公开(公告)号：US20090173278A1

公开(公告)日：2009-07-09

申请号：US11989670

申请日：2007-02-23

申请人： Yasuzou Tanaka ,  Junpei Yuyama ,  Mitsuru Yahagi ,  Hirofumi Minami

发明人： Yasuzou Tanaka ,  Junpei Yuyama ,  Mitsuru Yahagi ,  Hirofumi Minami

IPC分类号： B05C13/00

CPC分类号： H01L21/682 ,  G03F7/70716 ,  G03F7/70791 ,  G03F7/70975

摘要： To obtain a stage apparatus that can be divided for land transportation and can properly treat a substrate to be treated, the present invention provides a stage apparatus including a substrate holding plane which holds a substrate to be treated W, a pair of guide frames (13X) oppositely disposed with the substrate holding plane sandwiched therebetween, a gantry (13Y) which extends over the pair of guide frames (13X) and which is movably held by the pair of guide frames (13X), and a substrate treatment unit (14) which is disposed on the gantry (13Y). The guide frames (13X) each are composed of a connected structure of a main frame portion (15A) which forms a moving path (work region R1) of the gantry (13Y) necessary for the substrate treatment unit (14) to perform a substrate treatment, and a sub frame portion (15B) which is connected to one end portion or both end portions in a longitudinal direction of the main frame portion (15A) and which forms a moving path to a non-work position (non-work region R2) of the gantry (13Y).

摘要翻译： 为了获得可以分割用于陆路运输并且可以适当地处理待处理的基板的台架装置，本发明提供了一种台架装置，其包括保持要处理的基板W的基板保持平面，一对引导框架（13X ），所述台架（13Y）在所述一对引导框架（13X）上延伸并且被所述一对引导框架（13X）可移动地保持;以及基板处理单元， 其设置在台架（13Y）上。 引导框架（13X）各自由形成基板处理单元（14）所需的台架（13Y）的移动路径（工作区域R1）的主框架部分（15A）的连接结构构成，以执行基板 处理，以及子框架部分（15B），其连接到主框架部分（15A）的纵向方向上的一个端部或两个端部，并且形成到非工作位置的移动路径（非工作区域 R2）（13Y）。

公开(公告)号：US20050286993A1

公开(公告)日：2005-12-29

申请号：US11167584

申请日：2005-06-28

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B25J9/06 ,  B25J9/10

CPC分类号： B25J9/1065 ,  H01L21/67742 ,  Y10T74/20305 ,  Y10T74/20329

摘要： A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.

摘要翻译： 一种能够将旋转马达的旋转驱动力适当地传递到运送臂并能够正确地检测旋转驱动轴的旋转角度的输送装置，由此将运送单元中运送的物体运送到正确的位置。 输送装置包括：具有气密结构的壳体; 第一至第三驱动轴，其设置在所述壳体中以能够围绕预定同轴旋转轴独立地旋转; 永磁体分别设置在第一至第三驱动轴的预定位置; 以及设置在壳体中以对应于各个永磁体的电磁线圈。 基于规定的信息，向电磁线圈提供驱动电流，以使第一至第三驱动轴移动。 要被运送的物体被固定在第一至第三驱动轴上的第一和第二连杆传送。

公开(公告)号：US20100146762A1

公开(公告)日：2010-06-17

申请号：US12710759

申请日：2010-02-23

申请人： Yasuzo TANAKA ,  Junpei Yuyama ,  Mitsuru Yahagi ,  Hirofumi Minami ,  Makoto Takahashi ,  Shinya Ito

发明人： Yasuzo TANAKA ,  Junpei Yuyama ,  Mitsuru Yahagi ,  Hirofumi Minami ,  Makoto Takahashi ,  Shinya Ito

IPC分类号： B23P19/00

CPC分类号： B41J2/14 ,  B41J2002/14362 ,  Y10T29/49778 ,  Y10T29/4978 ,  Y10T29/49817 ,  Y10T29/49895 ,  Y10T29/49899

摘要： An assembling method that is high in assembly accuracy and easily performed at the actual installation site is provided. In this method, the sub base plates on the sub mounting tables are aligned with respect to a main base plate on a main mounting table at a temporary installation site, and the state thereof is maintained. Then, the main mounting table and the sub mounting tables are separated from each other to be transferred to the actual installation site, and the positioning state is restored at the actual installation site. Since a positional alignment can be performed at the temporary installation site, the work required at the actual installation site can be reduced. Furthermore, since a fine adjustment can be performed at the actual installation site, the accuracy in the positional alignment can be improved.

