公开(公告)号：US07041975B2

公开(公告)日：2006-05-09

申请号：US10944769

申请日：2004-09-21

申请人： Hirofumi Fukuyama ,  Takahiro Yuki

发明人： Hirofumi Fukuyama ,  Takahiro Yuki

IPC分类号： H01J32/282

CPC分类号： G01N23/203

摘要： A sample analyzer such as a Rutherford backscattering spectrometer for detecting ions that are elastically scattered by a sample is provided. A spectrum-measuring unit is shifted so that it can be positioned in accordance with a plurality of the scattering directions of the scattered ions in the sample analyzer. For example, the spectrum-measuring unit is shifted in an arc about the irradiation point of the ion beams along a guide rail. Alternatively, a vacuum container is composed of a fixed container holding the sample therein and a movable container hermitically and slidably connected to the fixed container and provided with detection ports. The movable container slides and thus the detection ports are shifted so that the detection ports can be positioned in accordance with the scattering directions. Accordingly, the detection ports, in turn, detection angles are easily changed, whereby a large sample can be analyzed.

摘要翻译： 提供了用于检测由样品弹性散射的离子的诸如卢瑟福背散射光谱仪的样品分析仪。 频谱测量单元被移位，使得其可以根据样本分析仪中的散射离子的多个散射方向定位。 例如，光谱测量单元围绕离子束的照射点沿导轨移动。 或者，真空容器由将样品保持在其中的固定容器和可移动容器以可滑动的方式连接到固定容器并设置有检测口。 可移动容器滑动，因此检测端口移动，使得检测端口可以根据散射方向定位。 因此，检测端口又能够容易地改变检测端口，从而可以分析大的样品。

公开(公告)号：US20050067567A1

公开(公告)日：2005-03-31

申请号：US10944769

申请日：2004-09-21

申请人： Hirofumi Fukuyama ,  Takahiro Yuki

发明人： Hirofumi Fukuyama ,  Takahiro Yuki

IPC分类号： G01N23/203 ,  G21K5/04 ,  G01N23/00 ,  G21K7/00

CPC分类号： G01N23/203

摘要： A sample analyzer such as a Rutherford backscattering spectrometer for detecting ions that are elastically scattered by a sample is provided. A spectrum-measuring unit is shifted so that it can be positioned in accordance with a plurality of the scattering directions of the scattered ions in the sample analyzer. For example, the spectrum-measuring unit is shifted in an arc about the irradiation point of the ion beams along a guide rail. Alternatively, a vacuum container is composed of a fixed container holding the sample therein and a movable container hermitically and slidably connected to the fixed container and provided with detection ports. The movable container slides and thus the detection ports are shifted so that the detection ports can be positioned in accordance with the scattering directions. Accordingly, the detection ports, in turn, detection angles are easily changed, whereby a large sample can be analyzed.

摘要翻译： 提供了用于检测由样品弹性散射的离子的诸如卢瑟福背散射光谱仪的样品分析仪。 频谱测量单元被移位，使得其可以根据样本分析仪中的散射离子的多个散射方向定位。 例如，光谱测量单元围绕离子束的照射点沿导轨移动。 或者，真空容器由将样品保持在其中的固定容器和可移动容器以可滑动的方式连接到固定容器并设置有检测口。 可移动容器滑动，因此检测端口移动，使得检测端口可以根据散射方向定位。 因此，检测端口又能够容易地改变检测端口，从而可以分析大的样品。

公开(公告)号：US6077053A

公开(公告)日：2000-06-20

申请号：US58185

申请日：1998-04-10

申请人： Takao Fujikawa ,  Takahiro Yuki ,  Yoshihiko Sakashita ,  Yutaka Narukawa ,  Itaru Masuoka

发明人： Takao Fujikawa ,  Takahiro Yuki ,  Yoshihiko Sakashita ,  Yutaka Narukawa ,  Itaru Masuoka

IPC分类号： F04B31/00 ,  F04B39/00 ,  F04B39/06 ,  F04B17/00

CPC分类号： F04B39/064 ,  F04B39/0005

摘要： It is intended to provide a piston type gas compressor capable of replacing a seal ring of a piston with a new one while preventing incorporation of metallic particles into a processing gas. A gas suction port 9 and a gas discharge port 10 are formed in a flange 2 of a cylinder 3 in communication with a gas compressing space H. With a plug 7 removed from an internally threaded hole 6A, a free piston 5, together with a seal ring 4, can be inserted into and removed from the cylinder 3 through the internally threaded hole 6A.

摘要翻译： 旨在提供一种活塞式气体压缩机，其能够用新的活塞代替活塞的密封环，同时防止金属颗粒结合到处理气体中。 在与气体压缩空间H连通的气缸3的凸缘2中形成气体吸入口9和气体排出口10.在从内螺纹孔6A除去塞子7的情况下，自由活塞5与 密封环4可以通过内螺纹孔6A插入和移出圆筒3。

公开(公告)号：US5979306A

公开(公告)日：1999-11-09

申请号：US47402

申请日：1998-03-25

申请人： Takao Fujikawa ,  Yutaka Narukawa ,  Itaru Masuoka ,  Takahiro Yuki ,  Yoshihiko Sakashita

发明人： Takao Fujikawa ,  Yutaka Narukawa ,  Itaru Masuoka ,  Takahiro Yuki ,  Yoshihiko Sakashita

IPC分类号： B01J3/00 ,  B01J3/03 ,  B01J3/04 ,  H01L21/314 ,  H01L21/324 ,  H01L21/768 ,  B30B15/34

CPC分类号： B01J3/008 ,  B01J3/03 ,  B01J3/04 ,  H01L21/314

摘要： A heating pressure processing apparatus in which gas sealing property and safety can be ensured, and economic property can be improved in heating pressure processing of workpieces such as Si wafers sheet by sheet. A processing vessel 1 formed of vessel components 2, 3 is divided into at least two parts or more in the axial direction thereof and has a seal ring 9 provided in the divided parts of the vessel components 2, parts 3 in such a manner as to be replaceable. The vessel components 2, 3 have shaped parts forming a processing space 5 for a workpiece 4 when the divided parts are sealed through the seal ring 9, the vessel components 2, 3 also having cooling means 10 for the seal ring 9. A ram is provided 18 for pressing the vessel components 2, 3 in the axial direction of the vessel in order to ensure the sealing in the divided parts; and a gas introducing device 20 is provided for introducing a pressurized gas to the processing space 5 in order to process the workpiece.

摘要翻译： 能够确保气体密封性和安全性的加热压力处理装置，并且可以逐张地提高诸如Si晶片的工件的加热压力加工的经济性。 由容器部件2,3形成的处理容器1在其轴向上被分成至少两部分以上，并且具有设置在容器部件2，部件3的分割部分中的密封环9， 可更换 容器部件2,3具有成形部件，当分隔部件通过密封环9密封时，形成工件4的处理空间5，容器部件2,3也具有用于密封环9的冷却装置10。 设置用于在容器的轴向方向上按压容器部件2,3，以确保分割部分的密封; 并且设置有用于将加压气体引入处理空间5以便处理工件的气体引入装置20。