公开(公告)号：US09682532B2

公开(公告)日：2017-06-20

申请号：US13880803

申请日：2011-10-19

申请人： Atsushi Kubo ,  Hirofumi Imai ,  Koki Tamura ,  Takahiro Yoshioka ,  Yasushi Fujii ,  Yoshihiro Inao

发明人： Atsushi Kubo ,  Hirofumi Imai ,  Koki Tamura ,  Takahiro Yoshioka ,  Yasushi Fujii ,  Yoshihiro Inao

IPC分类号： B32B7/06 ,  B32B27/30 ,  B32B7/12 ,  B32B43/00 ,  H01L21/683 ,  H01L31/18

CPC分类号： B32B7/06 ,  B32B7/12 ,  B32B27/308 ,  B32B43/006 ,  B32B2307/40 ,  B32B2457/00 ,  H01L21/6835 ,  H01L31/1896 ,  H01L2221/68318 ,  H01L2221/68327 ,  H01L2221/68381 ,  Y02E10/50 ,  Y10T156/1153 ,  Y10T428/31786 ,  Y10T428/31935

摘要： A laminate including a supporting member which is light transmissive; a supported substrate which is supported by the supporting member; an adhesive layer which is provided on a surface of the supported substrate on which surface the supported substrate is supported by the supporting member; and a release layer, which (i) is provided between the supporting member and the supported substrate and (ii) contains a polymer including, in a repeating unit, a structure having a light absorption property, a property of the polymer being changed when the polymer absorbs light irradiated via the supporting member.

公开(公告)号：US20140311680A1

公开(公告)日：2014-10-23

申请号：US13880803

申请日：2011-10-19

申请人： Atsushi Kubo ,  Hirofumi Imai ,  Koki Tamura ,  Takahiro Yoshioka ,  Yasushi Fujii ,  Yoshihiro Inao

发明人： Atsushi Kubo ,  Hirofumi Imai ,  Koki Tamura ,  Takahiro Yoshioka ,  Yasushi Fujii ,  Yoshihiro Inao

IPC分类号： B32B7/06 ,  B32B7/12 ,  B32B27/30 ,  B32B43/00

CPC分类号： B32B7/06 ,  B32B7/12 ,  B32B27/308 ,  B32B43/006 ,  B32B2307/40 ,  B32B2457/00 ,  H01L21/6835 ,  H01L31/1896 ,  H01L2221/68318 ,  H01L2221/68327 ,  H01L2221/68381 ,  Y02E10/50 ,  Y10T156/1153 ,  Y10T428/31786 ,  Y10T428/31935

摘要： A laminate including a supporting member which is light transmissive; a supported substrate which is supported by the supporting member; an adhesive layer which is provided on a surface of the supported substrate on which surface the supported substrate is supported by the supporting member; and a release layer, which (i) is provided between the supporting member and the supported substrate and (ii) contains a polymer including, in a repeating unit, a structure having a light absorption property, a property of the polymer being changed when the polymer absorbs light irradiated via the supporting member.

摘要翻译： 一种层压体，其包括透光性的支撑构件; 由支撑构件支撑的支撑基板; 粘合层，其设置在所述被支撑基板的表面上，所述支撑基板的表面由所述支撑部件支撑在所述表面上; 和释放层，其中（i）设置在支撑构件和被支撑基板之间，（ii）包含聚合物，其以重复单元形式包含具有光吸收特性的结构，当聚合物的特性在 聚合物吸收通过支撑构件照射的光。

公开(公告)号：US20120118511A1

公开(公告)日：2012-05-17

申请号：US13290412

申请日：2011-11-07

申请人： Hirofumi Imai ,  Koki Tamura ,  Atsushi Kubo ,  Takahiro Yoshioka ,  Yasushi Fujii ,  Yoshihiro Inao

发明人： Hirofumi Imai ,  Koki Tamura ,  Atsushi Kubo ,  Takahiro Yoshioka ,  Yasushi Fujii ,  Yoshihiro Inao

IPC分类号： B32B38/10 ,  B32B7/06 ,  B32B9/04

CPC分类号： B32B43/006 ,  B32B38/10 ,  B32B2310/0825 ,  B32B2457/14 ,  C08G77/14 ,  H01L21/6835 ,  H01L2221/68318 ,  H01L2221/68327 ,  H01L2221/68381 ,  Y10T156/1158 ,  Y10T156/1195 ,  Y10T428/31663

摘要： A laminate including a supporter which transmits infrared; a substrate supported by the supporter; an adhesive layer via which the supporter and the substrate are attached to each other; and a separation layer, positioned on a surface of the supporter to which surface the substrate is attached, and made of a compound having an infrared-absorbing structure.