摘要翻译： 提供了一种装配精度高且在实际安装地点容易执行的组装方法。 在该方法中，副安装台上的副底板在临时安装位置的主安装台上相对于主基板对准，并且保持其状态。 然后，主安装台和副安装台彼此分离，传送到实际安装地点，并在实际安装地点恢复定位状态。 由于可以在临时安装地点进行位置对准，因此可以减少实际安装地点所需的工作。 此外，由于可以在实际安装地点进行微调，可以提高位置对准的精度。

公开(公告)号：US20050232744A1

公开(公告)日：2005-10-20

申请号：US11095649

申请日：2005-04-01

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B25J9/06 ,  B25J9/10 ,  B25J13/00 ,  B25J17/00 ,  B65G49/07 ,  B66C23/00 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01L21/68707 ,  B25J9/107 ,  Y10T74/20305

摘要： A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage includes a second arm and the third arm that can be rotated around the coaxial rotary shaft of the first through third driving shafts, and transports a second carrier. The first and second linkages are arranged to allow the first and second carriers to move beyond the coaxial rotary shaft of the first through third driving shafts without interfering with each other.

摘要翻译： 输送装置包括第一和第二连杆。 第一连杆机构包括第一和第三臂，其可以围绕同轴布置的第一至第三驱动轴的同轴旋转轴旋转，并且运送第一行星架。 第二连杆机构包括可绕第一至第三驱动轴的同轴旋转轴旋转的第二臂和第三臂，并且运送第二行星架。 第一和第二连杆被布置成允许第一和第二托架移动超过第一至第三驱动轴的同轴旋转轴而不会彼此干涉。

公开(公告)号：US20050095112A1

公开(公告)日：2005-05-05

申请号：US10998057

申请日：2004-11-29

申请人： Hirofumi Minami ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Junpei Yuyama

IPC分类号： H01L21/68 ,  B65G47/90 ,  B65G49/07 ,  H01L21/677 ,  B66C23/00

CPC分类号： B65G47/905 ,  B65G47/904 ,  H01L21/67742 ,  Y10S414/13 ,  Y10S414/139

摘要： This invention provides a transport apparatus having a simple configuration that can reduce its turning radius and transport semiconductor devices at high speed. The transport apparatus comprising the first and second arms having at a first end of each thereof a rotary drive shaft being arranged coaxially, and third and fourth arms rotatably linked at respective the first ends thereof to the respective second ends of the first and second arms. The second ends of the third and fourth arms are supported around centers of coaxially arranged spindles, respectively. The transport apparatus further comprises an articulating mechanism having an attitude control mechanism adapted to apply rotary forces with opposite phases to the respective spindles arranged at the third and fourth arms.

公开(公告)号：US5184072A

公开(公告)日：1993-02-02

申请号：US762381

申请日：1991-09-19

申请人： Junpei Yuyama ,  Qiquan Geng ,  Kazunori Chihara ,  Hirofumi Minami ,  Eiichi Goto

发明人： Junpei Yuyama ,  Qiquan Geng ,  Kazunori Chihara ,  Hirofumi Minami ,  Eiichi Goto

IPC分类号： G01R33/035 ,  G01R33/12 ,  H01L39/22

CPC分类号： G01R33/0358 ,  Y10S505/845

摘要： A magnetic field measurement system including a pick-up coil is not moved but fixed. Strips of superconducting material are arranged in a plane with narrow slits between the strips. The strips are moved very near the pick-up coil along the plane. From output variations of a SQUID magnetometer during the movement, a magnitude of a static field perpendicular to the plane of the strips is obtained.

摘要翻译： 包括拾取线圈的磁场测量系统不移动但固定。 超导材料条布置在条带之间具有狭窄狭缝的平面中。 条带沿着平面非常靠近拾取线圈移动。 从运动过程中SQUID磁力计的输出变化，获得垂直于带平面的静态场的大小。

公开(公告)号：US08286318B2

公开(公告)日：2012-10-16

申请号：US12710759

申请日：2010-02-23

申请人： Yasuzo Tanaka ,  Junpei Yuyama ,  Mitsuru Yahagi ,  Hirofumi Minami ,  Makoto Takahashi ,  Shinya Ito

发明人： Yasuzo Tanaka ,  Junpei Yuyama ,  Mitsuru Yahagi ,  Hirofumi Minami ,  Makoto Takahashi ,  Shinya Ito

IPC分类号： B23Q17/00 ,  B23P19/00 ,  A47B11/00

CPC分类号： B41J2/14 ,  B41J2002/14362 ,  Y10T29/49778 ,  Y10T29/4978 ,  Y10T29/49817 ,  Y10T29/49895 ,  Y10T29/49899

摘要： An assembling method that is high in assembly accuracy and easily performed at the actual installation site is provided. In this method, the sub base plates on the sub mounting tables are aligned with respect to a main base plate on a main mounting table at a temporary installation site, and the state thereof is maintained. Then, the main mounting table and the sub mounting tables are separated from each other to be transferred to the actual installation site, and the positioning state is restored at the actual installation site. Since a positional alignment can be performed at the temporary installation site, the work required at the actual installation site can be reduced. Furthermore, since a fine adjustment can be performed at the actual installation site, the accuracy in the positional alignment can be improved.

