction is an X axis and the depthwise direction is a Z axis, and mutually electrically separated first and second sensor electrodes for angular velocity detection are provided on at least one face among side faces of the tuning fork arm. The tuning fork shaped crystal element is formed from a single crystal wafer by a photo-etching technique, and the side face of the tuning fork arm on which the first and second sensor electrodes are formed is a +X face of the crystal, and the first and second sensor electrodes are arranged on both sides of a protrusion ridge line section on the +X face that occurs in the lengthwise direction of the side face due to crystallinity of the crystal.

摘要翻译： 本发明提供一种能够以高精度容易地制造的角速度传感器元件及其制造方法。 在本发明的角速度传感器元件中，音叉形晶体的长度方向为晶轴的Y轴，宽度方向为X轴，深度方向为Z轴，并相互电隔离 用于角速度检测的第一传感器电极和第二传感器电极设置在音叉臂的侧面中的至少一个面上。 音叉形晶体元件由光刻技术由单晶晶片形成，并且其上形成有第一和第二传感器电极的音叉臂的侧面是晶体的+ X面，并且 第一传感器电极和第二传感器电极被布置在由于晶体的结晶性而在侧面的长度方向上出现的+ X面上的突起脊线部分的两侧。

公开(公告)号：US20050088250A1

公开(公告)日：2005-04-28

申请号：US10946889

申请日：2004-09-22

申请人： Hideryo Matsudo ,  Jun Katase

发明人： Hideryo Matsudo ,  Jun Katase

IPC分类号： G01C19/56 ,  G01C19/5628 ,  H01L41/08 ,  H01L41/18 ,  H01L41/22 ,  H01L41/312 ,  H01L41/332 ,  H03H3/02 ,  H03B5/30

CPC分类号： H03H3/02 ,  H03H9/21 ,  H03H2003/026

摘要： The present invention provides a tuning fork shaped oscillator, an angular velocity sensor element, and an angular velocity sensor with improved breaking strength with respect to CI and drive power, CI stability, and frequency stability. The present invention relates to a tuning fork shaped crystal oscillator of a configuration wherein two tuning fork shaped crystal elements that have been formed by wet etching during the process of forming the external shape of a tuning fork, in such a manner that the longitudinal direction of the tuning fork is aligned on the Y-axis of the crystalline axes (XYZ) and also the lateral direction thereof is aligned on the X-axis, are bonded together with the ±X-axis directions thereof oriented in opposite directions; and the right side surface of each of the two tuning fork shaped crystal elements is the +X face of the crystal when the two tuning fork shaped crystal elements are viewed in an upright attitude.

摘要翻译： 本发明提供了一种音叉形振荡器，角速度传感器元件和角速度传感器，其相对于CI和驱动功率，CI稳定性和频率稳定性具有改进的断裂强度。 本发明涉及一种音叉形晶体振荡器，其结构是在形成音叉的外部形状的过程中通过湿蚀刻形成的两个音叉形晶体元件， 音叉在晶轴（XYZ）的Y轴上并且其横向方向在X轴上对齐，并以相反方向的±X轴方向接合在一起; 并且当两个音叉形状的晶体元件的右侧表面以垂直姿态观看时，两个音叉形状的晶体元件是晶体的+ X面。

公开(公告)号：US20070085615A1

公开(公告)日：2007-04-19

申请号：US11637656

申请日：2006-12-12

申请人： Hideryo Matsudo ,  Jun Katase

发明人： Hideryo Matsudo ,  Jun Katase

IPC分类号： H03B5/30

CPC分类号： H03H3/02 ,  H03H9/21 ,  H03H2003/026

摘要： The present invention provides a tuning fork shaped oscillator, an angular velocity sensor element, and an angular velocity sensor with improved breaking strength with respect to CI and drive power, CI stability, and frequency stability. The present invention relates to a tuning fork shaped crystal oscillator of a configuration wherein two tuning fork shaped crystal elements that have been formed by wet etching during the process of forming the external shape of a tuning fork, in such a manner that the longitudinal direction of the tuning fork is aligned on the Y-axis of the crystalline axes (XYZ) and also the lateral direction thereof is aligned on the X-axis, are bonded together with the ±X-axis directions thereof oriented in opposite directions; and the right side surface of each of the two tuning fork shaped crystal elements is the +X face of the crystal when the two tuning fork shaped crystal elements are viewed in an upright attitude.

摘要翻译： 本发明提供了一种音叉形振荡器，角速度传感器元件和角速度传感器，其相对于CI和驱动功率，CI稳定性和频率稳定性具有改进的断裂强度。 本发明涉及一种音叉形晶体振荡器，其结构是在形成音叉的外部形状的过程中通过湿蚀刻形成的两个音叉形晶体元件， 音叉在晶轴（XYZ）的Y轴上并且其横向方向在X轴上对齐，并以相反方向的±X轴方向接合在一起; 并且当两个音叉形状的晶体元件的右侧表面以垂直姿态观看时，两个音叉形状的晶体元件是晶体的+ X面。

公开(公告)号：US07167061B2

公开(公告)日：2007-01-23

申请号：US10946889

申请日：2004-09-22

申请人： Hideryo Matsudo ,  Jun Katase

发明人： Hideryo Matsudo ,  Jun Katase

IPC分类号： H03B5/30

CPC分类号： H03H3/02 ,  H03H9/21 ,  H03H2003/026

摘要： The present invention provides a tuning fork shaped oscillator, an angular velocity sensor element, and an angular velocity sensor with improved breaking strength with respect to CI and drive power, CI stability, and frequency stability. The present invention relates to a tuning fork shaped crystal oscillator of a configuration wherein two tuning fork shaped crystal elements that have been formed by wet etching during the process of forming the external shape of a tuning fork, in such a manner that the longitudinal direction of the tuning fork is aligned on the Y-axis of the crystalline axes (XYZ) and also the lateral direction thereof is aligned on the X-axis, are bonded together with the ±X-axis directions thereof oriented in opposite directions; and the right side surface of each of the two tuning fork shaped crystal elements is the +X face of the crystal when the two tuning fork shaped crystal elements are viewed in an upright attitude.