摘要翻译： 包括透射红外线的支撑体的层压体; 由支撑体支撑的基板; 粘合层，支撑体和基板通过该粘合层彼此附接; 以及分离层，其位于与所述基板的表面相连的所述支撑体的表面上，并且由具有红外线吸收结构的化合物制成。

公开(公告)号：US08298365B2

公开(公告)日：2012-10-30

申请号：US12796872

申请日：2010-06-09

申请人： Hirofumi Imai ,  Koki Tamura ,  Takahiro Asai ,  Takahiro Yoshioka ,  Yoshihiro Inao

发明人： Hirofumi Imai ,  Koki Tamura ,  Takahiro Asai ,  Takahiro Yoshioka ,  Yoshihiro Inao

IPC分类号： B32B38/10 ,  B32B37/12

CPC分类号： C09J5/00 ,  B32B37/12 ,  B32B2457/14 ,  H01L21/67132 ,  H01L21/6836 ,  H01L2221/68318 ,  H01L2221/68327 ,  H01L2221/68381 ,  Y10T156/1111 ,  Y10T156/16

摘要： A sticking method for sticking a support plate onto a substrate in such a way that the support plate can be removed in quickly and easily is provided. The sticking method according to the present invention includes the step of sticking a support plate 3 onto a wafer 2 via a first adhesive layer 4 provided on the wafer 2, a separate film 5 provided on the first adhesive layer 4, and a second adhesive layer 6, provided on the separation film layer 5, which either is higher in rate of dissolution in a solution than the first adhesive layer 4 or dissolves in a solvent different from the solvent in which the first adhesive layer 4 dissolves.

摘要翻译： 提供了一种用于将支撑板粘贴到基板上以使得能够快速且容易地移除支撑板的方式的粘贴方法。 根据本发明的粘贴方法包括通过设置在晶片2上的第一粘合层4，设置在第一粘合剂层4上的分离膜5和第二粘合剂层将支撑板3粘贴到晶片2上的步骤 6，设置在分离膜层5上，或者溶解在比第一粘合剂层4溶解的溶解速度高的溶剂中，或溶解在与第一粘合层4溶解的溶剂不同的溶剂中。

公开(公告)号：US08354157B2

公开(公告)日：2013-01-15

申请号：US12794096

申请日：2010-06-04

申请人： Hirofumi Imai ,  Koki Tamura ,  Takahiro Asai ,  Takahiro Yoshioka ,  Yoshihiro Inao

发明人： Hirofumi Imai ,  Koki Tamura ,  Takahiro Asai ,  Takahiro Yoshioka ,  Yoshihiro Inao

IPC分类号： B32B3/02 ,  B32B37/00 ,  G03F7/20

CPC分类号： B32B38/06 ,  B32B2309/105 ,  B32B2457/14 ,  H01L21/67132 ,  H01L21/6836 ,  H01L21/68757 ,  H01L2221/68318 ,  Y10T428/24091 ,  Y10T428/24149 ,  Y10T428/24174 ,  Y10T428/24793 ,  Y10T428/24802

摘要： This invention provides a support plate which makes it possible to stably perform a step for separating from a support plate a wafer which has been processed while preventing delay in time taken for this step. The support plate of this invention is a support plate for supporting a substrate via an adhesive, including: a plate-shaped part having a surface which is in contact with the adhesive; and at least one spacer provided on the surface which is in contact with the adhesive.