摘要翻译： 提供了一种装配精度高且在实际安装地点容易执行的组装方法。 在该方法中，副安装台上的副底板在临时安装位置的主安装台上相对于主基板对准，并且保持其状态。 然后，主安装台和副安装台彼此分离，传送到实际安装地点，并在实际安装地点恢复定位状态。 由于可以在临时安装地点进行位置对准，因此可以减少实际安装地点所需的工作。 此外，由于可以在实际安装地点进行微调，可以提高位置对准的精度。

公开(公告)号：US07645112B2

公开(公告)日：2010-01-12

申请号：US11167584

申请日：2005-06-28

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B66C23/00

CPC分类号： B25J9/1065 ,  H01L21/67742 ,  Y10T74/20305 ,  Y10T74/20329

摘要： A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.

摘要翻译： 一种能够将旋转马达的旋转驱动力适当地传递到运送臂并能够正确地检测旋转驱动轴的旋转角度的输送装置，由此将运送单元中运送的物体运送到正确的位置。 输送装置包括：具有气密结构的壳体; 第一至第三驱动轴，其设置在所述壳体中以能够围绕预定同轴旋转轴独立地旋转; 永磁体分别设置在第一至第三驱动轴的预定位置; 以及设置在壳体中以对应于各个永磁体的电磁线圈。 基于规定的信息，向电磁线圈提供驱动电流，以使第一至第三驱动轴移动。 要被运送的物体被固定在第一至第三驱动轴上的第一和第二连杆传送。

公开(公告)号：US07572093B2

公开(公告)日：2009-08-11

申请号：US11095649

申请日：2005-04-01

申请人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Kenji Ago ,  Takafumi Kawaguchi ,  Toshio Koike ,  Junpei Yuyama

IPC分类号： B25J18/02

CPC分类号： H01L21/68707 ,  B25J9/107 ,  Y10T74/20305

摘要： A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage includes a second arm and the third arm that can be rotated around the coaxial rotary shaft of the first through third driving shafts, and transports a second carrier. The first and second linkages are arranged to allow the first and second carriers to move beyond the coaxial rotary shaft of the first through third driving shafts without interfering with each other.

摘要翻译： 输送装置包括第一和第二连杆。 第一连杆机构包括第一和第三臂，其可以围绕同轴布置的第一至第三驱动轴的同轴旋转轴旋转，并且运送第一行星架。 第二连杆机构包括可绕第一至第三驱动轴的同轴旋转轴旋转的第二臂和第三臂，并且运送第二行星架。 第一和第二连杆被布置成允许第一和第二托架移动超过第一至第三驱动轴的同轴旋转轴而不彼此干涉。

公开(公告)号：US06840732B2

公开(公告)日：2005-01-11

申请号：US09983140

申请日：2001-10-23

申请人： Hirofumi Minami ,  Junpei Yuyama

发明人： Hirofumi Minami ,  Junpei Yuyama

IPC分类号： H01L21/68 ,  B65G47/90 ,  B65G49/07 ,  H01L21/677

CPC分类号： B65G47/905 ,  B65G47/904 ,  H01L21/67742 ,  Y10S414/13 ,  Y10S414/139

摘要： This invention provides a transport apparatus having a simple configuration that can reduce its turning radius and transport semiconductor devices at high speed. The transport apparatus comprising the first and second arms having at a first end of each thereof a rotary drive shaft being arranged coaxially, and third and fourth arms rotatably linked at respective the first ends thereof to the respective second ends of the first and second arms. The second ends of the third and fourth arms are supported around centers of coaxially arranged spindles, respectively. The transport apparatus further comprises an articulating mechanism having an attitude control mechanism adapted to apply rotary forces with opposite phases to the respective spindles arranged at the third and fourth arms.

摘要翻译： 本发明提供一种输送装置，其具有可以降低其转弯半径并且高速运送半导体装置的简单结构。 所述输送装置包括第一臂和第二臂，其第一臂和第二臂的第一端具有同轴布置的旋转驱动轴，第三臂和第四臂可旋转地连接到第一和第二臂的相应第二端。 第三和第四臂的第二端分别支撑在同轴布置的心轴的中心附近。 输送装置还包括一个铰接机构，其具有一个姿态控制机构，该姿态控制机构适于将相反相位的旋转力施加到布置在第三和第四臂处的相应主轴。