摘要翻译： 本发明提供了一种支撑板，其使得可以稳定地执行从支撑板分离已经被处理的晶片的步骤，同时防止该步骤所花费的时间延迟。 本发明的支撑板是用于通过粘合剂支撑基底的支撑板，包括：具有与粘合剂接触的表面的板状部分; 以及设置在与粘合剂接触的表面上的至少一个间隔物。

公开(公告)号：US20100314043A1

公开(公告)日：2010-12-16

申请号：US12796872

申请日：2010-06-09

申请人： Hirofumi IMAI ,  Koki Tamura ,  Takahiro Asai ,  Takahiro Yoshioka ,  Yoshihiro Inao

发明人： Hirofumi IMAI ,  Koki Tamura ,  Takahiro Asai ,  Takahiro Yoshioka ,  Yoshihiro Inao

IPC分类号： B32B37/12

CPC分类号： C09J5/00 ,  B32B37/12 ,  B32B2457/14 ,  H01L21/67132 ,  H01L21/6836 ,  H01L2221/68318 ,  H01L2221/68327 ,  H01L2221/68381 ,  Y10T156/1111 ,  Y10T156/16

摘要： A sticking method for sticking a support plate onto a substrate in such a way that the support plate can be removed in quickly and easily is provided. The sticking method according to the present invention includes the step of sticking a support plate 3 onto a wafer 2 via a first adhesive layer 4 provided on the wafer 2, a separate film 5 provided on the first adhesive layer 4, and a second adhesive layer 6, provided on the separation film layer 5, which either is higher in rate of dissolution in a solution than the first adhesive layer 4 or dissolves in a solvent different from the solvent in which the first adhesive layer 4 dissolves.

摘要翻译： 提供了一种用于将支撑板粘贴到基板上以使得能够快速且容易地移除支撑板的方式的粘贴方法。 根据本发明的粘贴方法包括通过设置在晶片2上的第一粘合层4，设置在第一粘合剂层4上的分离膜5和第二粘合剂层将支撑板3粘贴到晶片2上的步骤 6，设置在分离膜层5上，或者溶解在比第一粘合剂层4溶解的溶解速度高的溶剂中，或溶解在与第一粘合层4溶解的溶剂不同的溶剂中。

公开(公告)号：US20130220554A1

公开(公告)日：2013-08-29

申请号：US13880802

申请日：2011-08-25

申请人： Yoshihiro Inao ,  Yasushi Fujii ,  Atsushi Matsushita ,  Koki Tamura ,  Atsushi Kubo

发明人： Yoshihiro Inao ,  Yasushi Fujii ,  Atsushi Matsushita ,  Koki Tamura ,  Atsushi Kubo

IPC分类号： H01L21/78 ,  H01L23/00

CPC分类号： H01L21/7813 ,  B32B7/06 ,  C03C17/3452 ,  H01L21/6835 ,  H01L23/562 ,  H01L2221/68318 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2221/68381 ,  H01L2924/0002 ,  Y10T156/1158 ,  H01L2924/00

摘要： A laminate including a supporting member which is light transmissive; a supported substrate supported by the supporting member; an adhesive layer provided on a surface of the supported substrate which surface faces toward the supporting member; and a release layer which is made of a fluorocarbon and is provided between the supporting member and the supported substrate, the release layer having a property that changes when it absorbs light coming through the supporting member.

摘要翻译： 一种层压体，其包括透光性的支撑构件; 由支撑构件支撑的支撑基板; 所述粘合剂层设置在所述被支撑基板的表面朝向所述支撑部件的表面上; 以及由碳氟化合物制成并且设置在所述支撑构件和所述被支撑基板之间的剥离层，所述剥离层具有当吸收通过所述支撑构件的光时变化的性质。

公开(公告)号：US09492986B2

公开(公告)日：2016-11-15

申请号：US13881114

申请日：2011-10-07

申请人： Yoshihiro Inao ,  Yasushi Fujii ,  Atsushi Matsushita ,  Koki Tamura ,  Atsushi Kubo

发明人： Yoshihiro Inao ,  Yasushi Fujii ,  Atsushi Matsushita ,  Koki Tamura ,  Atsushi Kubo

IPC分类号： B32B38/10 ,  B32B7/06 ,  B32B43/00 ,  H01L21/683 ,  B32B7/12 ,  B32B9/04 ,  B32B15/04 ,  B32B17/06

CPC分类号： B32B7/06 ,  B32B7/12 ,  B32B9/04 ,  B32B15/04 ,  B32B17/06 ,  B32B17/061 ,  B32B43/006 ,  H01L21/6835 ,  H01L2221/68327 ,  H01L2221/6834 ,  Y10T156/1158 ,  Y10T428/30 ,  Y10T428/31678

摘要： A laminate including a supporting member which is light transmissive; a supported substrate supported by the supporting member; an adhesive layer provided on a surface of the supported substrate which surface faces toward the supporting member; and a release layer which is made of an inorganic material and is provided between the supporting member and the supported substrate, the release layer having a property that changes when the release layer absorbs light coming through the supporting layer, and the release layer having a flat surface which faces the adhesive layer.

摘要翻译： 一种层压体，其包括透光性的支撑构件; 由支撑构件支撑的支撑基板; 所述粘合剂层设置在所述被支撑基板的表面朝向所述支撑部件的表面上; 以及剥离层，其由无机材料制成并且设置在所述支撑构件和所述被支撑基板之间，所述剥离层具有当所述剥离层吸收通过所述支撑层的光时变化的性质，并且所述剥离层具有平坦 面向粘合剂层的表面。

公开(公告)号：US09048311B2

公开(公告)日：2015-06-02

申请号：US13880802

申请日：2011-08-25

申请人： Yoshihiro Inao ,  Yasushi Fujii ,  Atsushi Matsushita ,  Koki Tamura ,  Atsushi Kubo

发明人： Yoshihiro Inao ,  Yasushi Fujii ,  Atsushi Matsushita ,  Koki Tamura ,  Atsushi Kubo

IPC分类号： B32B38/10 ,  B32B17/06 ,  H01L21/78 ,  H01L21/683 ,  H01L23/00 ,  B32B7/06 ,  C03C17/34

CPC分类号： H01L21/7813 ,  B32B7/06 ,  C03C17/3452 ,  H01L21/6835 ,  H01L23/562 ,  H01L2221/68318 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2221/68381 ,  H01L2924/0002 ,  Y10T156/1158 ,  H01L2924/00

摘要： A laminate including a supporting member which is light transmissive; a supported substrate supported by the supporting member; an adhesive layer provided on a surface of the supported substrate which surface faces toward the supporting member; and a release layer which is made of a fluorocarbon and is provided between the supporting member and the supported substrate, the release layer having a property that changes when it absorbs light coming through the supporting member.

摘要翻译： 一种层压体，其包括透光性的支撑构件; 由支撑构件支撑的支撑基板; 所述粘合剂层设置在所述被支撑基板的表面朝向所述支撑部件的表面上; 以及由碳氟化合物制成并且设置在所述支撑构件和所述被支撑基板之间的剥离层，所述剥离层具有当吸收通过所述支撑构件的光时变化的性质。

公开(公告)号：US20130213582A1

公开(公告)日：2013-08-22

申请号：US13881114

申请日：2011-10-07

申请人： Yoshihiro Inao ,  Yasushi Fujii ,  Atsushi Matsushita ,  Koki Tamura ,  Atsushi Kubo

发明人： Yoshihiro Inao ,  Yasushi Fujii ,  Atsushi Matsushita ,  Koki Tamura ,  Atsushi Kubo

IPC分类号： B32B7/06 ,  B32B9/04 ,  B32B15/04 ,  B32B7/12 ,  B32B17/06

CPC分类号： B32B7/06 ,  B32B7/12 ,  B32B9/04 ,  B32B15/04 ,  B32B17/06 ,  B32B17/061 ,  B32B43/006 ,  H01L21/6835 ,  H01L2221/68327 ,  H01L2221/6834 ,  Y10T156/1158 ,  Y10T428/30 ,  Y10T428/31678

摘要： A laminate including a supporting member which is light transmissive; a supported substrate supported by the supporting member; an adhesive layer provided on a surface of the supported substrate which surface faces toward the supporting member; and a release layer which is made of an inorganic material and is provided between the supporting member and the supported substrate, the release layer having a property that changes when the release layer absorbs light coming through the supporting layer, and the release layer having a flat surface which faces the adhesive layer.

摘要翻译： 一种层压体，其包括透光性的支撑构件; 由支撑构件支撑的支撑基板; 所述粘合剂层设置在所述被支撑基板的表面朝向所述支撑部件的表面上; 以及剥离层，其由无机材料制成并且设置在所述支撑构件和所述被支撑基板之间，所述剥离层具有当所述剥离层吸收通过所述支撑层的光时变化的性质，并且所述剥离层具有平坦 面向粘合剂层的表面。